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1. 发明授权

US08751180B2 Methods and apparatus for pressure compensation in a mass flow controller 有权
标题翻译：质量流量控制器中压力补偿的方法和装置
公开(公告)号：US08751180B2
公开(公告)日：2014-06-10
申请号：US12233405
申请日：2008-09-18
申请人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
发明人： John Michael Lull , Chiun Wang , Joseph A. Saggio, Jr.
IPC分类号： G01F1/50
CPC分类号： G01F1/696 , G01F1/86 , G01F15/024 , G05B13/042 , G05D7/0635 , Y10T137/0379 , Y10T137/7759 , Y10T137/7761 , Y10T137/7762
摘要： Performance of mass flow controller may be vulnerable to pressure transients in a flow path to which the controller is coupled for the purpose of controlling the fluid flow. A system and method are provided for reducing or eliminate performance degradations, instabilities, and/or inaccuracies of a mass flow controller caused by changes in the pressure environment. In particular, a method and system are provided for compensating for pressure transients in the pressure environment of a flow path and mass flow controller.
摘要翻译：质量流量控制器的性能可能容易受到控制器耦合到的流动路径中的压力瞬变以控制流体流动的目的。提供了一种用于减少或消除由压力环境变化引起的质量流量控制器的性能下降，不稳定性和/或不准确性的系统和方法。特别地，提供了一种用于补偿流动路径和质量流量控制器的压力环境中的压力瞬变的方法和系统。

2. 发明申请

US20110191038A1 MASS FLOW CONTROLLER WITH IMPROVED DYNAMIC RESPONSE 审中-公开
标题翻译：大流量控制器具有改进的动态响应
公开(公告)号：US20110191038A1
公开(公告)日：2011-08-04
申请号：US13034207
申请日：2011-02-24
申请人： John Michael Lull
发明人： John Michael Lull
IPC分类号： G06F19/00 , G01F1/68
CPC分类号： G01F1/6847 , G01F1/6965 , G05D7/0635
摘要： A system and method of characterizing or controlling a flow of a fluid is provided that involves a sensor conduit and a bypass. A plurality of fluids may be utilized in the flow control device based on characteristic information of the device generated during calibration thereof. The characteristic information, in turn is based on a dimensionless parameters, such as adjusted dynamic pressure and adjusted Reynolds number.
摘要翻译：提供了表征或控制流体流动的系统和方法，其涉及传感器导管和旁路。基于在其校准期间产生的装置的特性信息，可以在流量控制装置中使用多个流体。特征信息又是基于无量纲参数，如调节动压和调整雷诺数。

3. 发明授权

US07991510B2 Flow measurement and control with bubble detection 有权
标题翻译：流量测量和控制与气泡检测
公开(公告)号：US07991510B2
公开(公告)日：2011-08-02
申请号：US12405007
申请日：2009-03-16
申请人： Hao Duan , Aaron S. Tint , Christophe Ellec
发明人： Hao Duan , Aaron S. Tint , Christophe Ellec
IPC分类号： G06F19/00
CPC分类号： G01F1/667 , G01F1/74 , G01F25/0007 , G01N2291/02836 , G01P5/245 , G01P5/247 , G05D7/0635
摘要： Systems and methods for liquid flow sensing and control for use with a variety of different types of liquid flow measurement and control systems. The liquid flow sensor system senses a flow signal indicative of the flow rate of the liquid flowing in a sensor conduit and analyzes the flow signal to determine, by detecting characteristic changes in the signal, whether a bubble is present in the sensor conduit. Where the system determines that a bubble is present, it may generate an alarm signal indicative of the presence of the bubble. A flow control system incorporating the flow sensor as a feedback source may respond to the detection of a bubble by temporarily freezing the flow control parameters until the bubble has exited the sensor conduit. The flow control system can implement procedures for clearing a bubble from the sensor conduit where the system detects that the bubble has become stuck.
摘要翻译：用于液体流量检测和控制的系统和方法，用于各种不同类型的液体流量测量和控制系统。液体流量传感器系统感测指示在传感器导管中流动的液体的流速的流动信号，并分析流量信号，以通过检测信号中的特征变化来确定传感器导管中是否存在气泡。在系统确定存在气泡的情况下，其可以产生指示气泡存在的报警信号。结合流量传感器作为反馈源的流量控制系统可以通过临时冻结流量控制参数直到气泡已经离开传感器导管来响应气泡的检测。流量控制系统可以实现从系统检测到气泡已经卡住的传感器导管清除气泡的过程。

