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1. 发明申请

US20090035523A1 Surface-Modified Member, Surface-Treating Process and Apparatus Therefor 失效
标题翻译：表面改性构件，表面处理工艺及其设备
公开(公告)号：US20090035523A1
公开(公告)日：2009-02-05
申请号：US11922921
申请日：2006-06-15
申请人： Koichiro Takayanagi , Shigeru Nomura , Takamaro Kakehi , Kenji Yamauchi , Takahiro Oomura , Miki Inaoka
发明人： Koichiro Takayanagi , Shigeru Nomura , Takamaro Kakehi , Kenji Yamauchi , Takahiro Oomura , Miki Inaoka
IPC分类号： B32B3/10 , B44C1/22 , C23C16/02 , C23C14/34 , F22B1/08
CPC分类号： C23C8/16 , C03C15/00 , C03C17/001 , C03C23/0075 , C03C2217/75 , C03C2218/15 , C03C2218/31 , C04B41/009 , C04B41/502 , C04B41/85 , C23C8/18 , Y10T428/24479 , C04B41/0072 , C04B41/4529 , C04B35/01 , C04B35/10
摘要： A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided.A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
摘要翻译：提供了具有高非静电性能和高亲水性并防止污染物附着的构件，表面处理工艺和用于表面处理工艺的装置。表面处理装置包括水蒸汽发生单元1，用于使水蒸气过热以产生过热水蒸汽的过热单元5，以及用于将过热水蒸气喷射到待处理的构件14的处理单元11（a 陶瓷，金属）或用于将构件暴露于过热水蒸汽。用温度为300〜1000℃的过热水蒸汽处理未处理的部件，赋予该部件亲水性和抗静电性。未处理的构件可以是通过诸如PVD，CVD等气相法的用于衬底表面处理的气相表面处理装置（例如，室）中与处理空间接触的构件（窗构件）或干蚀刻。

2. 发明授权

US08216663B2 Surface-modified member, surface-treating process and apparatus therefor 失效
标题翻译：表面改性构件，表面处理工艺及其设备
公开(公告)号：US08216663B2
公开(公告)日：2012-07-10
申请号：US11922921
申请日：2006-06-15
申请人： Koichiro Takayanagi
发明人： Koichiro Takayanagi
IPC分类号： B32B3/10 , B44C1/22 , C23C16/02 , F22B1/08
CPC分类号： C23C8/16 , C03C15/00 , C03C17/001 , C03C23/0075 , C03C2217/75 , C03C2218/15 , C03C2218/31 , C04B41/009 , C04B41/502 , C04B41/85 , C23C8/18 , Y10T428/24479 , C04B41/0072 , C04B41/4529 , C04B35/01 , C04B35/10
摘要： A member having high non-electrostatic properties and high hydrophilicity and preventing an adhesion of contaminants, a surface-treating process and an apparatus for the surface-treating process are provided.A surface-treatment apparatus comprises a water vapor-generating unit 1, a superheating unit 5 for superheating a water vapor to generate a superheated water vapor, and a processing unit 11 for spraying the superheated water vapor to a member 14 to be treated (a ceramic, a metal) or for exposing the member to the superheated water vapor. Treating the untreated member with a superheated water vapor having a temperature 300 to 1000° C., hydrophilicity and antistatic properties are imparted to the member. The untreated member may be a member (a window member) contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
摘要翻译：提供具有高非静电性能和高亲水性并防止污染物附着的部件，表面处理工艺和用于表面处理工艺的装置。表面处理装置包括水蒸汽发生单元1，用于使水蒸气过热以产生过热水蒸汽的过热单元5，以及用于将过热水蒸气喷射到待处理的构件14的处理单元11（a 陶瓷，金属）或用于将构件暴露于过热水蒸汽。用温度为300〜1000℃的过热水蒸汽处理未处理的部件，赋予该部件亲水性和抗静电性。未处理的构件可以是通过诸如PVD，CVD等气相法的用于衬底表面处理的气相表面处理装置（例如，室）中与处理空间接触的构件（窗构件）或干蚀刻。

3. 发明申请

US20100028572A1 Corrosion-resistant member and process for producing the same 审中-公开
标题翻译：耐腐蚀构件及其制造方法
公开(公告)号：US20100028572A1
公开(公告)日：2010-02-04
申请号：US12311524
申请日：2007-10-02
申请人： Toshio Kobayashi , Yoshimi Morikawa , Koichiro Takayanagi
发明人： Toshio Kobayashi , Yoshimi Morikawa , Koichiro Takayanagi
IPC分类号： B32B1/08 , C04B35/00 , C22C29/00 , C04B35/50 , C03C3/00 , B32B3/10
CPC分类号： C23C26/00 , C03C15/00 , C03C23/006 , C04B41/009 , C04B41/502 , C04B41/85 , C23C4/02 , C23C8/16 , C23C16/4404 , C23C30/00 , C25D5/48 , C25D11/02 , C25D11/18 , C25D11/246 , Y10T428/13 , Y10T428/24273 , C04B41/4529 , C04B35/00
摘要： A corrosion-resistant member having a high acid resistance, plasma resistance, and hydrophilicity and a process for producing the corrosion-resistant member are provided. The corrosion-resistant member is obtained by surface-treating an untreated member (a ceramic, a metal) to a surface-treatment with a spray of a superheated water vapor having a temperature of 300 to 1000° C. The corrosion-resistant member may be a member contacting with a processing space in a vapor phase surface process apparatus (e.g., a chamber) for the surface process of a substrate by a vapor phase method such as a PVD, a CVD, or a dry etching.
摘要翻译：提供具有高耐酸性，耐等离子体性和亲水性的耐腐蚀性构件以及制造该耐腐蚀构件的方法。通过将未处理的部件（陶瓷，金属）进行表面处理，通过喷涂温度为300〜1000℃的过热水蒸气进行表面处理而获得耐腐蚀部件。耐腐蚀部件可以是通过诸如PVD，CVD或干蚀刻之类的气相方法与用于衬底表面处理的气相表面处理装置（例如，室）中的处理空间接触的构件。

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