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1. 发明授权

US08216663B2 Surface-modified member, surface-treating process and apparatus therefor 失效
标题翻译：表面改性构件，表面处理工艺及其设备
公开(公告)号：US08216663B2
公开(公告)日：2012-07-10
申请号：US11922921
申请日：2006-06-15
申请人： Koichiro Takayanagi
发明人： Koichiro Takayanagi
IPC分类号： B32B3/10 , B44C1/22 , C23C16/02 , F22B1/08
CPC分类号： C23C8/16 , C03C15/00 , C03C17/001 , C03C23/0075 , C03C2217/75 , C03C2218/15 , C03C2218/31 , C04B41/009 , C04B41/502 , C04B41/85 , C23C8/18 , Y10T428/24479 , C04B41/0072 , C04B41/4529 , C04B35/01 , C04B35/10
摘要： A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided.A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
摘要翻译：提供具有高非静电性能和高亲水性并防止污染物附着的部件，表面处理工艺和用于表面处理工艺的装置。表面处理装置包括水蒸汽发生单元1，用于使水蒸气过热以产生过热水蒸汽的过热单元5，以及用于将过热水蒸气喷射到待处理的构件14的处理单元11（a 陶瓷，金属）或用于将构件暴露于过热水蒸汽。用温度为300〜1000℃的过热水蒸汽处理未处理的部件，赋予该部件亲水性和抗静电性。未处理的构件可以是通过诸如PVD，CVD等气相法的用于衬底表面处理的气相表面处理装置（例如，室）中与处理空间接触的构件（窗构件）或干蚀刻。

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