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1. 发明申请

US20070215458A1 Electrode for electrochemical machining 有权
标题翻译：电化学加工用电极
公开(公告)号：US20070215458A1
公开(公告)日：2007-09-20
申请号：US11375010
申请日：2006-03-15
申请人： Alexander Parkhomovsky , Lev Dvoskin , Roger Addy , Robert Pelstring
发明人： Alexander Parkhomovsky , Lev Dvoskin , Roger Addy , Robert Pelstring
IPC分类号： C25D17/00 , B23H3/04
CPC分类号： B23H9/00 , B23H3/04 , B23H3/06 , B23H2200/10 , C25D5/022
摘要： An electrode containing a dielectric layer on a surface of the electrode and an active zone containing a metal embedded below the surface of the electrode, wherein the electrode is configured to form a groove pattern on a workpiece by an electrochemical machining process is disclosed. The electrode is capable of manufacturing a workpiece such as a counter plate, a sleeve journal or a conical bearing containing a groove pattern for fluid dynamics bearing, the groove pattern having a pitch of less than 80 microns. The electrode could be made by a method including depositing a dielectric layer on a surface of a metal, depositing a photoresist layer on the dielectric layer, printing a groove pattern on the photoresist layer, etching or physico-chemically removing portions of the dielectric photoresist layers to form grooves in the dielectric layer; removing the photoresist layer; and filling the grooves with a metal to produce the electrode.
摘要翻译：公开了一种在电极表面上含有电介质层的电极和含有嵌入在电极表面下方的金属的活性区，其中电极通过电化学加工工艺在工件上形成凹槽图案。电极能够制造工件，例如对置板，套筒轴颈或含有用于流体动力学轴承的凹槽图案的锥形轴承，凹槽图案具有小于80微米的间距。电极可以通过包括在金属表面上沉积电介质层，在电介质层上沉积光致抗蚀剂层，在光致抗蚀剂层上印刷凹槽图案，蚀刻或物理化学去除电介质光致抗蚀剂层的部分的方法在介电层中形成凹槽; 去除光致抗蚀剂层; 并用金属填充凹槽以产生电极。

2. 发明申请

US20080101738A1 Dual seal for optimized performance 有权
标题翻译：双重密封，优化性能
公开(公告)号：US20080101738A1
公开(公告)日：2008-05-01
申请号：US11588258
申请日：2006-10-27
申请人： Norbert S. Parsoneault , Robert A. Nottingham , Alexander Parkhomovsky , Robert M. Pelstring , Jeffry A. Leblanc , Troy M. Herndon
发明人： Norbert S. Parsoneault , Robert A. Nottingham , Alexander Parkhomovsky , Robert M. Pelstring , Jeffry A. Leblanc , Troy M. Herndon
IPC分类号： F16C32/06
CPC分类号： F16C33/10 , F16C33/745 , F16C2370/12
摘要： A fluid dynamic bearing having a hub, a sleeve, and a sealing arrangement comprising a first capillary seal substantially retaining a first fluid and a second capillary seal comprising a second fluid. The second capillary seal is located between the first capillary seal and an opening between the hub and the sleeve.
摘要翻译：具有轮毂，套筒和密封装置的流体动力轴承包括基本上保持第一流体的第一毛细管密封件和包括第二流体的第二毛细管密封件。第二毛细管密封件位于第一毛细管密封件和毂与套筒之间的开口之间。

3. 发明授权

US06913938B2 Feedback control of plasma-enhanced chemical vapor deposition processes 失效
标题翻译：等离子体增强化学气相沉积工艺的反馈控制
公开(公告)号：US06913938B2
公开(公告)日：2005-07-05
申请号：US10174370
申请日：2002-06-18
申请人： Arulkumar P. Shanmugasundram , Alexander T. Schwarm , Ilias Iliopoulos , Alexander Parkhomovsky , Martin J. Seamons
发明人： Arulkumar P. Shanmugasundram , Alexander T. Schwarm , Ilias Iliopoulos , Alexander Parkhomovsky , Martin J. Seamons
IPC分类号： C23C16/52 , G05B19/00 , G05B19/19 , G05B19/418 , H01L21/00 , H01L21/66 , G05B13/04
CPC分类号： H01L22/20 , C23C16/52 , G05B19/00 , G05B19/19 , G05B19/41865 , G05B2219/32053 , G05B2219/32065 , G05B2219/45031 , H01L21/67253 , Y02P90/20
摘要： A method of film deposition in a chemical vapor deposition (CVD) process includes (a) providing a model for CVD deposition of a film that defines a plurality of regions on a wafer and identifies one or more film properties for at least two regions of the wafer and at least one deposition model variable that correlates with the one or more film properties; (b) depositing a film onto a wafer using a first deposition recipe comprising at least one deposition recipe parameter that corresponds to the at least one deposition variable; (c) measuring a film property of at least one of the one or more film properties for the deposited film of step (b) for each of the at least two regions of the wafer and determining a film property; (d) calculating an updated deposition model based upon the film property of step (c) and the model of step (a); and (e) calculating an updated deposition recipe based upon the updated model of step (d) to maintain a target film property. The method can be used to provide feedback to a plurality of deposition chambers or to control film properties other than film thickness.
摘要翻译：化学气相沉积（CVD）工艺中的薄膜沉积方法包括（a）提供用于CVD沉积薄膜的模型，该薄膜在晶片上限定多个区域，并且识别出至少两个区域的一个或多个薄膜性质晶片和与一个或多个膜性质相关的至少一个沉积模型变量; （b）使用包括对应于所述至少一个沉积变量的至少一个沉积配方参数的第一沉积配方将膜沉积在晶片上; （c）测量晶片的至少两个区域中的每一个的步骤（b）的沉积膜的一个或多个膜性质中的至少一个的膜性质，并确定膜性质; （d）基于步骤（c）的膜性质和步骤（a）的模型计算更新的沉积模型; 以及（e）基于步骤（d）的更新模型来计算更新的沉积配方以维持目标膜特性。该方法可以用于向多个沉积室提供反馈或者控制膜厚以外的膜特性。

