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1. 发明授权

US07453652B2 Member switching apparatus, lens switching apparatus, laser repair apparatus, and laser inspection apparatus 失效
标题翻译：会员切换装置，镜头切换装置，激光修复装置及激光检查装置
公开(公告)号：US07453652B2
公开(公告)日：2008-11-18
申请号：US11326285
申请日：2006-01-06
申请人： Masakazu Nozaki
发明人： Masakazu Nozaki
IPC分类号： G02B15/14
CPC分类号： G02B7/14 , B23K26/064 , B23K26/0648 , B23K26/0665
摘要： A linear motor table is provided in a lens switching apparatus of a laser repair apparatus. The linear motor table is fixed with respect to a table and a laser oscillator and moves a lens holder in a horizontal direction. Six objective lenses with magnifications different from each other are provided and are held in a lens holder in a row such that the optical axes thereof are parallel to each other. The objective lens placed in the light path of laser light is switched by the linear motor table moving the lens holder. Because of this, a member, such as a lens, can be positioned with high accuracy and if positional shifting occurs, it can be quickly cancelled using a simple mechanism.
摘要翻译：在激光修复装置的透镜切换装置中设置有线性马达台。线性马达工作台相对于桌子和激光振荡器固定，并且在水平方向上移动透镜架。提供了具有彼此不同的倍率的六个物镜，并且被保持在一个透镜架中，使得其光轴彼此平行。放置在激光光路中的物镜通过移动透镜架的线性电动台来切换。因此，可以高精度地定位诸如透镜的构件，并且如果发生位置偏移，则可以使用简单的机构快速地取消。

2. 发明授权

US07440477B2 Solid-state laser generator 有权
标题翻译：固态激光发生器
公开(公告)号：US07440477B2
公开(公告)日：2008-10-21
申请号：US11288229
申请日：2005-11-29
申请人： Hiroyuki Morita
发明人： Hiroyuki Morita
IPC分类号： H01S3/10
CPC分类号： H01S3/109 , H01S3/005 , H01S3/07 , H01S3/08072 , H01S3/0815 , H01S3/127 , H01S3/1611 , H01S3/1643
摘要： Two laser media are disposed at equal intervals between a first flat mirror, which is a resonator mirror comprising a resonator, and a second flat mirror for separating laser light that transmits second-harmonic laser light and reflects fundamental laser light toward a laser light incident plane; and a dielectric multilayer film is formed on the second flat mirror for separating the laser light. A third flat mirror, which is a resonator mirror, is disposed so as to face a direction 90° to the incident direction of the fundamental laser light in the second flat mirror. A first lens, a nonlinear optical crystal for converting fundamental laser light into a second-harmonic laser light, and a second lens are disposed in sequence in a single row at intervals that are equal to the focal distances f of the first and second lenses between the second and third flat mirrors. Space for accommodating a nonlinear optical crystal and a mirror for separating second-harmonic laser light can thereby be secured while maintaining stabilized resonance conditions, and the output of the solid-state laser generator can be increased.
摘要翻译：在作为包括谐振器的谐振器镜的第一平面镜和用于分离透射二次谐波激光的激光并将基本激光反射到激光入射面的第二平面镜之间以相等的间隔设置两个激光介质 ; 并且在第二平面镜上形成用于分离激光的电介质多层膜。作为谐振镜的第三平面镜被配置成与第二平面镜中的基本激光的入射方向成90°的方向。将第一透镜，用于将基本激光转换为二次谐波激光的非线性光学晶体和第二透镜依次以与第一和第二透镜的焦距f相等的间隔依次布置在第二和第三平面镜。从而可以在保持稳定的共振条件的同时确保用于容纳非线性光学晶体的空间和用于分离二次谐波激光的反射镜，并且可以增加固态激光发生器的输出。

