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1. 发明申请

US20180031402A1 METHOD OF MANUFACTURING AN ELEMENT SENSITIVE TO A PHYSICAL PARAMETER OF A FLOW OF FLUID AND CORRESPONDING SENSITIVE ELEMENT 审中-公开
公开(公告)号：US20180031402A1
公开(公告)日：2018-02-01
申请号：US15126252
申请日：2015-03-17
申请人： AUXITROL S.A.
发明人： Christian GRAS , Catherine DONAT
IPC分类号： G01F1/69 , B05D1/18 , G01K13/02 , G01K1/08 , G01K7/16
CPC分类号： G01F1/69 , B05D1/18 , C03B25/02 , G01K1/08 , G01K7/16 , G01K13/02 , H01C1/028 , H01C17/00 , H01F27/2823 , H01F41/06
摘要： The invention relates to a method of manufacturing an element sensitive to at least one physical parameter of a flow of fluid, comprising a step consisting in a single cycle of immersing, in molten glass, a core of a preassembled sensitive element, said core comprising at least two longitudinal channels along which there pass longitudinally at least two conducting connecting wires which are connected to an at least two-wire winding, said winding being suited to forming a resistive or inductive circuit for detecting said physical parameter, said immersion allowing the connecting wires to be sealed into the channels, allowing said channels to be filled and allowing the outside of the core to be coated in a single immersion, the core, at the end of said single immersion cycle, being sealed and coated in such a way as to obtain an assembled sensitive element. Advantageously, the winding may be “corkscrew” wound inside the longitudinal channels, immersion allowing the connecting wires to be held on the winding and controlling the space between the turns of the winding.

2. 发明申请

US20160146687A1 SYSTEM FOR MEASURING PRESSURE ABLE TO DISCRIMINATE A FAILURE FROM AN OVER PRESSURE OR UNDER PRESSURE 有权
标题翻译：用于测量压力的系统可以从压力或压力下解决故障
公开(公告)号：US20160146687A1
公开(公告)日：2016-05-26
申请号：US14897219
申请日：2014-06-16
申请人： AUXITROL S.A.
发明人： Guillaume Longu
IPC分类号： G01L19/06
CPC分类号： G01L19/0618 , G01D3/08 , G01L9/0047 , G01L27/007
摘要： The invention relates to a system for measuring pressure, including a pressure sensor comprising: a deformable membrane on which is placed a resistive bridge able to deliver a bridge voltage representative of a deformation of the deformable membrane caused by a pressure applied to said deformable membrane; a system for limiting the deformation of the deformable membrane, able to limit the bridge voltage in the case of an over-pressure or an under-pressure on the deformable membrane; and an amplifying electronic circuit connected to the resistive bridge, able to deliver an output voltage depending on the bridge voltage; the limiting system and the electronic circuit are conjointly configured so that the output voltage makes it possible to distinguish the case of failure of the pressure sensor and/or of the electronic circuit from the case of an over-pressure or under-pressure on the deformable membrane.
摘要翻译：本发明涉及一种用于测量压力的系统，包括压力传感器，包括：可变形膜，其上放置有能够传递桥梁电压的电阻桥梁，所述桥接电压代表由施加到所述可变形膜的压力引起的可变形膜的变形; 用于限制可变形膜的变形的系统，其能够在可变形膜上的过压或欠压的情况下限制桥电压; 以及连接到所述电阻桥的放大电子电路，能够根据桥电压传递输出电压; 限制系统和电子电路被联合地配置，使得输出电压使得可以将压力传感器和/或电子电路的故障的情况与过压或欠压的情况区分在可变形膜。

3. 发明申请

US20150033878A1 METHOD FOR PRODUCING A PRESSURE SENSOR AND CORRESPONDING SENSOR 有权
标题翻译：用于生产压力传感器和相应传感器的方法
公开(公告)号：US20150033878A1
公开(公告)日：2015-02-05
申请号：US14383092
申请日：2013-03-06
申请人： AUXITROL S.A. , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE LABORATORIES D'ANALYSE ET D'ARCHITECTURE , DES SYSTEMES
发明人： Sebastiano Brida , Jean-Francois Le Neal
IPC分类号： B81B3/00 , G01L7/08 , B81B7/02 , B32B38/08 , B81C1/00
CPC分类号： B81B3/0021 , B32B38/08 , B81B7/0006 , B81B7/02 , B81B2201/0264 , B81B2203/0127 , B81B2207/07 , B81B2207/095 , B81B2207/096 , B81C1/00182 , B81C1/00341 , G01L7/08 , G01L9/0045 , G01L9/0052 , G01L9/0054 , G01L9/0055 , G01L9/006 , G01L9/008 , G01L9/04 , G01L9/06 , G01L19/0061 , G01L19/0069 , G01L19/0076 , G01L19/147 , G01L19/148 , H01L2224/45169 , Y10T29/49888 , Y10T156/10
摘要： The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the centre thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.
摘要翻译：本发明涉及一种生产压力传感器的方法，包括以下步骤：将支撑基板与其上沉积有应变计的可变形膜组装，其中可变形膜在其中心处包括变薄的区域，支撑基板是设置在可变形膜的顶部上，支撑衬底包括与可变形膜接触的上表面和下表面，并且支撑衬底还包括设置在应变计顶部的侧向凹部和设置在可变形膜顶部的中心凹部薄膜的薄膜区域，以获得微机械结构; 并且一旦已经获得组件，在单个步骤中，在支撑件的上表面和支撑件的横向凹部中沉积至少一种导电材料，所述导电材料延伸到凹部中以便接触与应变计一起形成与应变计接触的电触点。

