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1. 发明授权

US07160746B2 GeBPSG top clad for a planar lightwave circuit 有权
标题翻译： GeBPSG顶部包层用于平面光波电路
公开(公告)号：US07160746B2
公开(公告)日：2007-01-09
申请号：US09917438
申请日：2001-07-27
申请人： Fan Zhong , Michael Lennon
发明人： Fan Zhong , Michael Lennon
IPC分类号： H01L21/00 , C23C16/06
CPC分类号： C23C16/401 , G02B6/122 , G02B2006/121
摘要： A method of depositing a top clad layer for an optical waveguide of a planar lightwave circuit. A GeBPSG top clad layer for an optical waveguide structure of a planar lightwave circuit is fabricated such that the top clad layer comprises doped silica glass, wherein the dopant includes Ge (Germanium), P (Phosphorus), and B (Boron). In depositing a top clad layer for the optical waveguide, three separate doping gasses (e.g., GeH4, PH3, and B2H6) are added during the PECVD (plasma enhanced chemical vapor deposition) process to make Ge, P and B doped silica glass (GeBPSG). The ratio of the Ge, P, and B dopants is configured to reduce the formation of crystallization areas within the top clad layer and maintain a constant refractive index within the top clad layer across an anneal temperature range. A thermal anneal process for the top clad layer can be a temperature within a range of 950C to 1050C. The GeBPSG top clad layer reduces the insertion loss of passive arrayed waveguide grating devices and active planar lightwave circuit devices.
摘要翻译：一种沉积用于平面光波电路的光波导的顶包层的方法。制造用于平面光波电路的光波导结构的GeBPSG顶包层，使得顶包层包括掺杂的石英玻璃，其中掺杂剂包括Ge（锗），P（磷）和B（硼）。在沉积用于光波导的顶部包覆层时，三个单独的掺杂气体（例如，GeH 4，PH 3 3和B 2 H）在PECVD（等离子体增强化学气相沉积）工艺中添加制备Ge，P和B掺杂的石英玻璃（GeBPSG）的工艺。 Ge，P和B掺杂剂的比例被配置为减少顶部包层内的结晶区域的形成，并且在整个退火温度范围内在顶部包覆层内保持恒定的折射率。用于顶部包层的热退火方法可以是在950℃至1050℃的范围内的温度。 GeBPSG顶层减少了无源阵列波导光栅器件和有源平面光波电路器件的插入损耗。

2. 发明授权

US07062127B2 Athermal AWG and AWG with low power consumption using groove of changeable width 有权
标题翻译： Athermal AWG和AWG，功耗低，槽宽可变
公开(公告)号：US07062127B2
公开(公告)日：2006-06-13
申请号：US10844778
申请日：2004-05-13
申请人： Kenneth Purchase , Robert Cole , Anthony J. Ticknor , Kenneth McGreer , Peter D. Ascanio
发明人： Kenneth Purchase , Robert Cole , Anthony J. Ticknor , Kenneth McGreer , Peter D. Ascanio
IPC分类号： G02B6/34 , G02B6/35
CPC分类号： G02B6/12011 , G02B6/12014 , G02B6/1203
摘要： Optical integrated circuits are disclosed having a gap traversing the lens or the waveguide grating and an actuator that controllably positions the optical integrated circuit on each side of the gap. As a result, the thermal sensitivity of the optical integrated circuits, for example, arrayed waveguide gratings, is mitigated. Also disclosed are methods for fabricating optical integrated circuits employing the gap and actuator.
摘要翻译：公开了具有穿过透镜或波导光栅的间隙的光学集成电路和可控地将光学集成电路定位在间隙的每一侧上的致动器。结果，减轻了光集成电路，例如阵列波导光栅的热敏感性。还公开了用于制造采用间隙和致动器的光学集成电路的方法。

3. 发明授权

US06895133B1 Crack propagation stops for dicing of planar lightwave circuit devices 有权
标题翻译：裂纹传播停止用于平面光波电路器件的切割
公开(公告)号：US06895133B1
公开(公告)日：2005-05-17
申请号：US09885627
申请日：2001-06-20
申请人： Chris P. Calkins , Robert Cole
发明人： Chris P. Calkins , Robert Cole
IPC分类号： G02B6/13 , G02B6/12
CPC分类号： G02B6/13
摘要： One aspect of the present invention relates to a method of dicing a substrate containing a plurality of non-rectangular shaped optical integrated circuits, involving forming stop cracks in the wafer, each stop crack adjacent and substantially parallel one of the non-rectangular shaped optical integrated circuits, and cutting the substrate in a curvilinear manner substantially parallel to a stop crack. Another aspect of the present invention relates to an optical structure containing a substrate; a plurality of non-rectangular shaped optical integrated circuits on the substrate, each non-rectangular shaped optical integrated circuit having an active region; and at least one stop crack positioned adjacent each non-rectangular shaped optical integrated circuit.
摘要翻译：本发明的一个方面涉及一种切割含有多个非矩形形状的光学集成电路的衬底的方法，包括在晶片中形成停止裂纹，每个停止与非矩形形状的光学集成电路，并以基本上平行于停止裂纹的曲线方式切割基板。本发明的另一方面涉及一种含有基底的光学结构; 在所述基板上的多个非矩形的光集成电路，每个非矩形的光集成电路具有有源区; 以及邻近每个非矩形形状的光学集成电路定位的至少一个止动裂纹。

