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    • 2. 发明授权
    • Defect classification/inspection system
    • 缺陷分类/检查系统
    • US07171039B2
    • 2007-01-30
    • US10222431
    • 2002-08-16
    • Hiroshi KondoMasatsugu OkuyamaYo Saito
    • Hiroshi KondoMasatsugu OkuyamaYo Saito
    • G06K9/00G06K9/70G06K9/60
    • G06T7/001G06T2207/30148
    • An image of an inspection object is picked up by an image pickup unit, and a characteristics quantity of an image of a defect part extracted by a defect extracting unit is extracted and digitized by a characteristics extracting unit. A database preparing unit regroups defects having similar characteristics by a defect classification unit on the basis of the characteristics information digitized by the characteristics extracting unit with respect to defects belonging to a defect group selected and designated by an operator via a display/input unit, and prepares on a database memory a database in which the defects of the inspection object are hierarchically classified. A classification executing unit hierarchically classifies the defects of the inspection object with reference to the database provided by the database preparing unit on the basis of the digitized characteristics information extracted by the characteristics extracting unit from the image of the defect part of the inspection object extracted by the defect extracting unit. Thus, a defect classification/inspection system having high classification accuracy is provided.
    • 由图像拾取单元拾取检查对象的图像,并且由特征提取单元提取并由数据化由缺陷提取单元提取的缺陷部分的图像的特征量。 数据库准备单元基于由特征提取单元对由属于由操作者经由显示/输入单元选择和指定的缺陷组的缺陷的特征信息,通过缺陷分类单元重新分组具有相似特征的缺陷,以及 在数据库存储器上准备检查对象的缺陷被分层分类的数据库。 分类执行单元参照由数据库准备单元提供的数据库,基于由特征提取单元提取的数字化特征信息,从检查对象的缺陷部分的图像中提取检查对象的缺陷,对检查对象的缺陷进行分级分类, 缺陷提取单元。 因此,提供了具有高分类精度的缺陷分类/检查系统。
    • 4. 发明申请
    • Scale device
    • 缩放设备
    • US20040154181A1
    • 2004-08-12
    • US10676791
    • 2003-09-30
    • Sony Precision Technology Inc.
    • Gunichi NakamuraMitsuru Ohno
    • G01D021/00
    • G01D5/34707
    • In a scale device including a scale unit (4) and detector (5), the scale unit (4) includes a scale member (6) formed from a long material and having at least a pair of fixing holes (12) formed therein across a position signal carrying area (11) defined thereon and which carries positions signals, and a case member (7) housing the scale member (6) therein and having formed therein a pair of fixing holes (15) through which there is penetrated a fastening member (13) to be screwed into a mounting hole (10) formed in a stationary part (2) of a machine to which the scale device is to be installed. The detector (5) is fixed to a moving part (3) of the machine, which moves relative to the stationary part (2), and includes a sensor (29) which moves oppositely to the position signal carrying area (11) on the scale member (6). The scale unit (4) is fixed to the stationary part (2) with the scale member (6) and case member (7) being fastened together by the fastening member (13). Thus, the scale member (6) different in linear expansion coefficient from the stationary part (2) can be installed to the latter with a high precision, and the scale device can make a measurement with a high accuracy, independently of environmental conditions.
    • 在包括刻度单元(4)和检测器(5)的刻度装置中,刻度单元(4)包括由长材料形成的刻度部件(6),并且在其中形成有至少一对固定孔 定位在其上并位于其上的位置信号承载区域(11),并且承载位置信号;以及壳体构件(7),其中容纳刻度件(6),并且在其中形成有一对固定孔(15),穿过该固定孔 构件(13)被拧入形成在要安装标尺装置的机器的静止部分(2)中的安装孔(10)中。 检测器(5)固定在机器的移动部分(3)上,该移动部分相对于静止部分(2)移动,并且包括一个与位置信号承载区域(11)相对移动的传感器(29) (6)。 标尺单元(4)通过标尺构件(6)固定到固定部分(2),并且壳体构件(7)通过紧固构件(13)紧固在一起。 因此,与静止部分(2)的线性膨胀系数不同的标尺(6)可以高精度地安装在后者上,并且刻度装置可以独立于环境条件进行高精度的测量。
    • 5. 发明申请
    • Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
    • 光接收/发射复合单元,其制造方法和位移检测装置
    • US20030202189A1
    • 2003-10-30
    • US10414860
    • 2003-04-15
    • Sony Precision Technology Inc.
    • Hideaki TamiyaKayoko TaniguchiAkihiro KurodaHidehiro Kume
    • G01B009/02
    • G01D5/38
    • A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
    • 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括:用于发光的光源; 偏振光分离单元,用于将从光源发射的光分成具有差分偏振分量的两个光束,将两个光束照射到外部光学系统,并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板,用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。
    • 6. 发明授权
    • Position detection apparatus
    • 位置检测装置
    • US6145214A
    • 2000-11-14
    • US274364
    • 1999-03-23
    • Tadahiko ShimanoTakamoto Yoshioka
    • Tadahiko ShimanoTakamoto Yoshioka
    • G01B7/00G01D5/14G01D5/16G01D5/244G01D5/245G01B7/04
    • G01D5/145G01D5/2457
    • The present invention provides a position detection apparatus capable of suppressing a crosstalk between a scale signal and an origin signal and detecting a position with a high accuracy. A recording medium 12 of a round bar shape has a magnetic signal alternately reversing the polarity at a predetermined recording wavelength .lambda..sub.1 and recorded as a scale signal in the longitudinal direction of the recording medium 12. This scale signal is recorded over the entire outer circumferential surface of the recording medium 12 and almost over the entire length of the recording medium 12. Moreover, the recording medium 12 has a one-wavelength origin signal of recording wavelength .lambda..sub.2 recorded at least at one position over the scale signal. The recording wavelength .lambda..sub.2 of this origin signal is longer than the recording wavelength .lambda..sub.1 of the scale signal. The origin signal is recorded at a part of the outer circumference. An origin signal detection head is arranged to face the origin signal whereas a scale signal detection head is arranged opposite to the origin signal detection head so as to sandwich the recording medium 12.
