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1. 发明授权

US08612065B2 Position encoder with programmable trigger output signal 有权
标题翻译：带可编程触发输出信号的位置编码器
公开(公告)号：US08612065B2
公开(公告)日：2013-12-17
申请号：US12717987
申请日：2010-03-05
申请人： Andrew M. Goldman , Paul A. Remillard
发明人： Andrew M. Goldman , Paul A. Remillard
IPC分类号： G05D3/12
CPC分类号： G05D3/12
摘要： A position encoder provides one or more trigger outputs based on position signals developed within the encoder, in addition to traditional position output signals used by other system components such as a motion controller. The trigger outputs may be used directly by a triggered device, bypassing the motion controller and obviating any separate trigger generation electronics. The trigger output(s) can be fully synchronous with the encoder's position output signal(s) with essentially no latency or jitter, increasing accuracy and providing improved system performance. The trigger functionality can be incorporated in a variety of encoder types (e.g., absolute and incremental) and technologies (optical, magnetic, inductive etc.), and used in conjunction with different position output signal formats (e.g., quadrature, serial).
摘要翻译：除了诸如运动控制器的其他系统组件使用的传统位置输出信号之外，位置编码器还基于在编码器内产生的位置信号来提供一个或多个触发输出。触发输出可以由触发的设备直接使用，绕过运动控制器并且消除任何单独的触发器电子器件。触发输出可以与编码器的位置输出信号完全同步，基本上没有延迟或抖动，提高了精度并提高了系统性能。触发功能可以并入各种编码器类型（例如，绝对和增量）和技术（光学，磁性，电感等），并且与不同的位置输出信号格式（例如，正交，串行）结合使用。

2. 发明申请

US20130200050A1 LINK PROCESSING WITH HIGH SPEED BEAM DEFLECTION 审中-公开
公开(公告)号：US20130200050A1
公开(公告)日：2013-08-08
申请号：US13608454
申请日：2012-09-10
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/08 , B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.

3. 发明申请

US20130027795A1 SYSTEMS AND METHODS FOR PROVIDING MIRRORS WITH HIGH STIFFNESS AND LOW INERTIA INVOLVING CHEMICAL ETCHING 审中-公开
标题翻译：用于提供具有高硬度和低惯性参与化学蚀刻的镜子的系统和方法
公开(公告)号：US20130027795A1
公开(公告)日：2013-01-31
申请号：US13560023
申请日：2012-07-27
申请人： David C. Brown
发明人： David C. Brown
IPC分类号： G02B7/182 , B44C1/22
CPC分类号： G02B7/1821 , C23F1/30 , G02B26/105
摘要： A method is disclosed of fabricating a mirror for use in limited rotation motor systems, said method comprising the steps of providing a mirror structure including at least one wall section, and exposing the at least one wall section to a fluid etching agent to thereby provide chemical milling of the mirror structure.
摘要翻译：公开了一种制造用于有限旋转电动机系统的反射镜的方法，所述方法包括以下步骤：提供包括至少一个壁部分的反射镜结构，并将至少一个壁部分暴露于流体蚀刻剂，从而提供化学铣削镜面结构。

4. 发明授权

US08329600B2 Method and system for high-speed precise laser trimming and scan lens for use therein 有权
标题翻译：用于高速精密激光修整和扫描镜片的方法和系统
公开(公告)号：US08329600B2
公开(公告)日：2012-12-11
申请号：US12499123
申请日：2009-07-08
申请人： Bo Gu , Jonathan S. Ehrmann , Joseph V. Lento , Bruce L. Couch , Yun Fee Chu , Shepard D. Johnson
发明人： Bo Gu , Jonathan S. Ehrmann , Joseph V. Lento , Bruce L. Couch , Yun Fee Chu , Shepard D. Johnson
IPC分类号： H01L21/26
CPC分类号： H01C17/242 , B23K26/0622 , B23K26/351 , B23K26/361
摘要： A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.
摘要翻译：提供了一种用于其中的方法，系统和扫描透镜，用于沿着修剪路径的高速，基于激光的，精确的激光修整至少一个电气元件。该方法包括用激光产生脉冲激光输出，该输出具有一个或多个重复频率的激光脉冲。可以使用快速上升/下降时间，脉冲形q切换激光器或超快速激光器。光束成形光学元件可用于产生平顶光束轮廓。每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。波长足够短以产生所需的小光斑尺寸，紧密公差，高吸收以及沿着修剪路径减少或消除的热影响区（HAZ）的短波长益处，但不会如此短以致于引起微裂纹。以这种方式，减少了修整过程之后的电阻漂移。