4. 发明授权

US06853769B2 Arrayed waveguide grating with waveguides of unequal widths 有权
标题翻译：具有不等宽度波导的阵列波导光栅
公开(公告)号：US06853769B2
公开(公告)日：2005-02-08
申请号：US09870876
申请日：2001-05-30
申请人： Kenneth McGreer
发明人： Kenneth McGreer
IPC分类号： G02B6/10 , G02B6/34
CPC分类号： G02B6/12011 , G02B6/105 , G02B6/12023
摘要： The present invention provides an arrayed waveguide such that each waveguide of the grating has a substantially uniform width, but the width of any single waveguide in the grating is selected based on a predetermined birefringence required for the waveguide. Generally, the narrowest grating waveguide has the longest overall length and the widest grating waveguide has the shortest overall length. The remaining intermediate waveguides have widths that are interpolated between the narrowest and widest waveguide gratings. With an appropriate width for each waveguide, an arrayed waveguide grating is provided that has low polarization dependent wavelength.
摘要翻译：本发明提供一种阵列波导，使得光栅的每个波导具有基本均匀的宽度，但是基于波导所需的预定的双折射来选择光栅中的任何单个波导的宽度。通常，最窄的光栅波导具有最长的总长度，最宽的光栅波导具有最短的总长度。剩余的中间波导具有在最窄和最宽波导光栅之间内插的宽度。对于每个波导具有适当的宽度，提供具有低偏振相关波长的阵列波导光栅。

5. 发明授权

US5970186A Hybrid digital electro-optic switch 失效
标题翻译：混合数字电光开关
公开(公告)号：US5970186A
公开(公告)日：1999-10-19
申请号：US816124
申请日：1997-03-11
申请人： John T. Kenney , Richard D. Sherman
发明人： John T. Kenney , Richard D. Sherman
IPC分类号： G02F1/313 , G02B6/26
CPC分类号： G02F1/3132
摘要： A hybrid digital electro-optic switch has core and/or cladding areas that contain at least two different materials which undergo a change in their refractive index when an electric field is applied. One of the two different materials used in core regions, for example, has a change in refractive index that is less than the change in refractive index for the other material when the materials are exposed to the same electric field. A hybrid digital electro-optic switch functions by modulating the propagation constants of the eigenmodes of the switch with a voltage-induced refractive-index change, so that the propagation constants of the two materials are equal either in the presence or absence of the electric field. These electro-optic modulations change the evanescent coupling between the waveguides of the waveguide regions of the switch and transfer an optical signal that was input into one of the waveguides to a coupled waveguide. Compared to earlier digital electro-optic switch designs, the new switch has lower switching voltage, smaller device size, a sharper optical signal transfer, and wider manufacturing and use tolerances, and the switch can use a wide array of materials in its construction. The new switch can also be integrated with both the microstrip and coplanar traveling wave electrodes for very high speed photonic switching applications.
摘要翻译：混合数字电光开关具有包含至少两种不同材料的芯和/或包层区域，当施加电场时，它们的折射率发生变化。例如，在芯区域中使用的两种不同材料中的一种，当材料暴露于相同的电场时，折射率的变化小于其它材料的折射率变化。混合数字电光开关通过用电压引起的折射率变化来调制开关的本征模的传播常数来实现，使得两种材料的传播常数在存在或不存在电场时相等。这些电光调制改变了开关的波导区域的波导之间的消逝耦合，并将输入到波导中的一个的光信号传送到耦合波导。与先前的数字电光开关设计相比，新开关具有较低的开关电压，更小的器件尺寸，更清晰的光信号传输，更宽的制造和使用公差，并且开关可以在其结构中使用各种各样的材料。新开关也可以与微带线和共面行波电极集成，用于非常高速的光子开关应用。

6. 发明申请

US20100040328A1 DISTRIBUTING OPTICAL POWER WITH A POWER BALANCE RATIO SUBSTANTIALLY CONSTANT OVER A BROADBAND OF WAVELENGTHS 有权
标题翻译：功率平衡分布光功率主要来自波长宽带
公开(公告)号：US20100040328A1
公开(公告)日：2010-02-18
申请号：US12547893
申请日：2009-08-26
申请人： Kenneth McGreer , Anthony J. Ticknor , Hao Xu
发明人： Kenneth McGreer , Anthony J. Ticknor , Hao Xu
IPC分类号： G02B6/42
CPC分类号： G02B6/2808 , G02B6/125 , G02B6/2835
摘要： Methods of using an optical device capable of distributing the optical power presented at an input to specified ratios in two output ports. The devices and methods described herein have the ability to broaden the range of wavelengths over which the splitting ratio is even, or substantially even. Methods involve achieving a desired splitting ratio over a broad or ultra-broad wavelength range.
摘要翻译：使用能够将在输入处呈现的光功率分配给两个输出端口中的指定比例的光学装置的方法。本文描述的装置和方法具有扩大分束比均匀或基本均匀的波长范围的能力。方法涉及在宽或超宽波长范围内实现期望的分束比。

