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1. 发明授权

US5448063A Energy filter with correction of a second-order chromatic aberration 失效
标题翻译：具有二阶色差校正的能量滤波器
公开(公告)号：US5448063A
公开(公告)日：1995-09-05
申请号：US246534
申请日：1994-05-20
申请人： Alan F. De Jong , Johan G. Bakker , Harald Rose
发明人： Alan F. De Jong , Johan G. Bakker , Harald Rose
IPC分类号： G21K1/093 , H01J37/05 , H01J49/46 , H05H7/04
CPC分类号： H01J49/46 , H01J37/05
摘要： An imaging symmetrical energy filter (of the .OMEGA.-type) comprising two pairs of sector magnets (1), (2), (3), (4) for an electron microscope. The second-order chromatic aberration is corrected by arranging the two pairs of sector magnets {(1),(4) and (2),(3)} further apart. This enables suitable arrangement of the coils to generate correction hexapole fields, so that the chromatic error is even completely eliminated. Moreover, correction of the third-order aperture aberration is also possible by constructing the hexapole coil (9) in the symmetry plane also as an octupole coil. Further correction of this third-order aberration is achieved by applying an octupole field (5) directly at the entrance of the first sector magnet (1) and an octupole field (13) directly at the exit of the fourth sector magnet (4).
摘要翻译：包括用于电子显微镜的两对扇形磁体（1），（2），（3），（4）的成像对称能量过滤器（OMEGA型）。通过将两对扇形磁铁{（1），（4）和（2），（3）}进一步分开来校正二阶色差。这使得能够适当地布置线圈以产生校正六极场，使得色差甚至完全消除。此外，通过在对称平面中也作为八极线圈构造六极线圈（9），也可以校正三次孔径像差。通过直接在第一扇形磁体（1）的入口处施加八极场（5）并直接在第四扇形磁体（4）的出口处施加八极场（13）来实现对该三阶像差的进一步校正。

2. 发明授权

US5233192A Method for autotuning of an electron microscope, and an electron microscope suitable for carrying out such a method 失效
标题翻译：电子显微镜的自动化方法和适用于实施这种方法的电子显微镜
公开(公告)号：US5233192A
公开(公告)日：1993-08-03
申请号：US821503
申请日：1992-01-15
申请人： Alan F. De Jong , Dirk E. M. Van Dijck
发明人： Alan F. De Jong , Dirk E. M. Van Dijck
IPC分类号： H01J37/153 , H01J37/21 , H01J37/22 , H01J37/26
CPC分类号： H01J37/265 , H01J2237/223
摘要： A method of autotuning an electron microscope by producing a series of images of the object to be examined, using a defined tilt of the electron beam in a different direction for each respective image. The images are thereby displaced relative to one another. Each image is then decomposed into a linear and a non-linear component thereof, and the linear image components are separated by Fourier filtering. The relative displacements of a number of the linear image components relative to each other are measured, and the measured displacement values are combined to derive autotuning parameters for the electron microscope.

3. 发明授权

US5986270A Particle-optical apparatus including a low-temperature specimen holder 失效
标题翻译：粒子光学装置包括低温试样架
公开(公告)号：US5986270A
公开(公告)日：1999-11-16
申请号：US990870
申请日：1997-12-15
申请人： Bernardus J. M. Bormans , Alan F. De Jong , Karel D. Van Der Mast , Raymond Wagner , Peter E. S. J. Asselbergs
发明人： Bernardus J. M. Bormans , Alan F. De Jong , Karel D. Van Der Mast , Raymond Wagner , Peter E. S. J. Asselbergs
IPC分类号： G01Q30/10 , G01Q30/16 , G01Q30/20 , H01J37/20
CPC分类号： H01J37/20 , H01J2237/2001
摘要： In an electron microscope it is sometimes important that specimens can be studied at a very low temperature (for example, that of liquid helium). In the case of known specimen holders the specimen is cooled by supplying the cooling medium via a bore in the specimen holder; this causes thermal drift of the removed specimen holder each time when a specimen is exchanged, and also an acoustic coupling (i.e. transfer of vibrations) exists with the dewar vessel connected to the specimen holder. In accordance with the invention, the specimen is arranged on the end 20 of the specimen holder 7 by means of a separate transport unit 13, 36 so that it is not necessary to remove the specimen holder 7 in order to exchange a specimen, with the result that the specimen holder is not heated. Moreover, the coupling to the cold source 22, 28 can take place via a flexible cooling conduit 30 which extends directly to the end 20 to be cooled and may be permanently connected thereto, thus avoiding the transfer of vibrations.
摘要翻译：在电子显微镜中，有时重要的是可以在非常低的温度下（例如液态氦）进行研究。在已知的试样支架的情况下，通过在试样支架中的孔供给冷却介质来冷却试样; 这样每次当样品被更换时，都会导致移除的标本夹持器的热漂移，并且与连接到样本架的杜瓦瓶也存在声耦合（即振动的传递）。根据本发明，试样通过单独的运输单元13,36布置在试样保持器7的端部20上，使得不需要移除样品架7以便更换试样，导致样品架不加热。此外，与冷源22,28的联接可以通过柔性冷却导管30进行，柔性冷却导管30直接延伸到待冷却的端部20并且可以永久地连接到其上，从而避免了振动的传递。

4. 发明授权

US5221844A Charged particle beam device 失效
公开(公告)号：US5221844A
公开(公告)日：1993-06-22
申请号：US837517
申请日：1992-02-18
申请人： Karel D. van der Mast , Alan F. De Jong
发明人： Karel D. van der Mast , Alan F. De Jong
IPC分类号： G21K5/04 , G01Q30/02 , H01J37/153 , H01J37/26
CPC分类号： H01J37/153 , H01J37/26 , H01J2237/1514
摘要： In an electron microscope correction of spherical and chromatic aberration can be achieved in a number of freely adjustable directions by using a multipole correction element whereby a magnetic or electrostatic octupole field, rotatable about the optical axis, or a combined rotatable magnetic and electrostatic quadrupole field is generated. A corrected overall image can be obtained by combination of images successively corrected in different directions. In the case of holographic images, correction in the direction perpendicular to the line direction in the hologram enhances the accuracy of phase determination. A correction element of this kind, having comparatively small dimensions of from 1 to 2 cm, can be simply mounted, notably in a transmission electron microscope, in a space provided for the stigmator.

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