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1. 发明申请

US20090281671A1 FLOW MEASUREMENT AND CONTROL WITH BUBBLE DETECTION 有权
标题翻译：流量测量和控制与气泡检测
公开(公告)号：US20090281671A1
公开(公告)日：2009-11-12
申请号：US12405007
申请日：2009-03-16
申请人： HAO DUAN , Aaron S. Tint , Christophe Ellec
发明人： HAO DUAN , Aaron S. Tint , Christophe Ellec
IPC分类号： G05D7/06 , G01F1/66 , G01F13/00
CPC分类号： G01F1/667 , G01F1/74 , G01F25/0007 , G01N2291/02836 , G01P5/245 , G01P5/247 , G05D7/0635
摘要： Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.
摘要翻译：用于液体流量检测和控制的系统和方法，用于各种不同类型的液体流量测量和控制系统。液体流量传感器系统感测指示在传感器导管中流动的液体的流速的流动信号，并分析流量信号，以通过检测信号中的特征变化来确定传感器导管中是否存在气泡。在系统确定存在气泡的情况下，其可以产生指示气泡存在的报警信号。结合流量传感器作为反馈源的流量控制系统可以通过临时冻结流量控制参数直到气泡已经离开传感器导管来响应气泡的检测。流量控制系统可以实现从系统检测到气泡已经卡住的传感器导管清除气泡的过程。

2. 发明申请

US20090078055A1 METHODS AND APPARATUS FOR PRESSURE COMPENSATION IN A MASS FLOW CONTROLLER 有权
标题翻译：一种质量流量控制器中压力补偿的方法和装置
公开(公告)号：US20090078055A1
公开(公告)日：2009-03-26
申请号：US12233405
申请日：2008-09-18
申请人： JOHN MICHAEL LULL , Chiun Wang , Joseph A. Saggio, JR.
发明人： JOHN MICHAEL LULL , Chiun Wang , Joseph A. Saggio, JR.
IPC分类号： G01F1/00
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

3. 发明授权

US07395716B2 Variable capacitance measuring device 有权
标题翻译：可变电容测量装置
公开(公告)号：US07395716B2
公开(公告)日：2008-07-08
申请号：US11392253
申请日：2006-03-29
申请人： Hai Mei
发明人： Hai Mei
IPC分类号： G01L9/12
CPC分类号： G01L19/06 , G01L9/0072 , G01L19/0681
摘要： A variable capacitance measuring device can comprise any one or more features in various different embodiments allow a reliable, compact device to be achieved. A capacitor electrode, a gettering housing, and pinch-off connector may be aligned along a common axis may reduce width dimensions without a substantial increase in length. Temperature-induced variations may be reduced by selecting materials that have coefficients of thermal expansion relatively closer to one another. Substantially varying topologies for ceramic-metal interfaces may reduce the likelihood of external contaminants from reaching the evacuated portion of the device. A tube can be used between the capacitor portion and a gettering housing to isolate external forces and getter activation heat from the sensor. The same tube also reduces heat loss from a heated sensor and protects the electronics from overheating. Embodiments also include processes for using and forming the devices.
摘要翻译：可变电容测量装置可以包括在各种不同实施例中的任何一个或多个特征允许实现可靠，紧凑的装置。电容器电极，吸气外壳和夹断连接器可以沿着共同的轴线对准可以减小宽度尺寸而不会显着增加长度。可以通过选择具有相对更靠近彼此的热膨胀系数的材料来降低温度引起的变化。用于陶瓷 - 金属界面的基本变化的拓扑结构可能会降低外部污染物到达设备的抽真空部分的可能性。可以在电容器部分和吸气外壳之间使用管，以隔离外力并从传感器吸收活化热。相同的管还可减少加热传感器的热损失，并保护电子元件免于过热。实施例还包括使用和形成装置的方法。

4. 发明授权

US07344298B2 Method and apparatus for blending process materials 有权
标题翻译：加工材料的混合方法和装置
公开(公告)号：US07344298B2
公开(公告)日：2008-03-18
申请号：US10623137
申请日：2003-07-18
申请人： Jeffrey A. Wilmer , Brian Alan McAllister , Daniel A. Swan , David E. Sitterud
发明人： Jeffrey A. Wilmer , Brian Alan McAllister , Daniel A. Swan , David E. Sitterud
IPC分类号： B01F15/02 , B01F15/04
CPC分类号： G05D11/132 , B01F3/0092 , B01F3/04985 , B01F3/088 , B01F3/1271 , B01F3/188 , B01F15/0408 , G05D11/138
摘要： A method and apparatus for blending and supplying process materials. The method and apparatus are particularly applicable to the blending of ultra-high purity chemicals, the blending of abrasive slurries with other chemicals for the polishing of semiconductor wafers, and high-accuracy blending of chemicals.
摘要翻译：一种混合和提供工艺材料的方法和装置。该方法和装置特别适用于混合超高纯度化学品，研磨浆料与其他用于研磨半导体晶片的化学品的混合以及化学品的高精度混合。

5. 发明申请

US20080059084A1 MULTI-GAS FLOW DEVICE 有权
标题翻译：多气体流动装置
公开(公告)号：US20080059084A1
公开(公告)日：2008-03-06
申请号：US11850505
申请日：2007-09-05
申请人： Chiun Wang , John Lull , William Valentine
发明人： Chiun Wang , John Lull , William Valentine
IPC分类号： G01F1/34 , F16K51/00 , G06F19/00
CPC分类号： G01F1/363 , G01F5/005 , Y10T137/2496 , Y10T137/877
摘要： A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
摘要翻译：提供了表征或控制流体流动的系统和方法，其涉及传感器导管和旁路。基于在其校准期间产生的装置的特性信息，可以在流量控制装置中使用多个流体。特征信息又是基于无量纲参数，如调节动压和调整雷诺数。

