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1. 发明授权

US08746064B2 Micromechanical sensor having a bandpass characteristic 有权
标题翻译：具有带通特性的微机械传感器
公开(公告)号：US08746064B2
公开(公告)日：2014-06-10
申请号：US13217639
申请日：2011-08-25
申请人： Marco Dienel , Alexander Sorger , Jan Mehner
发明人： Marco Dienel , Alexander Sorger , Jan Mehner
IPC分类号： G01P15/097 , G01P15/125
CPC分类号： G01H13/00
摘要： The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage.
摘要翻译：本发明涉及具有至少两个弹簧质量阻尼振荡器的微机械传感器。微机械传感器具有第一谐振频率的第一弹簧 - 质量 - 阻尼器振荡系统和具有低于第一谐振频率的第二谐振频率的第二弹簧 - 质量 - 阻尼器振荡系统。本发明还涉及通过诸如此类的传感器来检测和/或测量振荡的方法，以及用于制造诸如此类的微机械传感器的方法。第一和第二弹簧 - 质量 - 阻尼器振荡系统具有围绕电极位置测量的测量方向摆动的电极，电极偏转等于或等于弹簧 - 质量 - 阻尼器振荡器的偏转。这些系统通过至少一个静电场耦合，至少一个静电场作用在电极上，形成至少一个电容，电容由至少一个电极区域和至少一个电极分离和/或电极覆盖面

2. 发明申请

US20120048022A1 MICROMECHANICAL SENSOR HAVING A BANDPASS CHARACTERISTIC 有权
标题翻译：具有BANDPASS特性的微机电传感器
公开(公告)号：US20120048022A1
公开(公告)日：2012-03-01
申请号：US13217639
申请日：2011-08-25
申请人： Marco Dienel , Alexander Sorger , Jan Mehner
发明人： Marco Dienel , Alexander Sorger , Jan Mehner
IPC分类号： G01H1/00
CPC分类号： G01H13/00
摘要： The invention relates to a micromechanical sensor having at least two spring-mass damper oscillators. The micromechanical sensor has a first spring-mass-damper oscillating system with a first resonant frequency and a second spring-mass-damper oscillating system with a second resonant frequency which is lower than the first resonant frequency. The invention also relates to a method for detection and/or measurement of oscillations by means of a sensor such as this, and to a method for production of a micromechanical sensor such as this. The first and the second spring-mass-damper oscillating systems have electrodes which oscillate in a measurement direction about electrode rest positions with electrode deflections which are equal to or proportional to deflections of the spring-mass-damper oscillators. The systems are coupled to one another by means of at least one electrostatic field, which acts on the electrodes, forming at least one capacitance with the capacitance being governed by at least one electrode area and by at least one electrode separation and/or an electrode coverage.
摘要翻译：本发明涉及具有至少两个弹簧质量阻尼振荡器的微机械传感器。微机械传感器具有第一谐振频率的第一弹簧 - 质量 - 阻尼器振荡系统和具有低于第一谐振频率的第二谐振频率的第二弹簧 - 质量 - 阻尼器振荡系统。本发明还涉及通过诸如此类的传感器来检测和/或测量振荡的方法，以及用于制造诸如此的微机械传感器的方法。第一和第二弹簧 - 质量 - 阻尼器振荡系统具有围绕电极位置测量的测量方向摆动的电极，电极偏转等于或等于弹簧 - 质量 - 阻尼器振荡器的偏转。这些系统通过至少一个静电场耦合，至少一个静电场作用在电极上，形成至少一个电容，电容由至少一个电极区域和至少一个电极分离和/或电极覆盖面

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