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    • 3. 发明授权
    • Ultimate inductive head integrated lapping system
    • 极致感应头集成研磨系统
    • US5361547A
    • 1994-11-08
    • US936823
    • 1992-08-28
    • Mark A. ChurchAlain M. DesouchesRichard E. Krebs
    • Mark A. ChurchAlain M. DesouchesRichard E. Krebs
    • B24B37/005B24B37/04G11B5/31G11B5/40B24B49/10
    • B24B37/005B24B37/048G11B5/3106G11B5/3166G11B5/3116G11B5/40Y10T29/49048
    • A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers, comprises a row of thin film transducers formed on a substrate, the row comprising a height defining edge and at least four spaced sensing devices, a first two of the sensing devices comprising switch devices each offset a predetermined amount from the height defining edge, and a second two of the sensing devices comprising resistive devices each offset a predetermined amount from the height defining edge, a support of mounting the row of thin film magnetic transducers in a position to lap the height defining edge of each of the thin film magnetic transducers and the sensing devices, a measuring device for measuring the resistance of the resistive devices during lapping of the height defining edge, apparatus responsive to the measured resistance and To a selected sate of at least one of the two switch devices for calibrating resistance versus throat height characteristics for each of the thin film magnetic transducers in the row, and for terminating the lapping process when a predetermined throat height is reached for each of the thin film magnetic transducers.
    • 一种用于准确地获得多个批量制造的薄膜磁换能器中每一个的所需喉部高度的研磨控制系统包括形成在基底上的一排薄膜换能器,该行包括高度限定边缘和至少四个间隔开的感测装置 传感装置的前两个包括开关装置,每个开关装置各自从高度限定边缘偏移预定量,并且第二传感装置包括每个偏移距高度限定边缘预定量的电阻装置,安装该行的支撑件 的薄膜磁性换能器,以便搭载每个薄膜磁性换能器和感测装置的高度限定边缘的位置;测量装置,用于在高度限定边缘的研磨期间测量电阻装置的电阻,该装置响应于 测量电阻和至少两个用于校准电阻的开关装置中的一个的选定端子 针对每列薄膜磁性换能器的连续高度特性,以及当每个薄膜磁性换能器达到预定的喉部高度时终止研磨过程。
    • 5. 发明授权
    • Ultimate inductive head integrated lapping system
    • 极致感应头集成研磨系统
    • US5597340A
    • 1997-01-28
    • US300820
    • 1994-09-02
    • Mark A. ChurchAlain M. DesouchesRichard E. Krebs
    • Mark A. ChurchAlain M. DesouchesRichard E. Krebs
    • B24B37/005B24B37/04G11B5/31G11B5/40B24B49/02B24B49/10
    • B24B37/005B24B37/048G11B5/3106G11B5/3166G11B5/3116G11B5/40Y10T29/49048
    • A lapping control system for accurately obtaining a desired throat height of each of a plurality of batch fabricated thin film magnetic transducers, comprises a row of thin film transducers formed on a substrate, the row comprising a height defining edge and at least four spaced sensing devices, a first two of the sensing devices comprising switch devices each offset a predetermined amount from the height defining edge, and a second two of the sensing devices comprising resistive devices each offset a predetermined amount from the height defining edge, a support of mounting the row of thin film magnetic transducers in a position to lap the height defining edge of each of the thin film magnetic transducers and the sensing devices, a measuring device for measuring the resistance of the resistive devices during lapping of the height defining edge, apparatus responsive to the measured resistance and to a selected state of at least one of the two switch devices for calibrating resistance versus throat height characteristics for each of the thin film magnetic transducers in the row, and for terminating the lapping process when a predetermined throat height is reached for each of the thin film magnetic transducers.
    • 一种用于准确地获得多个批量制造的薄膜磁换能器中每一个的所需喉部高度的研磨控制系统包括形成在基底上的一排薄膜换能器,该行包括高度限定边缘和至少四个间隔开的感测装置 传感装置的前两个包括开关装置,每个开关装置各自从高度限定边缘偏移预定量,并且第二传感装置包括每个偏移距高度限定边缘预定量的电阻装置,安装该行的支撑件 的薄膜磁性换能器,以便搭载每个薄膜磁性换能器和感测装置的高度限定边缘的位置;测量装置,用于在高度限定边缘的研磨期间测量电阻装置的电阻,该装置响应于 测量电阻以及用于校准电阻ve的两个开关装置中的至少一个的选定状态 针对行中的每个薄膜磁换能器,并且为每个薄膜磁性换能器达到预定的喉部高度时终止研磨过程。
    • 6. 发明授权
    • Thin film magnetic head fabrication method
    • 薄膜磁头制造方法
    • US5531017A
    • 1996-07-02
    • US579466
    • 1995-12-27
    • Mark A. ChurchAnnayya P. DeshpandeAlain M. Desouches
    • Mark A. ChurchAnnayya P. DeshpandeAlain M. Desouches
    • G11B5/31G11B5/127
    • G11B5/3163G11B5/3103G11B5/3166Y10T29/49041Y10T29/4905
    • A novel thin film magnetic head fabrication process is provided for fabricating a plurality of thin film magnetic head elements. The process begins with the selection of an appropriate wafer substrate of suitable size and quality. At least two primary sub-areas of the wafer substrate are designated as work areas for the deposition of magnetic recording transducer elements. The work areas have first and second end portions and are arranged in mutually adjacent relation along a shared boundary zone that extends in a first direction through the wafer substrate between the first and second end portions. The wafer substrate is populated with plural rows of magnetic recording transducer elements in the designated work areas such that the plural rows extend in a second direction that is substantially perpendicular to the first direction. The work areas are separated from the wafer substrate and magnetic transducer slider elements are fabricated from the plural rows of magnetic recording transducer elements. The process steps are such that they reduce the number of fabrication steps to a minimum while increasing the consistency of throat and stripe heights.
    • 提供了用于制造多个薄膜磁头元件的新型薄膜磁头制造工艺。 该过程开始于选择适当尺寸和质量的合适的晶片衬底。 晶片衬底的至少两个主要子区域被指定为用于沉积磁记录换能器元件的工作区域。 工作区具有第一和第二端部,并且沿着沿第一方向延伸穿过第一和第二端部之间的晶片衬底的共享边界区布置成相互相邻的关系。 晶片基板在指定的工作区域中填充有多行磁记录换能器元件,使得多行在基本上垂直于第一方向的第二方向上延伸。 工作区域与晶片基板分离,并且磁性换能器滑块元件由多行磁记录换能器元件制成。 工艺步骤使得它们将制造步骤的数量减少到最小,同时增加了喉部和条纹高度的一致性。