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    • 2. 发明授权
    • In-situ diffusion of dopant impurities during dendritic web growth of
crystal ribbon
    • 晶体生长期间掺杂杂质的原位扩散
    • US06143633A
    • 2000-11-07
    • US725454
    • 1996-10-04
    • Balakrishnan R Bathey
    • Balakrishnan R Bathey
    • C30B15/04C30B15/34C30B29/64H01L31/18C30D15/04
    • C30B15/04C30B15/34H01L31/1804Y02E10/547Y02P70/521
    • A dendritic web formation process and apparatus for diffusing dopant impurities into a growing dendritic crystal web to produce photovoltaic cells. A solid dopant diffusion source is arranged in a holder mounted in a vertical thermal element either within the melt furnace or outside the furnace adjacent the furnace exit port. The solid diffusion source is heated by thermal conduction from the vertical thermal element and source holder using the furnace heat as a source. Auxiliary heater coils are optionally provided around the vertical thermal element to control the temperature of the solid diffusion source. The source and holder can also be mounted outside the furnace adjacent the exit port and heated using a secondary rapid temperature external heater. The growing dendritic crystal web is exposed to the dopant impurities as part of the web growing process, eliminating the need for a separate diffusion gaseous station and processing.
    • 用于将掺杂剂杂质扩散到生长的树枝状晶体网中以产生光伏电池的树枝状网状物形成工艺和装置。 固体掺杂剂扩散源被布置在安装在熔融炉内的垂直热元件中或与炉出口相邻的炉外部的保持器中。 固体扩散源通过使用炉热作为源的垂直热元件和源保持器的热传导来加热。 辅助加热器线圈可选地围绕垂直热元件设置以控制固体扩散源的温度。 源和保持器也可以安装在靠近出口的炉外,并使用二次快速温度的外部加热器进行加热。 生长的树枝状晶体网作为卷材生长过程的一部分暴露于掺杂杂质,消除了单独的扩散气体站和处理的需要。