3. 发明授权

US07154926B2 Laser diode module, laser apparatus and laser processing apparatus 失效
标题翻译：激光二极管模块，激光设备和激光加工设备
公开(公告)号：US07154926B2
公开(公告)日：2006-12-26
申请号：US10942809
申请日：2004-09-17
申请人： Hikaru Kouta , Hisaya Takahashi , Hideyuki Ono , Yuuzou Ikeda , Masaki Tunekane , Toshinori Ishida , Keiichi Kubota
发明人： Hikaru Kouta , Hisaya Takahashi , Hideyuki Ono , Yuuzou Ikeda , Masaki Tunekane , Toshinori Ishida , Keiichi Kubota
IPC分类号： H01S3/00
CPC分类号： H01S5/02264 , H01L2224/48091 , H01L2224/49175 , H01S5/0021 , H01S5/02272 , H01S5/02276 , H01S5/02423 , H01S5/02476 , H01S5/4018 , H01S5/4025 , H01L2924/00014
摘要： Submount substrates are connected to both sides of a laser diode via hard solders. The lower submount substrate and a heat sink are connected together by a soft solder. The heat sink and a presser electrode are fixed with a predetermined gap therebetween via an insulating spacer. A coil electrode is fitted in a V-shaped groove of the presser electrode. As the coil electrode is deformed slightly elastically, the coil electrode is pressed against the upper submount substrate.
摘要翻译：底座基板通过硬焊料连接到激光二极管的两侧。下底座基板和散热器通过软焊料连接在一起。散热器和压脚电极经由绝缘间隔件以预定间隙固定。线圈电极装配在压脚电极的V形槽中。当线圈电极稍微弹性变形时，线圈电极被压靠在上基板上。

4. 发明授权

US07024076B2 Optical packet header identifier, optical router incorporating the same therein, and optical routing method using the router 失效
标题翻译：光分组报头标识符，其中包含其中的光路由器，以及使用该路由器的光路由方法
公开(公告)号：US07024076B2
公开(公告)日：2006-04-04
申请号：US11083981
申请日：2005-03-21
申请人： Yoshinori Ohta , Yukio Ogura
发明人： Yoshinori Ohta , Yukio Ogura
IPC分类号： G02B6/34
CPC分类号： H04B10/671 , H04B10/676 , H04J14/0212 , H04J14/0227 , H04Q11/0005 , H04Q11/0066 , H04Q2011/0041
摘要： An optical packet header identifier having a simplified configuration and being superior in reliability, stability, and economical efficiency, an optical router incorporating the identifier therein, and a routing method using the optical router are provided. The optical packet header identifier includes an optical waveguide, optical focusing elements, and a photo receiver. Tilted gratings for diffracting an incident optical beam and emitting the beams as diffracted optical beams to the outside of the waveguide are formed within the optical waveguide. The tilted gratings are not formed uniformly in a longitudinal direction of a core of the optical waveguide, but are arranged at intervals. The length of a portion containing a set of gratings and the length of a portion containing no gratings can be defined in increments of length “L”. “L” equals to the spatial length which 1 bit in an optical signal occupies.
摘要翻译：提供了具有简化配置并且在可靠性，稳定性和经济效率方面优异的光分组报头标识符，其中包含标识符的光学路由器以及使用该光路由器的路由方法。光分组报头标识符包括光波导，光聚焦元件和光接收器。用于衍射入射光束并将光束作为衍射光束发射到波导外部的倾斜光栅形成在光波导内。倾斜的光栅不是在光波导的芯的纵向方向上均匀地形成，而是间隔地布置。包含一组光栅的部分的长度和不包含光栅的部分的长度可以以长度“L”的增量来定义。 “L”等于光信号占据1位的空间长度。

5. 发明申请

US20050061780A1 Wiring repair apparatus 失效
标题翻译：接线维修设备
公开(公告)号：US20050061780A1
公开(公告)日：2005-03-24
申请号：US10940982
申请日：2004-09-15
申请人： Koji Wakabayashi
发明人： Koji Wakabayashi
IPC分类号： G02F1/13 , C23C16/04 , C23C16/44 , C23C16/455 , C23C16/48 , G02F1/1343 , H01L21/3205 , H01L23/52 , H01L29/786 , B23K26/00
CPC分类号： C23C16/45519 , C23C16/047 , H01L2924/0002 , H01L2924/00
摘要： A wiring repair apparatus includes an XY stage on which a substrate is placed, a laser source unit disposed above the XY stage, first and second gas windows disposed between the laser source unit and the XY stage, and first and second CVD gas units. The laser source unit emits a laser beam to a part of the substrate to be repaired. This laser beam passes through either the first or second gas window. The first CVD gas unit supplies an Al source gas (DMAH gas) to the first gas window while the second CVD gas unit supplies a Cr source gas (Cr(CO)6 gas) to the second gas window.
摘要翻译：布线修复装置包括：XY台，放置基板;激光源单元，设置在XY台上;设置在激光源单元与XY台之间的第一和第二气窗;以及第一和第二CVD气体单元。激光源单元向要修复的基板的一部分发射激光束。该激光束通过第一或第二气窗。第一CVD气体单元向第一气体窗口供应Al源气体（DMAH气体），而第二CVD气体单元将Cr源气体（Cr（CO）6气体）供应到第二气体窗口。

