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    • 2. 发明申请
    • Pattern formed body and method for manufacturing same
    • 图案形成体及其制造方法
    • US20070128738A1
    • 2007-06-07
    • US11472890
    • 2006-06-22
    • Hironori KobayashiAyao Matsukawa
    • Hironori KobayashiAyao Matsukawa
    • H01L21/00
    • G02F1/133516
    • A main object of the present invention is to provide a high quality pattern formed body, wherein only the target region is made liquid repellent with a high precision at the time of forming a pattern made of a lyophilic region and a liquid repellent region by use of plasma radiating; and a method for manufacturing the same. To achieve the object, the present invention provides a method for manufacturing a pattern formed body comprising a plasma radiating step of radiating plasma to a patterning substrate having: a base material; a photocatalyst containing layer formed on the base material and containing at least a photocatalyst; and a resin layer formed in a pattern form on the photocatalyst containing layer and containing at least a resin, wherein a fluorine compound is used as an introduction gas to radiate the plasma to make the upper face of the resin layer liquid repellent.
    • 本发明的主要目的是提供一种高品质图案成形体,其中在形成由亲液区域和液体排斥区域形成的图案时,只有目标区域以高精度制成疏液性, 等离子体辐射; 及其制造方法。 为了实现该目的,本发明提供了一种图案形成体的制造方法,其包括:将等离子体照射到具有基材的图案形成基板的等离子体放射工序; 含有至少含有光催化剂的基材上形成的含有光催化剂的层; 以及树脂层,其形成为含有光催化剂层的至少含有树脂的图案形式,其中使用氟化合物作为引入气体,以使等离子体发生,从而使树脂层的上表面具有疏液性。