4. 发明授权

US07720617B2 Flow sensor signal conversion 有权
标题翻译：流量传感器信号转换
公开(公告)号：US07720617B2
公开(公告)日：2010-05-18
申请号：US11856585
申请日：2007-09-17
申请人： Chiun Wang , William S. Valentine , John M. Lull
发明人： Chiun Wang , William S. Valentine , John M. Lull
IPC分类号： G01F1/00
CPC分类号： G01F1/6842 , G01F1/6847 , G01F1/6965 , G01F5/00 , G01F15/024 , G01F15/046 , G01F25/0007
摘要： A method of obtaining at least one representation of a characteristic function of a sensor from a test fluid during calibration of the sensor according to a sensor model having a transfer function operating on flow rate, at least one sensor property and at least one fluid property and employing the at least one representation of the characteristic function to determine flow rates through the sensor during operation with an arbitrary fluid.
摘要翻译：一种在根据传感器模型在传感器校准期间从测试流体获得传感器的特征函数的至少一个表示的方法，所述传感器模型具有在流量，至少一个传感器特性和至少一个流体特性上运行的传递函数，以及采用特征函数的至少一个表示来确定在任意流体运行期间通过传感器的流速。

5. 发明授权

US08887549B2 Valve leakby diagnostics 有权
标题翻译：阀门泄漏诊断
公开(公告)号：US08887549B2
公开(公告)日：2014-11-18
申请号：US12527660
申请日：2007-02-19
申请人： Jay J. Mendelson , Christopher A. Mazza , Scott Amsbaugh , Gary Francis Conner , Edward T. Fisher
发明人： Jay J. Mendelson , Christopher A. Mazza , Scott Amsbaugh , Gary Francis Conner , Edward T. Fisher
IPC分类号： G01F25/00 , G01F15/00 , F17D5/06
CPC分类号： G01F15/005 , F17D5/06 , Y10T137/7759
摘要： A method is disclosed for determining leakby in a flow controller (100) comprising a flow sensor (102), a flow control valve (106) and electronics (104). The electronics are coupled to the flow sensor, the flow control valve and configured to adjust the flow control valve in response to the signal of the flow sensor indicating the flow rate of the material such that a set flow rate of material through the flow controller is maintained. The steps of the method comprise determining (302) a zero drift (Qdrift) value for the flow sensor (102). Determining (304) a flow rate (Qflow) through the flow controller (100) when the control valve (106) is in the fully closed position. And determining (306) the leakby through the flow controller (100) where the leakby is equal Qflow-Qdrift.
摘要翻译：公开了一种用于在包括流量传感器（102），流量控制阀（106）和电子设备（104）的流量控制器（100）中确定泄漏的方法。电子设备耦合到流量传感器，流量控制阀并且被配置为响应于流量传感器的信号来调节流量控制阀，该信号指示材料的流量，使得通过流量控制器的材料的设定流速为保持。该方法的步骤包括确定（302）流量传感器（102）的零漂移（Qdrift）值。当控制阀（106）处于完全关闭位置时，确定通过流量控制器（100）的流量（Q flow）（304）。并且通过所述流量控制器（100）确定（306）所述泄漏，其中所述泄漏等于Qflow-Qdrift。

6. 发明授权

US08511169B2 Monolithic vacuum manometer utilizing electrostatic interference as a means of detection 有权
标题翻译：使用静电干扰的单片真空压力计作为检测手段
公开(公告)号：US08511169B2
公开(公告)日：2013-08-20
申请号：US13346207
申请日：2012-01-09
申请人： Michael W. Fortner , Joseph Sipka , Christopher Reed
发明人： Michael W. Fortner , Joseph Sipka , Christopher Reed
IPC分类号： G01L9/12 , H05K13/00
CPC分类号： G01L9/0075 , G01L9/12 , Y10T29/49002
摘要： A monolithic manometer and method of sensing pressure changes may include sensing a change in parasitic capacitive coupling between multiple parasitic capacitive coupled conductive elements in response to a diaphragm disturbing the parasitic capacitive coupling between the conductive elements. A signal representative of the sensed change in parasitic capacitive coupling may be output.
摘要翻译：感测压力变化的单片压力计和方法可以包括响应于妨碍导电元件之间的寄生电容耦合的隔膜来感测多个寄生电容耦合导电元件之间的寄生电容耦合的变化。可以输出代表感测到的寄生电容耦合变化的信号。

