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    • 1. 发明申请
    • Stacked die semiconductor package and method of assembly
    • 堆叠半导体封装和组装方法
    • US20090004777A1
    • 2009-01-01
    • US12124880
    • 2008-05-21
    • Ravi Kanth KolanAnthony Sun Yi-ShengLiu HaoToh Chin Hock
    • Ravi Kanth KolanAnthony Sun Yi-ShengLiu HaoToh Chin Hock
    • H01L21/00
    • H01L25/0657H01L25/50H01L2224/16145H01L2225/06513H01L2225/06517H01L2225/06541
    • A method of manufacturing a plurality of stacked die semiconductor packages, including: attaching a second silicon wafer to a first silicon wafer, wherein the second silicon wafer has a plurality of open vias; attaching a third silicon wafer to the second silicon wafer, wherein the third silicon wafer has a plurality of open vias, and the open vias of the second and third silicon wafers are aligned with one another; etching a bonding material that attaches the wafers from the aligned open vias; filling the aligned open vias with a conductor; forming conductive bumps at open ends of the aligned open vias; back grinding the first silicon wafer; separating the stacked semiconductor dies from each other; attaching the bump end of the stacked semiconductor dies onto a substrate; encapsulating the stacked semiconductor dies and substrate; and singulating the encapsulated assembly.
    • 一种制造多个堆叠管芯半导体封装的方法,包括:将第二硅晶片连接到第一硅晶片,其中所述第二硅晶片具有多个开口; 将第三硅晶片附接到所述第二硅晶片,其中所述第三硅晶片具有多个开放通孔,并且所述第二和第三硅晶片的所述开放通孔彼此对准; 蚀刻从对准的开放通孔连接晶片的接合材料; 用导体填充对齐的开放通孔; 在对齐的开放通孔的开口端形成导电凸块; 背面研磨第一个硅晶片; 将堆叠的半导体管芯彼此分离; 将堆叠的半导体管芯的凸起端附接到基板上; 封装堆叠的半导体管芯和衬底; 并分离封装的组件。
    • 2. 发明授权
    • Stacked die semiconductor package and method of assembly
    • 堆叠半导体封装和组装方法
    • US07883938B2
    • 2011-02-08
    • US12124880
    • 2008-05-21
    • Ravi Kanth KolanAnthony Sun Yi ShengLiu HaoToh Chin Hock
    • Ravi Kanth KolanAnthony Sun Yi ShengLiu HaoToh Chin Hock
    • H01L21/00
    • H01L25/0657H01L25/50H01L2224/16145H01L2225/06513H01L2225/06517H01L2225/06541
    • A method of manufacturing a plurality of stacked die semiconductor packages, including: attaching a second silicon wafer to a first silicon wafer, wherein the second silicon wafer has a plurality of open vias; attaching a third silicon wafer to the second silicon wafer, wherein the third silicon wafer has a plurality of open vias, and the open vias of the second and third silicon wafers are aligned with one another; etching a bonding material that attaches the wafers from the aligned open vias; filling the aligned open vias with a conductor; forming conductive bumps at open ends of the aligned open vias; back grinding the first silicon wafer; separating the stacked semiconductor dies from each other; attaching the bump end of the stacked semiconductor dies onto a substrate; encapsulating the stacked semiconductor dies and substrate; and singulating the encapsulated assembly.
    • 一种制造多个堆叠管芯半导体封装的方法,包括:将第二硅晶片连接到第一硅晶片,其中所述第二硅晶片具有多个开口; 将第三硅晶片附接到所述第二硅晶片,其中所述第三硅晶片具有多个开放通孔,并且所述第二和第三硅晶片的所述开放通孔彼此对准; 蚀刻从对准的开放通孔连接晶片的接合材料; 用导体填充对齐的开放通孔; 在对齐的开放通孔的开口端形成导电凸块; 背面研磨第一个硅晶片; 将堆叠的半导体管芯彼此分离; 将堆叠的半导体管芯的凸起端附接到基板上; 封装堆叠的半导体管芯和衬底; 并分离封装的组件。