5. 发明授权

US08269137B2 Link processing with high speed beam deflection 有权
标题翻译：链接处理与高速光束偏转
公开(公告)号：US08269137B2
公开(公告)日：2012-09-18
申请号：US12233476
申请日：2008-09-18
申请人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
发明人： Jonathan S. Ehrmann , Joseph J. Griffiths , James J. Cordingley , Donald J. Svetkoff , Shepard D. Johnson , Michael Plotkin
IPC分类号： B23K26/36
CPC分类号： B23K26/0869 , B23K26/0344 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0648 , B23K26/0665 , B23K26/082 , B23K26/0853 , B23K26/361 , B23K26/40 , B23K2101/40 , B23K2103/16 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L27/10844 , H01L2924/0002 , Y10T29/49156 , H01L2924/00
摘要： The present invention relates to the field of laser processing methods and systems, and specifically, to laser processing methods and systems for laser processing multi-material devices. Systems and methods may utilize high speed deflectors to improve processing energy window and/or improve processing speed. In some embodiments, a deflector is used for non-orthogonal scanning of beam spots. In some embodiment, a deflector is used to implement non-synchronous processing of target structures.
摘要翻译：本发明涉及激光加工方法和系统的领域，具体涉及用于激光加工多材料装置的激光加工方法和系统。系统和方法可以利用高速偏转器来改善处理能量窗口和/或提高处理速度。在一些实施例中，偏转器用于束斑的非正交扫描。在一些实施例中，偏转器用于实现目标结构的非同步处理。

6. 发明授权

US07838794B2 Laser-based method and system for removing one or more target link structures 有权
标题翻译：用于去除一个或多个目标链路结构的基于激光的方法和系统
公开(公告)号：US07838794B2
公开(公告)日：2010-11-23
申请号：US11700386
申请日：2007-01-31
申请人： Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
发明人： Bo Gu , Donald V. Smart , James J. Cordingley , Joohan Lee , Donald J. Svetkoff , Shepard D. Johnson , Jonathan S. Ehrmann
IPC分类号： B23K26/40 , H01L21/44
CPC分类号： B23K26/0626 , B23K26/04 , B23K26/0624 , B23K26/0736 , B23K26/361 , B23K26/389 , B23K26/40 , B23K2101/38 , B23K2101/40 , B23K2103/08 , B23K2103/10 , B23K2103/12 , B23K2103/50 , H01L21/485 , H01L21/76894 , H01L22/12 , H01L23/5258 , H01L2924/0002 , H05K3/0026 , H01L2924/00
摘要： Laser-based methods and systems for removing one or more target link structures of a circuit fabricated on a substrate includes generating a pulsed laser output at a predetermined wavelength less than an absorption edge of the substrate are provided. The laser output includes at least one pulse having a pulse duration in the range of about 10 picoseconds to less than 1 nanosecond, the pulse duration being within a thermal laser processing range. The method also includes delivering and focusing the laser output onto the target link structure. The focused laser output has sufficient power density at a location within the target link structure to reduce the reflectivity of the target link structure and efficiently couple the focused laser output into the target link structure to remove the target link structure without damaging the substrate.
摘要翻译：设置用于去除在衬底上制造的电路的一个或多个目标链路结构的基于激光的方法和系统包括产生具有小于衬底的吸收边缘的预定波长的脉冲激光输出。激光输出包括脉冲持续时间在约10皮秒至小于1纳秒范围内的至少一个脉冲，脉冲持续时间在热激光器处理范围内。该方法还包括将激光输出传送和聚焦到目标链路结构上。聚焦的激光输出在目标链路结构内的位置处具有足够的功率密度，以减少目标链路结构的反射率，并将聚焦的激光输出有效地耦合到目标链路结构中以去除目标链路结构而不损坏基板。