    • 本发明提供一种能够抑制刻度信号与原点信号之间的串扰并且以高精度检测位置的位置检测装置。 圆形的记录介质12具有以预定的记录波长λ1交替地反转极性的磁信号,并且在记录介质12的长度方向作为刻度信号记录。该刻度信号记录在整个外周 记录介质12的表面几乎在记录介质12的整个长度上。此外,记录介质12具有记录在刻度信号上的至少一个位置的记录波长λ2的单波长原始信号。 该原点信号的记录波长λ2比刻度信号的记录波长λ1长。 原点信号记录在外圆周的一部分。 原点信号检测头被布置为面对原点信号,而标尺信号检测头与原点信号检测头相对地布置,以夹持记录介质12。
    • 7. 发明授权
    • Position detection apparatus
    • 位置检测装置
    • US6145213A
    • 2000-11-14
    • US274365
    • 1999-03-23
    • Tadahiko ShimanoJun Iijima
    • Tadahiko ShimanoJun Iijima
    • G01D5/245G01D5/347G01B7/04
    • G01D5/34707
    • The present invention provides a position detection apparatus capable of reducing the bending moment in the longitudinal direction of a recording medium and being fixed to a machine tool without deforming the main body or the recording medium, thus enabling to obtain a high detection accuracy. The position detection apparatus detects a relative movement position between the reference block 4 and the movable block which move relative to each other along straight line. A round bar-shaped recording medium 12 is provided inside a frame 11 of a main body 2. The frame 11 is fixed to the reference block 4 with a fixing member 55 having an abutment surface for the frame 11 which abutment surface has a curvature only in a direction parallel to the longitudinal direction of the recording medium.
    • 本发明提供了一种位置检测装置,其能够减小记录介质的纵向方向的弯曲力并将其固定在机床上,而不会使主体或记录介质变形,从而能够获得高的检测精度。 位置检测装置检测基准块4与沿着直线相对移动的可动块之间的相对移动位置。 在主体2的框架11的内部,设有圆形的条形记录介质12.框架11通过具有用于框架11的抵接表面的固定构件55固定到参考块4,该抵接表面仅具有曲率 在平行于记录介质的纵向的方向上。
    • 9. 发明授权
    • Light-emitting/receiving combined unit and displacement sensors using the same
    • 发光/接收组合单元和使用其的位移传感器
    • US06980303B2
    • 2005-12-27
    • US10240417
    • 2002-02-01
    • Hidehiro KumeAkihito NakayamaKayoko TaniguchiAkihiro Kuroda
    • Hidehiro KumeAkihito NakayamaKayoko TaniguchiAkihiro Kuroda
    • G01B11/00G01D5/38G01B11/14
    • G01D5/38
    • The present invention provides a light emitting/receiving composite unit (1) for emitting and receiving lights, which includes a light source (3), an optical splitting unit (4) for splitting returning lights to the composite unit (1) into a plurality of lights, a polarizing unit (5) for increasing and decreasing quantity of lights transmitted therefrom corresponding to polarization state of the returning lights, and an optical receiving unit (6) which has a plurality of photo-detecting elements (6—1 to 6—4) for detecting the lights transmitted through the polarizing unit (5), which are unitedly integrated into one unit. Also, the present invention provides a displacement detection apparatus of grating interference type, which includes thus unitedly integrated composite unit (1), and an external optical system of an objective unit having a reflection type diffraction grating RG, a reflecting unit (R1a, R1b) for reflecting lights from the composite unit (1) to the reflection type diffraction grating RG, a polarizing unit (WP1a, WP1b) for changing polarization state of diffracted lights from the reflection type diffraction grating RG, and a reflecting unit (R2a, R2b) for reflecting lights transmitted through the polarizing unit (WP1a, WP1b) to cause the reflected lights go backward.
    • 本发明提供了一种用于发光和接收光的发光/接收复合单元(1),其包括光源(3),用于将复归单元(1)的返回光分离成多个的光分离单元(4) 的光接收单元(6),其具有用于增加和减少与其相对应的返回光的偏振状态的光传输的光量;以及光接收单元(6),其具有多个光检测元件(6〜 用于检测透射通过偏振单元(5)的光,其被统一地集成到一个单元中。 此外,本发明提供一种光栅干涉型位移检测装置,其包括如此一体化的复合单元(1)和具有反射型衍射光栅RG的目标单元的外部光学系统,反射单元(R 1a ,用于将来自复合单元(1)的光反射到反射型衍射光栅RG的偏振单元(WP1a,WP1b),用于改变来自反射型衍射光栅RG的衍射光的偏振状态, 以及用于反射透射通过偏振单元(WP1a,WP1b)的光的反射单元(R 2 a,R 2 b),以使反射光向后移动。