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    • 2. 发明授权
    • Method for making high resolution silicon shadow masks
    • 制造高分辨率硅阴影掩模的方法
    • US4919749A
    • 1990-04-24
    • US357481
    • 1989-05-26
    • Philip E. MaugerAlex R. ShimkunasJunling J. Yen
    • Philip E. MaugerAlex R. ShimkunasJunling J. Yen
    • G03F1/20H01L21/027H01L21/3065
    • G03F1/20H01L21/3065
    • A high resolution shadow mask with low pattern distortion is formed from a silicon membrane with a pattern of apertures etched through the membrane by reactive ion etching using a silicon dioxide masking layer. To achieve low distortion over a large area membrane, the stress of the membrane and the masking layer is controlled to remain within an optimal range so that the stress relief that occurs when the apertures are formed is kept negligibly small. A silicon membrane with controlled stress is made using a p/n junction electrochemical etch-stop process. After making the membrane, it is then coated with a deposited silicon dioxide layer. The stress of the oxide layer may be adjusted to an optimum value by annealing after deposition. The membrane with the oxide mask layer is next coated with a photoresist layer which is then patterned with the desired shadow mask pattern. Once the photoresist is patterned, the pattern is then transferred into the oxide layer by reactive ion etching. The patterned oxide then serves as the mask for etching apertures through the silicon membrane, also done by reactive ion etching.
    • 具有低图案畸变的高分辨率荫罩由具有通过使用二氧化硅掩蔽层的反应离子蚀刻通过膜蚀刻的孔的图案的硅膜形成。 为了在大面积膜上实现低变形,膜和掩模层的应力被控制在保持在最佳范围内,使得当形成孔时发生的应力释放保持可忽略不计。 使用p / n结电化学蚀刻停止工艺制备具有受控应力的硅膜。 制膜后,用沉积的二氧化硅层涂覆。 氧化物层的应力可以通过沉积后退火来调节到最佳值。 随后用具有氧化物掩模层的膜涂覆光致抗蚀剂层,然后用期望的荫罩图案将其图案化。 一旦光致抗蚀剂被图案化,然后通过反应离子蚀刻将图案转移到氧化物层中。 图案化的氧化物然后用作通过硅膜蚀刻孔的掩模,也通过反应离子蚀刻进行。
    • 4. 发明授权
    • Scanning probe devices
    • 扫描探头设备
    • US08397555B1
    • 2013-03-19
    • US13036119
    • 2011-02-28
    • Ami Chand
    • Ami Chand
    • G01Q60/48G01Q70/16C23F1/00
    • G01Q70/16G01Q70/10
    • The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    • 本发明涉及扫描探针,其中悬臂通过集成触笔基座接触触针,以及用于制造这种探针的方法。 与其他类型的扫描探针相比,该探针提供了许多优点,以避免在某些应用中需要柔软的反射涂层,并且提供尖锐的触针尖端的简单制造,关于功能化尖端的灵活性以及最小的热漂移 减少双压缩效应。 这些特征的优点有助于通常采集样品的高分辨率图像,特别是在液体中。
    • 10. 发明授权
    • Scanning probe devices and methods for fabricating same
    • 扫描探针装置及其制造方法
    • US07913544B1
    • 2011-03-29
    • US11985622
    • 2007-11-15
    • Ami Chand
    • Ami Chand
    • G01Q70/16
    • G01Q70/16G01Q70/10
    • The present invention is directed to scanning probes in which a cantilever contacts a stylus via an integrated stylus base pad, and methods for fabricating such probes. The probe offer many advantages over other types of scanning probes with respect to eliminating the need for a soft, reflective coating in some applications and providing for the simple fabrication of sharp stylus tips, flexibility with respect to functionalizing the tip, and minimal thermal drift due to reduced bimorph effect. The advantage of these features facilitates the acquisition of high resolution images of samples in general, and particularly in liquids.
    • 本发明涉及扫描探针,其中悬臂通过集成触笔基座接触触针,以及用于制造这种探针的方法。 与其他类型的扫描探针相比,该探针提供了许多优点,以避免在某些应用中需要柔软的反射涂层,并且提供尖锐的触针尖端的简单制造,关于功能化尖端的灵活性以及最小的热漂移 减少双压缩效应。 这些特征的优点有助于通常采集样品的高分辨率图像,特别是在液体中。