6. 发明授权

US07916393B2 Optical level control device, method for controlling same, and laser application device 失效
标题翻译：光电平控制装置及其控制方法及激光施加装置
公开(公告)号：US07916393B2
公开(公告)日：2011-03-29
申请号：US12355501
申请日：2009-01-16
申请人： Tsuyoshi Nagano , Yoshinori Ohta
发明人： Tsuyoshi Nagano , Yoshinori Ohta
IPC分类号： G02B5/30
CPC分类号： G02B27/283
摘要： The optical level control device independently controls the intensities of two beams having different wavelengths that are emitted from a laser oscillator, and the optical level control device includes a wavelength-dependent wavelength plate and a polarization beam splitter. The wavelength-dependent wavelength plate functions as a half-wave plate with respect to the first light wave and as a full-wave plate with respect to the second light wave. Only the rotation angle of the polarization beam splitter about the optical axis is adjusted to set the intensity of the second light wave transmitted rectilinearly through the polarization beam splitter. The polarization beam splitter is then fixed at the adjusted angle, and the rotation angle of the wavelength plate about the optical axis is adjusted to set the intensity of the first light wave.
摘要翻译：光学电平控制装置独立地控制从激光振荡器发射的具有不同波长的两个光束的强度，并且光学电平控制装置包括波长依赖波长板和偏振分束器。波长相关波长板相对于第一光波作为半波片，相对于第二光波作为全波片起作用。仅调整偏振光束分光器绕光轴的旋转角度，以设定通过偏振分束器直线透射的第二光波的强度。然后将偏振分束器以调节的角度固定，并且调节波长板围绕光轴的旋转角度以设定第一光波的强度。

7. 发明授权

US07519252B2 Laser annealing apparatus 失效
标题翻译：激光退火装置
公开(公告)号：US07519252B2
公开(公告)日：2009-04-14
申请号：US11691131
申请日：2007-03-26
申请人： Keiko Morita, legal representative
发明人： Hiroyuki Morita
IPC分类号： G02B6/04
CPC分类号： G02B6/4296 , G02B27/0911 , G02B27/0927 , G02B27/0994 , H01L21/268 , H01S3/005
摘要： A laser annealing apparatus comprises a laser oscillator having a Q switching action, one or a plurality of partially reflective mirrors for split a laser beam emitted from the laser oscillator into a plurality of laser beams, a plurality of optical fibers which respectively transmit the plurality of laser beams split by the partially reflective mirrors, and whose respective emission ends are arranged linearly in one direction, a first optical system for synthesizing and homogenizing the plurality of laser beams emitted from the optical fibers, and a second optical system for focusing the laser beam emitted from the first optical system on the work piece surface as a rectangular laser beam whose beam shape is long in the lateral direction and short in the longitudinal direction. As a result, laser power transmission by means of slender optical fibers is possible even in cases in which a green laser such as the second harmonic of an Nd:YAG laser having a Q switching action or the like is used as a heating light source. Accordingly, a compact laser annealing apparatus that has a high-quality working performance and does not require a laser amplifier or high-frequency generating apparatus can be obtained.
摘要翻译：激光退火装置包括具有Q切换动作的激光振荡器，用于将从激光振荡器发射的激光束分成多个激光束的一个或多个部分反射镜，分别透射多个激光振荡器的多个光纤由部分反射镜分开的激光束，其各个发射端沿一个方向线性布置;第一光学系统，用于合成和均化从光纤发出的多个激光束;以及第二光学系统，用于聚焦激光束从工件表面上的第一光学系统发射的光束形状在横向方向上长并且在纵向方向上短的矩形激光束。结果，即使在使用诸如具有Q切换动作的Nd：YAG激光器的二次谐波的绿色激光等作为加热光源的情况下，也可以通过细长的光纤进行激光功率传输。因此，可以获得具有高质量工作性能并且不需要激光放大器或高频产生装置的紧凑型激光退火装置。