7. 发明授权

US07750268B2 Energy efficient, laser-based method and system for processing target material 有权
标题翻译：高能效，基于激光的方法和处理目标材料的系统
公开(公告)号：US07750268B2
公开(公告)日：2010-07-06
申请号：US11843229
申请日：2007-08-22
申请人： Donald V. Smart
发明人： Donald V. Smart
IPC分类号： B23K26/36 , B23K26/38
CPC分类号： B23K26/0736 , B23K26/0622 , B23K26/0624 , B23K26/361 , B23K26/40 , B23K2103/50 , H01L21/76894 , H01L23/5258 , H01L2924/0002 , Y10S438/94 , Y10T29/49156 , H01L2924/00
摘要： An energy-efficient method and system for processing target material such as microstructures in a microscopic region without causing undesirable changes in electrical and/or physical characteristics of material surrounding the target material is provided. The system includes a controller for generating a processing control signal and a signal generator for generating a modulated drive waveform based on the processing control signal. The waveform has a sub-nanosecond rise time. The system also includes a gain-switched, pulsed semiconductor seed laser for generating a laser pulse train at a repetition rate. The drive waveform pumps the laser so that each pulse of the pulse train has a predetermined shape. Further, the system includes a laser amplifier for optically amplifying the pulse train to obtain an amplified pulse train without significantly changing the predetermined shape of the pulses. The amplified pulses have little distortion and have substantially the same relative temporal power distribution as the original pulse train from the laser. Each of the amplified pulses has a substantially square temporal power density distribution, a sharp rise time, a pulse duration and a fall time. The system further includes a beam delivery and focusing subsystem for delivering and focusing at least a portion of the amplified pulse train onto the target material.
摘要翻译：提供了一种用于在微观区域中处理诸如微结构的目标材料而不引起围绕目标材料的材料的电气和/或物理特性的不期望的变化的能量效率方法和系统。该系统包括用于产生处理控制信号的控制器和用于基于处理控制信号产生调制的驱动波形的信号发生器。波形具有亚纳秒上升时间。该系统还包括用于以重复率产生激光脉冲串的增益切换脉冲半导体种子激光器。驱动波形泵浦激光器，使得脉冲串的每个脉冲具有预定的形状。此外，该系统包括用于光学放大脉冲串以获得放大的脉冲串而不显着改变脉冲的预定形状的激光放大器。放大的脉冲具有很小的失真，并且具有与来自激光器的原始脉冲串相当的相对时间功率分布。每个放大的脉冲具有基本上正方形的时间功率密度分布，急剧上升时间，脉冲持续时间和下降时间。该系统还包括用于将放大的脉冲序列的至少一部分传送和聚焦到目标材料上的束传递和聚焦子系统。

8. 发明授权

US07732731B2 Method and system for laser processing targets of different types on a workpiece 失效
标题翻译：工件上不同类型激光加工对象的方法和系统
公开(公告)号：US07732731B2
公开(公告)日：2010-06-08
申请号：US11900731
申请日：2007-09-13
申请人： Bo Gu
发明人： Bo Gu
IPC分类号： B23K26/00
CPC分类号： B23K26/0622 , B23K26/082 , B23K26/351 , B23K26/40 , B23K2101/40 , B23K2103/50
摘要： A method and system for laser processing targets of different types on a workpiece are provided. The method includes setting a laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more set pulse widths based on a first type of target to be processed. The method further includes setting a pulse shape of the one or more output pulses to selectively provide the one or more output pulses having the set pulse shape based on the types of targets to be processed. The method still further includes delivering the one or more output pulses having the one or more set pulse widths and the set pulse shape to at least one target of the first type. The method finally includes resetting the laser pulse width of one or more laser pulses to selectively provide one or more laser output pulses having one or more reset pulse widths based on a second type of target to be processed.
摘要翻译：提供了一种用于工件上不同类型的激光加工对象的方法和系统。该方法包括设置一个或多个激光脉冲的激光脉冲宽度，以基于待处理的第一类型的目标选择性地提供具有一个或多个设定脉冲宽度的一个或多个激光输出脉冲。该方法还包括设置一个或多个输出脉冲的脉冲形状，以根据待处理的目标的类型选择性地提供具有设定脉冲形状的一个或多个输出脉冲。该方法还包括将具有一个或多个设定脉冲宽度的一个或多个输出脉冲和设定的脉冲形状传送到第一类型的至少一个目标。该方法最终包括重置一个或多个激光脉冲的激光脉冲宽度，以根据待处理的第二类型的目标选择性地提供具有一个或多个复位脉冲宽度的一个或多个激光输出脉冲。