7. 发明申请

US20080240655A1 Method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a top cladding 有权
标题翻译：通过选择顶部包层的波导芯宽度来控制波导双折射的方法和装置
公开(公告)号：US20080240655A1
公开(公告)日：2008-10-02
申请号：US12079930
申请日：2008-03-28
申请人： Farnaz Parhami , Liang Zhao , Fan Zhong
发明人： Farnaz Parhami , Liang Zhao , Fan Zhong
IPC分类号： G02B6/34 , G02B6/10
CPC分类号： G02B6/12023 , G02B6/126
摘要： A method and apparatus for controlling waveguide birefringence by selection of a waveguide core width for a tuned top clad is described herein. In one example, a dopant concentration within a top cladding material is between 3-6% (wt.). Given a tuned top cladding composition, a width of the waveguide core is pre-selected such that birefringence is minimized, i.e., a zero, or near zero. The desirable width of the waveguide core is determined by calculating the distribution of stress in the top cladding over a change in temperature. From this distribution of stress, a relationship between the polarization dependent wavelength and variable widths of the waveguide in the arrayed waveguide grating are determined. This relationship determines a zero value, or near zero value, of polarization dependent wavelength for a given range of waveguide widths. Accordingly, the width of the waveguide may be selected such that the polarization dependent wavelength is minimized.
摘要翻译：本文描述了通过选择用于调谐顶部包层的波导芯宽度来控制波导双折射的方法和装置。在一个实例中，顶部包层材料内的掺杂剂浓度在3-6％（重量）之间。给定一个调整的顶部包层组成，预先选择波导芯的宽度，使得双折射最小化，即零或接近零。通过计算在顶部包层中的应力在温度变化中的分布来确定波导芯的期望宽度。根据这种应力分布，确定阵列波导光栅中波导的偏振相关波长与可变宽度之间的关系。对于给定的波导宽度范围，该关系确定偏振相关波长的零值或近零值。因此，可以选择波导的宽度使得偏振相关波长最小化。

8. 发明申请

US20070217739A1 BROADBAND 2X2 OPTICAL SPLITTER 有权
标题翻译：宽带2X2光学分路器
公开(公告)号：US20070217739A1
公开(公告)日：2007-09-20
申请号：US11678485
申请日：2007-02-23
申请人： Kenneth McGreer , Anthony Ticknor , Hao Xu
发明人： Kenneth McGreer , Anthony Ticknor , Hao Xu
IPC分类号： G02B6/42
CPC分类号： G02B6/2808 , G02B6/125 , G02B6/2835
摘要： An optical device containing a four-port optical mixer capable of distributing the optical power presented at either or both of two input ports to specified ratios in two output ports.
摘要翻译：一种光学装置，其包含四端口光混合器，其能够将在两个输入端口中的一个或两个处呈现的光功率分配给两个输出端口中的指定比例。

9. 发明申请

US20020159702A1 Optical mach-zehnder interferometers with low polarization dependence 审中-公开
标题翻译：具有低偏振依赖性的光学马赫 - 泽德干涉仪
公开(公告)号：US20020159702A1
公开(公告)日：2002-10-31
申请号：US10059674
申请日：2002-01-30
申请人： Lightwave Microsystems Corporation
发明人： Alice Liu , Kenneth McGreer , Wenjie Chen , Wayne Wai Wing Lui
IPC分类号： G02B006/26
CPC分类号： G02F1/3136 , G02F1/0147 , G02F2203/06 , G02F2203/48
摘要： This relates generally to optical waveguide-based devices including dynamically programmable optical attenuators. In particular, this provides an optical attenuator having a Mach Zehnder configuration with reduced polarization dependence. The devices herein facilitate the implementation of continuously-variable optical attenuators, optical shutters, and optical switches in an integrated photonic circuit.
摘要翻译：这大体上涉及包括动态可编程光衰减器的基于光波导的器件。特别地，这提供了具有减小的偏振依赖性的具有马赫曾德尔配置的光衰减器。这里的器件有助于在集成光子电路中实现连续可变的光衰减器，光学快门和光开关。

10. 发明申请

US20020076145A1 Optical devices for controlling insertion loss 有权
标题翻译：用于控制插入损耗的光学装置
公开(公告)号：US20020076145A1
公开(公告)日：2002-06-20
申请号：US09955630
申请日：2001-09-18
申请人： Lightwave Microsystems Corporation
发明人： Jane Lam , Liang Zhao , Kenneth McGreer , Hao Xu , Wayne Wai Wing Lui
IPC分类号： G02B006/26
CPC分类号： G02B6/12016
摘要： The invention relates to an optical device which carries multiple optical signals where the optical device has a plurality of distal waveguides some of which may be configured to control insertion loss among the multiple optical signals.
摘要翻译：本发明涉及一种携带多个光信号的光学装置，其中光学装置具有多个远端波导，其中一些远端波导可被配置为控制多个光信号之间的插入损耗。

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