4. 发明授权

US10006825B2 Pressure sensor including a structure for controlling an adhesive layer resistant to temperature variations 有权
公开(公告)号：US10006825B2
公开(公告)日：2018-06-26
申请号：US15031109
申请日：2014-10-24
申请人： AUXITROL S.A.
发明人： Sebastiano Brida , David Seyer
IPC分类号： G01L19/04 , G01L19/14
CPC分类号： G01L19/04 , G01L19/146 , G01L19/147
摘要： The invention relates to a pressure sensor including: a sensitive element including a mounting substrate, said mounting substrate including a top surface and a bottom surface, the sensitive element also including a deformable diaphragm that is connected to the top surface of the mounting substrate; a housing, in which the sensitive element is placed, said housing including a base; an intermediate structure placed between the base of the housing and the mounting substrate, said intermediate structure including a base, the base including a top surface and a bottom surface that is connected to the base of the housing, said intermediate structure being configured such as to keep the mounting substrate at a predetermined distance from the top surface of the intermediate structure; and an adhesive layer extending onto the top surface of the intermediate structure. Said adhesive layer has a thickness controlled by the predetermined distance at which the mounting substrate is kept from the top surface of the intermediate structure. The invention also relates to a method for making such a pressure sensor.

5. 发明授权

US09643836B2 Method for producing a pressure sensor and corresponding sensor 有权
公开(公告)号：US09643836B2
公开(公告)日：2017-05-09
申请号：US14383092
申请日：2013-03-06
申请人： AUXITROL S.A. , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE (CNRS)
发明人： Sebastiano Brida , Jean-Francois Le Neal
IPC分类号： H01S4/00 , G01R3/00 , B81B3/00 , G01L9/04 , G01L9/06 , B81C1/00 , B32B38/08 , B81B7/02 , G01L7/08 , G01L9/00 , G01L19/14 , B81B7/00 , G01L19/00
CPC分类号： B81B3/0021 , B32B38/08 , B81B7/0006 , B81B7/02 , B81B2201/0264 , B81B2203/0127 , B81B2207/07 , B81B2207/095 , B81B2207/096 , B81C1/00182 , B81C1/00341 , G01L7/08 , G01L9/0045 , G01L9/0052 , G01L9/0054 , G01L9/0055 , G01L9/006 , G01L9/008 , G01L9/04 , G01L9/06 , G01L19/0061 , G01L19/0069 , G01L19/0076 , G01L19/147 , G01L19/148 , H01L2224/45169 , Y10T29/49888 , Y10T156/10
摘要： The invention relates to a method for producing a pressure sensor, comprising the following steps: assembling a support substrate with a deformable membrane on which strain gauges have been deposited, wherein the deformable membrane comprises a thinned area at the center thereof, the support substrate is disposed on top of the deformable membrane, the support substrate comprises an upper surface and a lower surface in contact with the deformable membrane, and the support substrate also comprises lateral recesses arranged on top of the strain gauges and a central recess arranged on top of the thinned area of the membrane, so as to obtain a micromechanical structure; and, once the assembly has been obtained, depositing, in a single step, at least one conductive material on the upper surface of the support and in the lateral recesses of the support, said conductive material extending into the recesses in order to be in contact with the strain gauges so as to form electrical contacts in contact with the strain gauges.

