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    • 5. 发明授权
    • Apparatus and method for high-efficiency, in-situ particle detection
    • 用于高效,原位颗粒检测的装置和方法
    • US5481357A
    • 1996-01-02
    • US201732
    • 1994-03-03
    • Aziz M. AhsanKianoush BeyzaviNagaraja P. Rao
    • Aziz M. AhsanKianoush BeyzaviNagaraja P. Rao
    • G01N1/22G01N15/02G01N15/14G01N21/53G01N21/00
    • G01N15/0205G01N2001/225G01N2015/0238G01N2015/1413G01N21/53
    • The present invention relates generally to a new apparatus and a method for a high-efficiency in-situ vacuum particle detection. More particularly, the invention encompasses an apparatus for a particle detecting instrument designed to detect the presence of gas-borne particles in a vacuum line with high efficiency, using a sharply converging nozzle to preferentially focus the suspended particles flowing through it into a small region located on the nozzle axis within a few exit dimensions downstream from the nozzle exit. This focal region has a dimension much smaller than that of the nozzle exit, and is illuminated by a narrow, intense light beam. The particles passing through the illuminated focal region are detected by photodetector elements receiving light scattered from the particles. A method and an apparatus for high-efficiency, in-situ particle separation and/or measurement is also disclosed.
    • 本发明一般涉及用于高效率原位真空粒子检测的新装置和方法。 更具体地说,本发明包括一种用于粒子检测仪器的装置,该装置被设计成以高效率的方式在真空管线中检测气体颗粒的存在,使用尖锐的会聚喷嘴优先将流过它的悬浮颗粒聚焦到位于 在喷嘴轴线上在喷嘴出口下游的几个出口尺寸内。 该焦点区域的尺寸远小于喷嘴出口的尺寸,并且被窄的强光束照射。 通过被照射的聚焦区域的颗粒由接收从颗粒散射的光的光检测器元件检测。 还公开了一种用于高效,原位颗粒分离和/或测量的方法和装置。