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1. 发明申请

US20050269298A1 Light irradiator and light irradiating method 审中-公开
标题翻译：光照射器和光照射法
公开(公告)号：US20050269298A1
公开(公告)日：2005-12-08
申请号：US10533948
申请日：2003-10-24
申请人： Shin Hotta , Koichi Tsukihara , Akifumi Ohshima , Takashi Mizusawa , Masaaki Abe
发明人： Shin Hotta , Koichi Tsukihara , Akifumi Ohshima , Takashi Mizusawa , Masaaki Abe
IPC分类号： B23K26/06 , B23K26/08 , H01L21/20 , H01L21/268
CPC分类号： H01L21/02675 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/08 , B23K26/082 , H01L21/2026 , H01L21/268
摘要： A light irradiator used as a laser annealing apparatus is provided which includes a controller (9) which controls a solid-state laser (4) to make pulse-on operation by detecting that the angle of rotation of a rotating shaft (7a) becomes +β after the rotating direction of the rotating shaft (7a) changes from clockwise to counterclockwise and then make pulse-off operation by detecting that the angle of rotation become −β, while controlling the solid-state laser (4) to make the pulse-on operation by detecting that the angle of rotation becomes −β after the rotating direction changes from counterclockwise to clockwise and then make the pulse-off operation by detecting that the angle of rotation becomes +β. Further, the controller (9) controls a moving stage (3) to move at a constant velocity in a constant-velocity moving direction, and move over a predetermined distance in a predetermined-distance moving direction after a to-be-annealed object (2) is irradiated with the light beam on a range from one end thereof to the other end in the constant-velocity moving direction, thereby irradiating the whole surface of the to-be-irradiated object (2) with a uniform energy.
摘要翻译：提供了一种用作激光退火装置的光照射器，其包括控制器（9），控制器（9）通过检测旋转轴（7a）的旋转角度变为（...），控制固态激光器（4）进行脉冲接通操作旋转轴（7a）的旋转方向的旋转角度（β）的β+β在顺时针方向向逆时针方向变化，然后通过检测旋转角度变为-beta来进行脉冲关闭操作，同时控制固态激光器通过检测旋转方向从逆时针方向向顺时针方向变化后的旋转角变为-beta，然后通过检测旋转角度为+β进行脉冲关闭操作，进行脉冲开启操作。此外，控制器（9）控制移动台（3）以等速移动方向以恒定速度移动，并且在待退火物体之后在预定距离移动方向上移动预定距离（ 2）在恒定速度移动方向的一端至另一端的范围内用光束照射，从而以均匀的能量照射被照射物体（2）的整个表面。

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