6. 发明授权

US10132667B2 Method of manufacturing an element sensitive to a physical parameter of a flow of fluid and corresponding sensitive element 有权
公开(公告)号：US10132667B2
公开(公告)日：2018-11-20
申请号：US15126252
申请日：2015-03-17
申请人： AUXITROL S.A.
发明人： Christian Gras , Catherine Donat
IPC分类号： B05D5/12 , G01F1/69 , G01K1/08 , G01K7/16 , G01K13/02 , H01C1/028 , B05D1/18 , C03B25/02 , H01C17/00 , H01F27/28 , H01F41/06
摘要： The invention relates to a method of manufacturing an element sensitive to at least one physical parameter of a flow of fluid, comprising a step consisting in a single cycle of immersing, in molten glass, a core of a preassembled sensitive element, said core comprising at least two longitudinal channels along which there pass longitudinally at least two conducting connecting wires which are connected to an at least two-wire winding, said winding being suited to forming a resistive or inductive circuit for detecting said physical parameter, said immersion allowing the connecting wires to be sealed into the channels, allowing said channels to be filled and allowing the outside of the core to be coated in a single immersion, the core, at the end of said single immersion cycle, being sealed and coated in such a way as to obtain an assembled sensitive element. Advantageously, the winding may be “corkscrew” wound inside the longitudinal channels, immersion allowing the connecting wires to be held on the winding and controlling the space between the turns of the winding.

7. 发明申请

US20160273989A1 PRESSURE SENSOR INCLUDING A STRUCTURE FOR CONTROLLING AN ADHESIVE LAYER RESISTANT TO TEMPERATURE VARIATIONS 有权
标题翻译：压力传感器，包括用于控制粘合层的结构，耐温度变化
公开(公告)号：US20160273989A1
公开(公告)日：2016-09-22
申请号：US15031109
申请日：2014-10-24
申请人： AUXITROL S.A.
发明人： Sebastiano Brida , David Seyer
IPC分类号： G01L19/04
CPC分类号： G01L19/04 , G01L19/146 , G01L19/147
摘要： The invention relates to a pressure sensor including: a sensitive element including a mounting substrate, said mounting substrate including a top surface and a bottom surface, the sensitive element also including a deformable diaphragm that is connected to the top surface of the mounting substrate; a housing, in which the sensitive element is placed, said housing including a base; an intermediate structure placed between the base of the housing and the mounting substrate, said intermediate structure including a base, the base including a top surface and a bottom surface that is connected to the base of the housing, said intermediate structure being configured such as to keep the mounting substrate at a predetermined distance from the top surface of the intermediate structure; and an adhesive layer extending onto the top surface of the intermediate structure. Said adhesive layer has a thickness controlled by the predetermined distance at which the mounting substrate is kept from the top surface of the intermediate structure. The invention also relates to a method for making such a pressure sensor.
摘要翻译：本发明涉及一种压力传感器，包括：敏感元件，包括安装基板，所述安装基板包括顶表面和底表面，所述敏感元件还包括连接到所述安装基板的顶表面的可变形隔膜; 其中放置敏感元件的壳体，所述壳体包括底座; 设置在所述壳体的基部和所述安装基板之间的中间结构，所述中间结构包括基部，所述基部包括连接到所述壳体的基部的顶表面和底表面，所述中间结构被配置为将安装基板保持在与中间结构的顶表面相距预定距离处; 以及延伸到中间结构的顶表面上的粘合剂层。所述粘合剂层具有由安装基板从中间结构的顶表面保持的预定距离控制的厚度。本发明还涉及制造这种压力传感器的方法。

8. 发明授权

US09891129B2 System for measuring pressure able to discriminate a failure from an over pressure or under pressure 有权
公开(公告)号：US09891129B2
公开(公告)日：2018-02-13
申请号：US14897219
申请日：2014-06-16
申请人： AUXITROL S.A.
发明人： Guillaume Longu
IPC分类号： G01L9/12 , G01L19/06 , G01L9/00 , G01L27/00 , G01D3/08
CPC分类号： G01L19/0618 , G01D3/08 , G01L9/0047 , G01L27/007
摘要： The invention relates to a system for measuring pressure, including a pressure sensor comprising: a deformable membrane on which is placed a resistive bridge able to deliver a bridge voltage representative of a deformation of the deformable membrane caused by a pressure applied to said deformable membrane; a system for limiting the deformation of the deformable membrane, able to limit the bridge voltage in the case of an over-pressure or an under-pressure on the deformable membrane; and an amplifying electronic circuit connected to the resistive bridge, able to deliver an output voltage depending on the bridge voltage; the limiting system and the electronic circuit are conjointly configured so that the output voltage makes it possible to distinguish the case of failure of the pressure sensor and/or of the electronic circuit from the case of an over-pressure or under-pressure on the deformable membrane.

