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    • 1. 发明授权
    • Automated lithographic hot spot detection employing unsupervised topological image categorization
    • 自动光刻热点检测采用无监督的拓扑图像分类
    • US08453075B2
    • 2013-05-28
    • US13224402
    • 2011-09-02
    • Wei GuoAlan J. Leslie
    • Wei GuoAlan J. Leslie
    • G06F17/50
    • G03F1/70
    • A method for proactively preventing lithographic problems is disclosed, which employs information generated from layout patterns including hot spots in a first technology node to identify hot spots in a second technology node employing a scaled down minimum dimension. In this proactive approach, problematic patterns or complex product geometries are identified in a chip design layout of the second technology node based on detection, in the chip design layout, of topological features that are similar to topological features of known hot spots in the first technology node. The identified patterns are potential hot spots in the chip design layout for the second technology node. Known hot spots in layout patterns in the first technology node are topologically categorized to provide a database for performing the fault detection and diagnosis on the chip design layout.
    • 公开了一种用于主动防止光刻问题的方法,其采用从包括第一技术节点中的热点的布局模式生成的信息来识别采用缩小的最小尺寸的第二技术节点中的热点。 在这种主动的方法中,基于在芯片设计布局中基于第一技术中已知热点的拓扑特征的拓扑特征的检测,在第二技术节点的芯片设计布局中识别有问题的模式或复杂的产品几何形状 节点。 识别的图案是第二技术节点的芯片设计布局中的潜在热点。 第一个技术节点中布局模式的已知热点被拓扑分类,以提供用于在芯片设计布局上执行故障检测和诊断的数据库。
    • 2. 发明申请
    • AUTOMATED LITHOGRAPHIC HOT SPOT DETECTION EMPLOYING UNSUPERVISED TOPOLOGICAL IMAGE CATEGORIZATION
    • 使用自动化的地理热点检测采用不间断的拓扑图像分类
    • US20130061184A1
    • 2013-03-07
    • US13224402
    • 2011-09-02
    • Wei GuoAlan J. Leslie
    • Wei GuoAlan J. Leslie
    • G06F17/50
    • G03F1/70
    • A method for proactively preventing lithographic problems is disclosed, which employs information generated from layout patterns including hot spots in a first technology node to identify hot spots in a second technology node employing a scaled down minimum dimension. In this proactive approach, problematic patterns or complex product geometries are identified in a chip design layout of the second technology node based on detection, in the chip design layout, of topological features that are similar to topological features of known hot spots in the first technology node. The identified patterns are potential hot spots in the chip design layout for the second technology node. Known hot spots in layout patterns in the first technology node are topologically categorized to provide a database for performing the fault detection and diagnosis on the chip design layout.
    • 公开了一种用于主动防止光刻问题的方法,其采用从包括第一技术节点中的热点的布局模式生成的信息来识别采用缩小的最小尺寸的第二技术节点中的热点。 在这种主动的方法中,基于在芯片设计布局中基于第一技术中已知热点的拓扑特征的拓扑特征的检测,在第二技术节点的芯片设计布局中识别有问题的模式或复杂的产品几何形状 节点。 识别的图案是第二技术节点的芯片设计布局中的潜在热点。 第一个技术节点中布局模式的已知热点被拓扑分类,以提供用于在芯片设计布局上执行故障检测和诊断的数据库。