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    • 1. 发明申请
    • Fuel Cell System Having Hydrogen Generating Apparatus
    • 具有氢发生装置的燃料电池系统
    • US20090263687A1
    • 2009-10-22
    • US12091345
    • 2006-10-23
    • Atsuhiro Yoshizaki
    • Atsuhiro Yoshizaki
    • H01M8/18
    • C01B3/065C01B2203/066H01M8/04089H01M8/04201H01M8/04597H01M8/04619H01M8/04753H01M8/04828H01M8/065Y02E60/362
    • In a fuel sell system having a hydrogen generating apparatus, data of electric power to be supplied in response to a fluctuating power load is input to a system controller. Based on this data of electric power, an amount of water dissolved fuel to be supplied to a reactor is controlled and a fuel cell unit is operated by using hydrogen which is generated in the reactor. The fuel cell system responds to a fluctuating power load and stabilizes load current by means of a compound power that is a sum of the generated power by the fuel cell unit and charged or discharged power in the capacitor. A water separation tank which separates water from used fuel in the reactor and a temporary storage tank which stores water from the water separation tank are provided. In a hydrogen generator unit which contains a system to supply water in the temporary storage tank to the reactor, hydrogen which is generated in the reactor is supplied to the fuel cell unit.
    • 在具有氢生成装置的燃料销售系统中,将响应于波动的电力负荷而供给的电力的数据输入到系统控制器。 基于该电力数据,控制向反应器供给的水溶解燃料的量,并且通过使用在反应器中产生的氢气来操作燃料电池单元。 燃料电池系统响应于波动的功率负载并且通过作为燃料电池单元的发电功率与电容器中的充电或放电功率之和的复合功率稳定负载电流。 提供了一种将反应器中的废水与水分离的水分离罐和从水分离罐储存水的临时储存罐。 在包含向临时储罐供给水的系统的氢发生器单元中,在反应器中产生的氢气被供给到燃料电池单元。
    • 2. 发明授权
    • Alignment method and apparatus for reduction projection type aligner
    • 还原投影型对准器的对准方法和装置
    • US4725737A
    • 1988-02-16
    • US797131
    • 1985-11-12
    • Toshihiko NakataMasataka ShibaYoshitada OshidaSachio UtoAtsuhiro Yoshizaki
    • Toshihiko NakataMasataka ShibaYoshitada OshidaSachio UtoAtsuhiro Yoshizaki
    • G03F9/00G01V9/04G01B11/00
    • G03F9/7076
    • An alignment method and apparatus for reduction projection type aligner in which the rough detection of reticle position in the reticle alignment process at the time of mounting a reticle and the fine detection of reticle position in the wafer alignment for the alignment between a wafer and the reticle are performed automatically by the same reticle alignment pattern and the same optical alignment detection system. A plurality of one- or two-dimensional Fresnel zone plates having different shapes of diffraction patterns formed outside of a reticle circuit pattern and arranged at a position outward of the entrance pupil of the reduction projection lens are used as a reticle alignment pattern to detect the absolute position of the reticle. The detection field of view of the optical alignment detection system is thus effectively widened to make pattern detection possible with high magnification for an improved detection accuracy. The same reticle alignment pattern and the same optical alignment detection system are used for rough detection of reticle position in reticle alignment and fine detection of reticle position in wafer alignment. In the optical alignment detection system, on the other hand, the image position of the diffraction pattern from the reticle alignment pattern and the image position of the wafer alignment pattern are located at the same distance from the reticle surface.
    • 用于还原投影型对准器的对准方法和装置,其中在安装光罩时在光罩对准过程中对光罩位置进行粗略检测,并且在晶片对准中精确检测标线片位置以用于晶片和掩模版之间的对准 通过相同的掩模版对准图案和相同的光学对准检测系统自动执行。 使用在分划板电路图案之外形成并且布置在还原投影透镜的入射光瞳外侧的位置处具有不同形状的衍射图案的多个一维或二维菲涅尔区域板作为掩模版对准图案,以检测 掩模版的绝对位置。 因此光学对准检测系统的检测视场被有效地加宽,以便以高放大率进行图案检测以提高检测精度。 相同的掩模版对准图案和相同的光学对准检测系统用于粗略检测掩模版对准中的掩模版位置和精确检测晶片对准中的掩模版位置。 另一方面,在光学对准检测系统中,衍射图案的标线片取向图案的图像位置和晶片对准图案的图像位置位于与标线片表面相同的距离处。
    • 5. 发明授权
    • Protective relay
    • 保护继电器
    • US4464698A
    • 1984-08-07
    • US420300
    • 1982-09-20
    • Atsuhiro Yoshizaki
    • Atsuhiro Yoshizaki
    • H02H3/38
    • H02H3/38
    • A protective relay which carries out various relay functions by converting externally received AC data into time widths in accordance with protective ranges and determining whether or not the protective operations are necessary on the basis of the time widths. The protective relay receives a plurality of input AC data through a time-dividing device and converts the time-divided data into the time widths for the relay functions to determine the relay operations of the relay functions on the basis of the time widths.
    • 一种保护继电器,其通过根据保护范围将外部接收到的AC数据转换为时间宽度来执行各种继电器功能,并且基于时间宽度确定是否需要保护操作。 保护继电器通过时分装置接收多个输入AC数据,并将分时数据转换为中继功能的时间宽度,以基于时间宽度确定中继功能的中继操作。