9. 发明授权

US09470592B2 Micromechanical structure having a deformable membrane and a protection against strong deformations 有权
标题翻译：具有可变形膜的微机械结构和防止强变形的保护
公开(公告)号：US09470592B2
公开(公告)日：2016-10-18
申请号：US14354113
申请日：2012-10-24
申请人： AUXITROL S.A.
发明人： Sebastiano Brida
IPC分类号： G01L9/00 , G01L19/06 , B81B3/00
CPC分类号： G01L9/0047 , B81B3/0051 , B81B3/0097 , B81B2201/0264 , G01L9/0042 , G01L9/0048 , G01L19/0618
摘要： The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (101-108) forming a relief structure in such a manner that, in the case of contact between the islets (101-108) and the fine portion (20b) of the membrane (20), the contact surface between the islets (101-108) and the fine portion (20b) of the membrane (20) is small with respect to the dimensions of the fine portion (20b) of the membrane (20).
摘要翻译：本发明涉及一种用于测量或检测包括可变形膜（20）和支撑衬底（10）的机械量或动态量的微机械结构，所述膜（20）包括第一部分（20a）和第二部分（20b），由所述第一部分（20a）包围，所述第二部分（20b）的厚度小于所述第一部分（20a）的厚度，所述膜（20）悬挂在所述支撑基板（10）的上方，以及从而限定自由空间（30），所述微机械结构另外包括用于限制膜（20）的变形的下支座（21），所述下支座（21）布置在支撑基板（10）的上方并延伸到从所述支撑基底（10）到所述膜（20）的自由空间（30），其特征在于，所述下基台（21）包括朝向所述膜（20）延伸到所述自由空间（30）中的小岛（101-108））从下部邻接的平坦表面（21），所述胰岛（101-108）以这样的方式形成浮雕结构，即在所述胰岛（101-108）和所述膜（20）的微细部分（20b）之间接触的情况下，胰岛（101-108）与膜（20）的微细部分（20b）之间的接触表面相对于膜（20）的微细部分（20b）的尺寸较小。

10. 发明申请

US20140290375A1 MICROMECHANICAL STRUCTURE HAVING A DEFORMABLE MEMBRANE AND A PROTECTION AGAINST STRONG DEFORMATIONS 有权
标题翻译：具有可变形膜的微观结构和对强力变形的保护
公开(公告)号：US20140290375A1
公开(公告)日：2014-10-02
申请号：US14354113
申请日：2012-10-24
申请人： AUXITROL S.A.
发明人： Sebastiano Brida
IPC分类号： G01L9/00 , B81B3/00
CPC分类号： G01L9/0047 , B81B3/0051 , B81B3/0097 , B81B2201/0264 , G01L9/0042 , G01L9/0048 , G01L19/0618
摘要： The invention relates to a micromechanical structure for measuring or detecting a mechanical quantity or a dynamic quantity, including a deformable membrane (20) and a supporting substrate (10), the membrane (20) including a first portion (20a) and a second portion (20b) surrounded by the first portion (20a), the second portion (20b) having a thickness that is less than the thickness of the first portion (20a), the membrane (20) being suspended above the supporting substrate (10) and thus defining a free space (30), said micromechanical structure comprising in addition a lower abutment (21) for limiting the deformations of the membrane (20), said lower abutment (21) being arranged above the supporting substrate (10) and extending into the free space (30) from said supporting substrate (10) toward the membrane (20), characterized in that the lower abutment (21) comprises islets (101-108) that extend into the free space (30) toward the membrane (20) from a flat surface of the lower abutment (21), the islets (101-108) forming a relief structure in such a manner that, in the case of contact between the islets (101-108) and the fine portion (20b) of the membrane (20), the contact surface between the islets (101-108) and the fine portion (20b) of the membrane (20) is small with respect to the dimensions of the fine portion (20b) of the membrane (20).
摘要翻译：本发明涉及一种用于测量或检测包括可变形膜（20）和支撑衬底（10）的机械量或动态量的微机械结构，所述膜（20）包括第一部分（20a）和第二部分（20b），由所述第一部分（20a）包围，所述第二部分（20b）的厚度小于所述第一部分（20a）的厚度，所述膜（20）悬挂在所述支撑基板（10）的上方，以及从而限定自由空间（30），所述微机械结构另外包括用于限制膜（20）的变形的下支座（21），所述下支座（21）布置在支撑基板（10）的上方并延伸到从所述支撑基底（10）到所述膜（20）的自由空间（30），其特征在于，所述下基台（21）包括朝向所述膜（20）延伸到所述自由空间（30）中的小岛（101-108））从下部邻接的平坦表面（21），所述胰岛（101-108）以这样的方式形成浮雕结构，使得在所述胰岛（101-108）和所述膜（20）的微细部分（20b）之间接触的情况下，胰岛（101-108）与膜（20）的微细部分（20b）之间的接触表面相对于膜（20）的微细部分（20b）的尺寸较小。

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