7. 发明授权

US07905139B2 Mass flow controller with improved dynamic 有权
标题翻译：质量流量控制器具有改进的动态性能
公开(公告)号：US07905139B2
公开(公告)日：2011-03-15
申请号：US12197888
申请日：2008-08-25
申请人： John Michael Lull
发明人： John Michael Lull
IPC分类号： G01F1/68
CPC分类号： G01F1/6847 , G01F1/6965 , G05D7/0635
摘要： A system and method of compensating for pressure variations in a flow controller entails the use of the compressibility of the gas being controlled to provide a more accurate measurement of the flow.
摘要翻译：补偿流量控制器中的压力变化的系统和方法需要使用被控制的气体的压缩性来提供更准确的流量测量。

8. 发明授权

US07720628B2 Digitally controlled sensor system 有权
标题翻译：数字控制传感器系统
公开(公告)号：US07720628B2
公开(公告)日：2010-05-18
申请号：US11321238
申请日：2005-12-29
申请人： David M. Albert , Edwin K. Arrant , Marvin B. Edwards
发明人： David M. Albert , Edwin K. Arrant , Marvin B. Edwards
IPC分类号： G01L7/00 , G01L19/04 , G05D16/00
CPC分类号： G01L27/002 , G01D3/022 , G01D18/008 , G01L9/125 , G01L19/02 , G01L19/04
摘要： Systems and methods for digitally controlling sensors. In one embodiment, a digital controller for a capacitance diaphragm gauge is embedded in a digital signal processor (DSP). The controller receives digitized input from a sensor AFE via a variable gain module, a zero offset module and an analog-to-digital converter. The controller automatically calibrates the received input by adjusting the variable gain and zero offset modules. The controller also monitors and adjusts a heater assembly to maintain an appropriate temperature at the sensor. The controller utilizes a kernel module that allocates processing resources to the various tasks of a gauge controller module. The kernel module repetitively executes iterations of a loop, wherein in each iteration, all of a set of high priority tasks are performed and one of a set of lower priority tasks are performed. The controller module thereby provides sensor measurement output at precisely periodic intervals, while performing ancillary functions as well.
摘要翻译：用于数字控制传感器的系统和方法。在一个实施例中，用于电容隔膜计的数字控制器嵌入在数字信号处理器（DSP）中。控制器通过可变增益模块，零点偏移模块和模数转换器从传感器AFE接收数字化输入。控制器通过调整可变增益和零点偏移模块自动校准接收到的输入。控制器还监控和调整加热器组件以在传感器处保持适当的温度。控制器利用内核模块，将处理资源分配给量规控制器模块的各种任务。内核模块重复执行循环的迭代，其中在每次迭代中，执行一组高优先级任务中的所有一个，并且执行一组较低优先级任务中的一个。因此，控制器模块以精确的周期性间隔提供传感器测量输出，同时执行辅助功能。

9. 外观设计

USD584179S1 Mass flow controller 有权
公开(公告)号：USD584179S1
公开(公告)日：2009-01-06
申请号：US29303665
申请日：2008-02-14
申请人： Jay Mendelson , John Laverack , Doug B. Winner , Andrew C. Dymek , Joseph Corrado
设计人： Jay Mendelson , John Laverack , Doug B. Winner , Andrew C. Dymek , Joseph Corrado
CPC分类号： G05D7/0635

10. 发明申请

US20120323379A1 PRESSURE BALANCED VALVE 有权
标题翻译：压力平衡阀
公开(公告)号：US20120323379A1
公开(公告)日：2012-12-20
申请号：US13492509
申请日：2012-06-08
申请人： Walter Dennis Robertson, III
发明人： Walter Dennis Robertson, III
IPC分类号： G05D7/06 , F16K31/06
CPC分类号： F16K31/0655 , F16K31/0693 , F16K39/022 , G05D7/0635
摘要： The disclosed embodiments include a pressure balance valve that solves one or more problems associated with existing designs. For example, in one embodiment, a pressure balancing valve assembly is disclosed that provides a low cost frictionless assembly that is constructed to not seal the leak path between an inlet port and an outlet port. Instead, this leak path is minimized with small angle tapered plunger and a precision bored annulus to provide a defined area for the pressure drop to occur and to limit the flow from the inlet to the outlet.
摘要翻译：所公开的实施例包括解决与现有设计相关联的一个或多个问题的压力平衡阀。例如，在一个实施例中，公开了一种压力平衡阀组件，其提供低成本的无摩擦组件，其构造成不密封入口和出口之间的泄漏路径。相反，该泄漏路径被最小化，具有小角度锥形柱塞和精密钻孔环，以便为出现压降提供限定的区域并且限制从入口到出口的流动。

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