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    • 3. 发明授权
    • Sample polishing apparatus and sample polishing method
    • 样品抛光装置和样品抛光方法
    • US06726538B2
    • 2004-04-27
    • US09826847
    • 2001-04-06
    • Akihiko SaguchiWataru Takahashi
    • Akihiko SaguchiWataru Takahashi
    • B24B722
    • B24B37/30
    • A sample suck pad (chuck) made of resin is stuck and fixed onto the entirety of the lower surface of a chuck base, with an adhesive layer (rubber adhesive double coated tape). The adhesive layer includes a rubber-based adhesive material and has the shearing adhesive strength of 1.96 MPa (20 kgf/cm2). The outer periphery of the adhesive layer is covered with a sealing layer so that the contact of the adhesive layer with the outside is blocked off. A sample is sucked and held on the lower surface of the sample suck pad and this sample is pressed onto a polishing pad, which is fixed on a platen, so as to be polished.
    • 将由树脂制成的样品吸盘(卡盘)用粘合剂层(橡胶粘合剂双面涂布带)固定在卡盘基座的整个下表面上。 粘合剂层包括橡胶基粘合剂材料,剪切粘合强度为1.96MPa(20kgf / cm 2)。 粘合剂层的外周被密封层覆盖,使得粘合剂层与外部的接触被阻挡。 将样品吸附并保持在样品吸盘的下表面上,并将该样品压在固定在压板上的抛光垫上以进行抛光。