4. 发明授权

US07726882B2 Dual seal for optimized performance 有权
标题翻译：双重密封，优化性能
公开(公告)号：US07726882B2
公开(公告)日：2010-06-01
申请号：US11588258
申请日：2006-10-27
申请人： Norbert S. Parsoneault , Robert Alan Nottingham , Alexander Parkhomovsky , Robert M. Pelstring , Jeffry Arnold Leblanc , Troy Michael Herndon
发明人： Norbert S. Parsoneault , Robert Alan Nottingham , Alexander Parkhomovsky , Robert M. Pelstring , Jeffry Arnold Leblanc , Troy Michael Herndon
IPC分类号： F16C33/72 , F16C32/06
CPC分类号： F16C33/10 , F16C33/745 , F16C2370/12
摘要： A fluid dynamic bearing having a hub, a sleeve, and a sealing arrangement comprising a first capillary seal substantially retaining a first fluid and a second capillary seal comprising a second fluid. The second capillary seal is located between the first capillary seal and an opening between the hub and the sleeve.
摘要翻译：具有轮毂，套筒和密封装置的流体动力轴承包括基本上保持第一流体的第一毛细管密封件和包括第二流体的第二毛细管密封件。第二毛细管密封件位于第一毛细管密封件和毂与套筒之间的开口之间。

5. 发明授权

US07625468B2 Electrode for electrochemical machining 有权
标题翻译：电化学加工用电极
公开(公告)号：US07625468B2
公开(公告)日：2009-12-01
申请号：US11375010
申请日：2006-03-15
申请人： Alexander Parkhomovsky , Lev M. Dvoskin , Roger A. Addy , Robert M. Pelstring
发明人： Alexander Parkhomovsky , Lev M. Dvoskin , Roger A. Addy , Robert M. Pelstring
IPC分类号： C25D17/14 , C25D17/12
CPC分类号： B23H9/00 , B23H3/04 , B23H3/06 , B23H2200/10 , C25D5/022
摘要： An electrode containing a dielectric layer on a surface of the electrode and an active zone containing a metal embedded below the surface of the electrode, wherein the electrode is configured to form a groove pattern on a workpiece by an electrochemical machining process is disclosed. The electrode is capable of manufacturing a workpiece such as a counter plate, a sleeve journal or a conical bearing containing a groove pattern for fluid dynamics bearing, the groove pattern having a pitch of less than 80 microns. The electrode could be made by a method including depositing a dielectric layer on a surface of a metal, depositing a photoresist layer on the dielectric layer, printing a groove pattern on the photoresist layer, etching or physico-chemically removing portions of the dielectric photoresist layers to form grooves in the dielectric layer; removing the photoresist layer; and filling the grooves with a metal to produce the electrode.
摘要翻译：公开了一种在电极表面上含有电介质层的电极和含有嵌入在电极表面下方的金属的活性区，其中电极通过电化学加工工艺在工件上形成凹槽图案。电极能够制造工件，例如对置板，套筒轴颈或含有用于流体动力学轴承的凹槽图案的锥形轴承，凹槽图案具有小于80微米的间距。电极可以通过包括在金属表面上沉积电介质层，在电介质层上沉积光致抗蚀剂层，在光致抗蚀剂层上印刷凹槽图案，蚀刻或物理化学去除电介质光致抗蚀剂层的部分的方法在介电层中形成凹槽; 去除光致抗蚀剂层; 并用金属填充凹槽以产生电极。