9. 发明授权

US07672343B2 System and method for high power laser processing 有权
标题翻译：大功率激光加工的系统和方法
公开(公告)号：US07672343B2
公开(公告)日：2010-03-02
申请号：US11483326
申请日：2006-07-07
申请人： David C. Brown
发明人： David C. Brown
IPC分类号： H01S3/121
CPC分类号： B23K26/38 , B23K26/064 , B23K26/0643 , B23K26/0648 , B23K26/0665 , B23K26/21 , G02B1/115 , G02B5/0808 , G02B7/181 , G02B26/105
摘要： A high power laser processing system is disclosed that includes a laser source and at least one optical element. The laser source provides a high power laser illumination of a first wavelength. The optical element includes a substrate that is substantially transparent to the first wavelength illumination, at least one highly reflective coating on a first side of the substrate, and at least one anti-reflective coating on a second side of the substrate.
摘要翻译：公开了一种包括激光源和至少一个光学元件的高功率激光加工系统。激光源提供第一波长的高功率激光照明。所述光学元件包括对所述第一波长照明基本透明的基板，在所述基板的第一侧上的至少一个高反射涂层以及所述基板的第二侧上的至少一个抗反射涂层。

10. 发明申请

US20090321396A1 Method And System For High-Speed Precise Laser Trimming And Scan Lens For Use Therein 有权
标题翻译：用于高速精密激光修整和扫描镜头的方法和系统
公开(公告)号：US20090321396A1
公开(公告)日：2009-12-31
申请号：US12499123
申请日：2009-07-08
申请人： Bo Gu , Jonathan S. Ehrmann , Joseph V. Lento , Bruce L. Couch , Yun Fee Chu , Shepard D. Johnson
发明人： Bo Gu , Jonathan S. Ehrmann , Joseph V. Lento , Bruce L. Couch , Yun Fee Chu , Shepard D. Johnson
IPC分类号： B23K26/38 , G02B9/64
CPC分类号： H01C17/242 , B23K26/0622 , B23K26/351 , B23K26/361
摘要： A method, system and scan lens for use therein are provided for high-speed, laser-based, precise laser trimming at least one electrical element along a trim path. The method includes generating a pulsed laser output with a laser, the output having one or more laser pulses at a repetition rate. A fast rise/fall time, pulse-shaped q-switched laser or an ultra-fast laser may be used. Beam shaping optics may be used to generate a flat-top beam profile. Each laser pulse has a pulse energy, a laser wavelength within a range of laser wavelengths, and a pulse duration. The wavelength is short enough to produce desired short-wavelength benefits of small spot size, tight tolerance, high absorption and reduced or eliminated heat-affected zone (HAZ) along the trim path, but not so short so as to cause microcracking. In this way, resistance drift after the trimming process is reduced.
摘要翻译：提供了一种用于其中的方法，系统和扫描透镜，用于沿着修剪路径的高速，基于激光的，精确的激光修整至少一个电气元件。该方法包括用激光产生脉冲激光输出，该输出具有一个或多个重复频率的激光脉冲。可以使用快速上升/下降时间，脉冲形q切换激光器或超快速激光器。光束成形光学元件可用于产生平顶光束轮廓。每个激光脉冲具有脉冲能量，激光波长范围内的激光波长和脉冲持续时间。波长足够短以产生所需的小光斑尺寸，紧密公差，高吸收以及沿着修剪路径减少或消除的热影响区（HAZ）的短波长益处，但不会如此短以致于引起微裂纹。以这种方式，减少了修整过程之后的电阻漂移。

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