6. 发明申请

US20070260412A1 Attitude insensitive flow device system and method 有权
标题翻译：姿态不敏感流量装置系统及方法
公开(公告)号：US20070260412A1
公开(公告)日：2007-11-08
申请号：US11788201
申请日：2007-04-19
申请人： Dwight Larson
发明人： Dwight Larson
IPC分类号： G01F25/00
CPC分类号： G01F1/6965 , G01F1/688 , G01F5/00 , G05D7/0635 , Y10T137/7759 , Y10T137/776
摘要： Embodiments of the present invention provide systems and methods for attitude insensitive flow devices. One embodiment of the present invention can include a flow device comprising a processor and a computer readable medium accessible by the processor that stores a set of computer instructions executable by the processor. The computer instructions can comprise instructions executable to receive an orientation, receive a sensed flow, and determine a flow through the flow device based on the sense flow and the orientation.
摘要翻译：本发明的实施例提供了用于姿态不敏感流动装置的系统和方法。本发明的一个实施例可以包括流量装置，其包括处理器和可由处理器访问的计算机可读介质，其存储可由处理器执行的一组计算机指令。计算机指令可以包括可执行以接收取向，接收感测的流以及基于感测流和取向来确定通过流动装置的流的指令。

7. 发明授权

US07272512B2 Flow sensor signal conversion 有权
标题翻译：流量传感器信号转换
公开(公告)号：US07272512B2
公开(公告)日：2007-09-18
申请号：US11051209
申请日：2005-02-04
申请人： Chiun Wang , William S. Valentine , John M. Lull
发明人： Chiun Wang , William S. Valentine , John M. Lull
IPC分类号： G06F1/68
CPC分类号： G01F1/6842 , G01F1/6847 , G01F1/6965 , G01F5/00 , G01F15/024 , G01F15/046 , G01F25/0007
摘要： A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
摘要翻译：一种在根据传感器模型在传感器校准期间从测试流体获得传感器的特征函数的至少一个表示的方法，所述传感器模型具有在流量，至少一个传感器特性和至少一个流体特性上运行的传递函数，以及采用特征函数的至少一个表示来确定在任意流体运行期间通过传感器的流速。

8. 发明授权

US07124647B2 Slotted flow restrictor for a mass flow meter 有权
标题翻译：用于质量流量计的开槽流量限制器
公开(公告)号：US07124647B2
公开(公告)日：2006-10-24
申请号：US10515328
申请日：2003-05-23
申请人： Stuart A. Tison , Guanghua Wu , Tracy Gill , Vincent Lopez
发明人： Stuart A. Tison , Guanghua Wu , Tracy Gill , Vincent Lopez
IPC分类号： G01F1/37
CPC分类号： G01F1/42 , G01F1/40
摘要： A flow restrictor (30) for a mass flow metering device formed of a solid material and slots (32) originating from an outer surface towards inward.
摘要翻译：一种用于由固体材料形成的质量流量计量装置的限流器（30）和从外表面朝向内部的槽（32）。

9. 发明申请

US20100049461A1 MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC 有权
标题翻译：具有改进动态的大流量控制器
公开(公告)号：US20100049461A1
公开(公告)日：2010-02-25
申请号：US12197888
申请日：2008-08-25
申请人： JOHN Michael LULL
发明人： JOHN Michael LULL
IPC分类号： G01F25/00
CPC分类号： G01F1/6847 , G01F1/6965 , G05D7/0635
摘要： A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.
摘要翻译：补偿流量控制器中的压力变化的系统和方法需要使用被控制的气体的压缩性来提供更准确的流量测量。

10. 发明申请

US20080041843A1 SURFACE MOUNT HEATER 审中-公开
标题翻译：表面加热器
公开(公告)号：US20080041843A1
公开(公告)日：2008-02-21
申请号：US11925287
申请日：2007-10-26
申请人： Michael Bower , Roger Chase
发明人： Michael Bower , Roger Chase
IPC分类号： H05B3/44
CPC分类号： H05B3/22 , F16K27/003 , F16K49/002 , H05B3/286 , H05B3/36 , H05B2203/003 , H05B2203/021 , H05B2203/022 , H05B2203/037
摘要： A heater that includes a substantially flat layer of electrical resistance material having a first end and a second end, a first electrical conductor electrically connected to the first end of the substantially flat layer of electrical resistance material, a second electrical conductor electrically connected to the second end of the substantially flat layer of electrical resistance material, and an electrically insulating material surrounding the substantially flat layer of electrical resistance material and electrically insulating the first end of the substantially flat layer of electrical resistance material from the second end of the substantially flat layer of electrical resistance material. The heater may be mounted to a surface of a fluid component and used to heat the fluid component, and where the heater includes an aperture that extends through the electrically insulating material, the heater may be placed between a fluid component and a fluid substrate and used to heat both.
摘要翻译：一种加热器，包括具有第一端和第二端的基本上平坦的电阻材料层，电连接到所述基本上平坦的电阻材料层的第一端的第一电导体，电连接到第二端的第二电导体基本上平坦的电阻材料层的端部，以及围绕基本平坦的电阻材料层的电绝缘材料，并将基本上平坦的电阻材料层的第一端与基本上平坦的电阻材料层的第二端电绝缘电阻材料。加热器可以安装到流体部件的表面并且用于加热流体部件，并且其中加热器包括延伸穿过电绝缘材料的孔，加热器可以放置在流体部件和流体基板之间并且被使用加热两者。

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