6. 发明授权

US07137739B2 High pressure barrier to oil loss by diffusion 有权
标题翻译：高压障碍通过扩散损失油
公开(公告)号：US07137739B2
公开(公告)日：2006-11-21
申请号：US11356128
申请日：2006-02-17
申请人： Daniel D. Dittmer , Alexander Parkhomovsky
发明人： Daniel D. Dittmer , Alexander Parkhomovsky
IPC分类号： F16C32/06 , F16C33/72
CPC分类号： G11B5/8404 , B08B1/00 , F16C17/04 , F16C17/045 , F16C17/10 , F16C33/107 , F16C33/74
摘要： An improved rotational motor, such as a spindle motor for a disc drive, is provided. The motor first comprises a hub having a shaft portion and a horizontal body portion. The motor also comprises a sleeve surrounding the shaft portion of the hub. A fine vertical gap is retained between the shaft and the inner diameter of the surrounding sleeve. In addition, a fine horizontal gap is provided between the upper hub portion and the top of the sleeve. The vertical gap is filled with a lubricating liquid, such as a clean oil. A capillary seal is provided in the vertical fluid gap at one end. Preferably, the capillary seal is disposed at an upper end of the shaft proximal to the horizontal gap. Novel air pumping grooves are machined along the horizontal fluid gap. When the hub is rotated, the air pumping grooves create a high pressure region in the vicinity of the capillary seal. This forms a high pressure barrier that reduces the number of oil molecules diffusing out of the capillary seal and, therefore, inhibits oil loss from the system.
摘要翻译：提供了一种改进的旋转马达，例如用于盘驱动器的主轴马达。电动机首先包括具有轴部和水平主体部的轮毂。马达还包括围绕轮毂的轴部分的套筒。在轴和周围套筒的内径之间保持细小的垂直间隙。此外，在上部毂部和套筒的顶部之间设置有细小的水平间隙。垂直间隙填充有润滑液体，例如清洁油。在一端的垂直流体间隙设有毛细管密封。优选地，毛细管密封件设置在靠近水平间隙的轴的上端。沿着水平流体间隙加工新的抽气槽。当轮毂旋转时，抽气槽在毛细管密封附近产生高压区域。这形成了高压屏障，其减少了从毛细管密封件扩散出来的油分子的数量，并因此抑制了系统中的油损失。

7. 发明申请

US20060140522A1 High pressure barrier to oil loss by diffusion 有权
公开(公告)号：US20060140522A1
公开(公告)日：2006-06-29
申请号：US11356128
申请日：2006-02-17
申请人： Daniel Dittmer , Alexander Parkhomovsky
发明人： Daniel Dittmer , Alexander Parkhomovsky
IPC分类号： F16C32/06
CPC分类号： G11B5/8404 , B08B1/00 , F16C17/04 , F16C17/045 , F16C17/10 , F16C33/107 , F16C33/74
摘要： An improved rotational motor, such as a spindle motor for a disc drive, is provided. The motor first comprises a hub having a shaft portion and a horizontal body portion. The motor also comprises a sleeve surrounding the shaft portion of the hub. A fine vertical gap is retained between the shaft and the inner diameter of the surrounding sleeve. In addition, a fine horizontal gap is provided between the upper hub portion and the top of the sleeve. The vertical gap is filled with a lubricating liquid, such as a clean oil. A capillary seal is provided in the vertical fluid gap at one end. Preferably, the capillary seal is disposed at an upper end of the shaft proximal to the horizontal gap. Novel air pumping grooves are machined along the horizontal fluid gap. When the hub is rotated, the air pumping grooves create a high pressure region in the vicinity of the capillary seal. This forms a high pressure barrier that reduces the number of oil molecules diffusing out of the capillary seal and, therefore, inhibits oil loss from the system.

8. 发明授权

US07001074B2 High pressure barrier to oil loss by diffusion 失效
公开(公告)号：US07001074B2
公开(公告)日：2006-02-21
申请号：US10699316
申请日：2003-10-31
申请人： Daniel D. Dittmer , Alexander Parkhomovsky
发明人： Daniel D. Dittmer , Alexander Parkhomovsky
IPC分类号： F16C32/06 , F16C33/74
CPC分类号： F16C17/10 , F16C17/045 , F16C33/107 , F16C33/74 , F16C2370/12 , G11B19/2009
摘要： An improved rotational motor, such as a spindle motor for a disc drive, is provided. The motor first comprises a hub having a shaft portion and a horizontal body portion. The motor also comprises a sleeve surrounding the shaft portion of the hub. A fine vertical gap is retained between the shaft and the inner diameter of the surrounding sleeve. In addition, a fine horizontal gap is provided between the upper hub portion and the top of the sleeve. The vertical gap is filled with a lubricating liquid, such as a clean oil. A capillary seal is provided in the vertical fluid gap at one end. Preferably, the capillary seal is disposed at an upper end of the shaft proximal to the horizontal gap. Novel air pumping grooves are machined along the horizontal fluid gap. When the hub is rotated, the air pumping grooves create a high pressure region in the vicinity of the capillary seal. This forms a high pressure barrier that reduces the number of oil molecules diffusing out of the capillary seal and, therefore, inhibits oil loss from the system.

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