8. 发明授权

US07233611B2 Diode-pumped solid-state laser device and manufacturing method of the same 失效
标题翻译：二极管泵浦固态激光器件及其制造方法
公开(公告)号：US07233611B2
公开(公告)日：2007-06-19
申请号：US10715553
申请日：2003-11-19
申请人： Katsuji Mukaihara , Masaki Tsunekane
发明人： Katsuji Mukaihara , Masaki Tsunekane
IPC分类号： H01S3/093
CPC分类号： H01S3/0941 , H01S3/025 , H01S3/0407 , H01S3/042 , H01S3/094084
摘要： A conventional method for a solid-state laser device that obtains a laser beam output of a high quality at a high output using a laser diode as a pumping light source has a problem that the costs are increased and the fabrication becomes complicated due to an increasing number of components, such as a diffusing reflection mirror, a condenser lens, and a holding mechanism and a cooling mechanism thereof. Coating with a antireflection coating to reduce a transmission loss of laser diode light, and coating with a high reflection coating to reflect the laser diode light are provided alternately on the outer surface of a cooling tube. Also, an irradiation direction of the laser diode is not directed to the center of the laser rod, but is given with a certain angle to be positively tilted. This configuration makes it possible to eliminate the above problem.
摘要翻译：使用激光二极管作为泵浦光源获得高质量的高质量激光束输出的常规方法具有成本增加并且由于增加而导致制造变得复杂的问题多个部件，例如扩散反射镜，聚光镜，保持机构及其冷却机构。在冷却管的外表面交替地设置具有抗反射涂层的涂层以减少激光二极管光的传输损耗，并且用高反射涂层涂覆以反射激光二极管光。此外，激光二极管的照射方向不是朝向激光棒的中心，而是被赋予一定角度以被正向倾斜。该配置使得可以消除上述问题。

9. 发明授权

US06890387B2 Method and device for correcting pattern film on a semiconductor substrate 失效
标题翻译：用于校正半导体衬底上的图案膜的方法和装置
公开(公告)号：US06890387B2
公开(公告)日：2005-05-10
申请号：US09981712
申请日：2001-10-19
申请人： Yukio Morishige , Makoto Oomiya
发明人： Yukio Morishige , Makoto Oomiya
IPC分类号： G02F1/13 , C23C16/04 , C23C16/44 , C23C16/48 , G03F1/72 , G03F7/40 , H01L21/027 , C23C16/00 , C23F1/00 , H05H1/00
CPC分类号： C23C16/483 , C23C16/047 , G03F1/72
摘要： In order to correct a white defect on a surface of a substrate, the substrate is held with the surface facing downward, laser light is upward irradiated at the defect on the surface in material gas, and as a result, the white defect is covered with film.
摘要翻译：为了校正基板表面上的白色缺陷，基板被保持，其表面朝下，激光在材料气体表面的缺陷处向上照射，结果白色缺陷被覆盖电影。

10. 发明授权

US06926801B2 Laser machining method and apparatus 失效
标题翻译：激光加工方法和装置
公开(公告)号：US06926801B2
公开(公告)日：2005-08-09
申请号：US10437192
申请日：2003-05-14
申请人： Yukio Morishige
发明人： Yukio Morishige
IPC分类号： B23K26/12 , C23F1/02 , C23F1/08 , G03F1/72 , H01L21/302 , C23F1/00 , C23C16/00 , C23C16/10 , C23C16/48 , H01L21/306
CPC分类号： B23K26/0853 , B23K26/03 , B23K26/12 , B23K26/126 , B23K26/127 , B23K26/142 , C23F1/02 , C23F1/08 , G03F1/72
摘要： In a laser machining method for removing remaining defects on a photomask, there has been problems to be resolved that damage is formed at the portion of the substrate where the defect has been removed, thus resulting in degraded quality of machining. In a laser machining method for removing remaining defects on a photomask by a method of laser machining, the remaining defects are removed by using a configuration in which irradiation with a laser beam is performed from below with a to-be-machined surface directed downward, and irradiation with a laser beam in an atmosphere containing a halogenated hydrocarbon gas (as an example, ethyl iodide).
摘要翻译：在用于去除光掩模上剩余缺陷的激光加工方法中，存在的问题是，在已经去除缺陷的基板的部分处形成损伤，从而导致加工质量下降。在通过激光加工方法去除光掩模上的剩余缺陷的激光加工方法中，通过使用从下方进行用激光束照射的被加工表面向下的结构来除去剩余的缺陷，并在含有卤代烃气体的气氛（例如乙基碘）中用激光束照射。

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