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    • 5. 发明授权
    • Magnetoresistance element, with lower electrode anti-erosion/flaking layer
    • 磁阻元件,具有较低的电极抗侵蚀/剥落层
    • US06493195B1
    • 2002-12-10
    • US09651068
    • 2000-08-30
    • Kazuhiko HayashiKeishi OhashiNobuyuki IshiwataMasafumi NakadaEizo FukamiHiroaki HonjoHisanao TsugeAtsushi Kamijo
    • Kazuhiko HayashiKeishi OhashiNobuyuki IshiwataMasafumi NakadaEizo FukamiHiroaki HonjoHisanao TsugeAtsushi Kamijo
    • G11B5127
    • B82Y25/00B82Y10/00B82Y40/00G01R33/09G11B5/3133G11B5/3163G11B5/3903G11B5/3909G11B5/40H01F10/3268H01F41/302
    • A magnetoresistance element includes a lower electrode layer, a magnetoresistance effect layer, an upper electrode layer and a lower electrode anti-erosion/flaking layer. The lower electrode anti-erosion/flaking layer, which is formed before a photoresist layer remaining on the patterned lower electrode layer is removed, is formed around the lower electrode layer so that its edge facing the lower electrode layer will be in contact with the edge of the lower electrode layer. By use of the lower electrode anti-erosion/flaking layer, the edge of the lower electrode layer is protected from being exposed to a release agent containing a dissolved photoresist in a photoresist layer removal step (when the photoresist layer remaining on the patterned lower electrode layer is removed), thereby the increase of roughness of the edge of the lower electrode layer due to erosion/flaking of the edge in the photoresist removal step can be avoided, and thereby electrical shorts between the upper electrode layer and the lower electrode layer can be eliminated, and thereby a magnetoresistance element of high sensitivity and high performance can be obtained and manufacturing yield of the magnetoresistance elements can be improved.
    • 磁阻元件包括下电极层,磁阻效应层,上电极层和下电极抗侵蚀/剥落层。 在除去形成在图案化的下电极层上的光致抗蚀剂层之前形成的下电极抗腐蚀/剥离层围绕下电极层形成,使得其面向下电极层的边缘将与边缘 的下电极层。 通过使用下电极抗腐蚀/剥落层,在光致抗蚀剂层去除步骤中(当残留在图案化的下电极上的光致抗蚀剂层时,保护下电极层的边缘不暴露于含有溶解的光致抗蚀剂的脱模剂 层),由此可以避免由于光致抗蚀剂去除步骤中的边缘的侵蚀/剥落引起的下电极层的边缘的粗糙度的增加,从而可以使上电极层和下电极层之间的电短路 从而可以获得高灵敏度和高性能的磁阻元件,并且可以提高磁阻元件的制造成品率。
    • 6. 发明申请
    • METHOD OF MANUFACTURING A SUBSTRATE FOR ORGANIC ELECTROLUMINESCENT DEVICE
    • 制造有机电致发光器件的基板的方法
    • US20100151608A1
    • 2010-06-17
    • US12712586
    • 2010-02-25
    • Yasuharu ONISHISatoru ToguchiJunichi YamanariHitoshi IshikawaTomohisa GotohAtsushi Kamijo
    • Yasuharu ONISHISatoru ToguchiJunichi YamanariHitoshi IshikawaTomohisa GotohAtsushi Kamijo
    • H01L33/00
    • H01L51/5268G02B5/1847H01L51/52H01L51/5262H01L51/5275
    • Disclosed is a method of manufacturing a substrate for an organic EL device, the method comprising the step of: filling grooves of the optical element with sol-gel coating solution or organic metal cracking solution when a diffraction grating 12 is formed on the glass substrate 11, wherein an encapsulation member 5 is mounted to the glass substrate 11 in order to fill the groove 12a with the coating solution, and the coating solution is injected into a gap between the encapsulation member 5 and the diffraction grating 12, so that the organic EL device can be stably manufactured with low variation between optical properties according to positions of the substrate and with improved luminous efficiency. Further, the present invention provides a method of manufacturing a substrate for an organic EL device having a glass substrate 11 with an diffraction grating 12, wherein the dispersion solution of particles is applied to the glass substrate 11 to form the diffraction grating 12, so that the organic EL device can be stably manufactured with low variation between the optical properties according to the positions of the is substrate and with the improved luminous efficiency.
    • 公开了一种制造用于有机EL器件的衬底的方法,所述方法包括以下步骤:当在玻璃衬底11上形成衍射光栅12时,用溶胶 - 凝胶涂覆溶液或有机金属裂解溶液填充光学元件的槽 其中,将包封部件5安装在玻璃基板11上,以便用涂布液填充凹槽12a,并且将涂布液注入到包封部件5和衍射光栅12之间的间隙中,使得有机EL 可以根据基板的位​​置和改善的发光效率,稳定地制造光学特性之间的低变化。 此外,本发明提供一种制造具有带有衍射光栅12的玻璃基板11的有机EL元件用基板的方法,其中将粒子的分散溶液施加到玻璃基板11上以形成衍射光栅12,使得 可以根据基板的位​​置和提高的发光效率在光学特性之间的低变化下稳定地制造有机EL器件。
    • 7. 发明授权
    • Method of manufacturing a substrate for organic electroluminescent device
    • 制造有机电致发光器件用基板的方法
    • US07695757B2
    • 2010-04-13
    • US10840292
    • 2004-05-07
    • Yasuharu OnishiSatoru ToguchiJunichi YamanariHitoshi IshikawaTomohisa GotohAtsushi Kamijo
    • Yasuharu OnishiSatoru ToguchiJunichi YamanariHitoshi IshikawaTomohisa GotohAtsushi Kamijo
    • B05D5/12
    • H01L51/5268G02B5/1847H01L51/52H01L51/5262H01L51/5275
    • Disclosed is a method of manufacturing a substrate for an organic EL device, the method comprising the step of: filling grooves of the optical element with sol-gel coating solution or organic metal cracking solution when a diffraction grating 12 is formed on the glass substrate 11, wherein an encapsulation member 5 is mounted to the glass substrate 11 in order to fill the groove 12a with the coating solution, and the coating solution is injected into a gap between the encapsulation member 5 and the diffraction grating 12, so that the organic EL device can be stably manufactured with low variation between optical properties according to positions of the substrate and with improved luminous efficiency. Further, the present invention provides a method of manufacturing a substrate for an organic EL device having a glass substrate 11 with an diffraction grating 12, wherein the dispersion solution of particles is applied to the glass substrate 11 to form the diffraction grating 12, so that the organic EL device can be stably manufactured with low variation between the optical properties according to the positions of the substrate and with the improved luminous efficiency.
    • 公开了一种制造用于有机EL器件的衬底的方法,所述方法包括以下步骤:当在玻璃衬底11上形成衍射光栅12时,用溶胶 - 凝胶涂覆溶液或有机金属裂解溶液填充光学元件的槽 其中,将包封部件5安装在玻璃基板11上,以便用涂布液填充凹槽12a,并且将涂布液注入到包封部件5和衍射光栅12之间的间隙中,使得有机EL 可以根据基板的位​​置和改善的发光效率,稳定地制造光学特性之间的低变化。 此外,本发明提供一种制造具有带有衍射光栅12的玻璃基板11的有机EL元件用基板的方法,其中将粒子的分散溶液施加到玻璃基板11上以形成衍射光栅12,使得 可以根据基板的位​​置和提高的发光效率在光学特性之间的低变化下稳定地制造有机EL器件。