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1. 发明申请

US20140057387A1 Systems and Methods for Depositing and Charging Solar Cell Layers 审中-公开
公开(公告)号：US20140057387A1
公开(公告)日：2014-02-27
申请号：US13954149
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32422 , H01J37/32568 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.

2. 发明授权

US09520531B2 Systems and methods for depositing and charging solar cell layers 有权
标题翻译：太阳能电池层沉积和充电的系统和方法
公开(公告)号：US09520531B2
公开(公告)日：2016-12-13
申请号：US13954099
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18 , H01J37/32 , H01L31/0216 , H01L31/068
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32146 , H01J37/32706 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.
摘要翻译：本发明的系统和方法可以用于以正电荷或负电荷对太阳能电池（例如，晶片）的层（例如钝化层和/或抗反射层）进行充电。该层可以保持电荷以改善太阳能电池的运行。带电层可以包括能够保持负电荷或正电荷的任何合适的电介质材料。本发明的系统和方法允许层的原位充电。可以在层的沉积期间或之后完成层的充电，包括在完成整个太阳能电池处理之后，换句话说，在成品电池上。

3. 发明授权

US5765982A Automatic wafer boat loading system and method 失效
标题翻译：自动晶圆舟装载系统及方法
公开(公告)号：US5765982A
公开(公告)日：1998-06-16
申请号：US500375
申请日：1995-07-10
申请人： John M. Martin , Arthur W. Harrison
发明人： John M. Martin , Arthur W. Harrison
IPC分类号： H01L21/677 , B65G25/04
CPC分类号： H01L21/67781 , Y10S414/138 , Y10S414/14
摘要： A system for automatic loading of wafer boats onto a cantilever paddle for insertion of the wafer boats into a furnace tube includes an end effector carriage moving on a track and supporting an end effector having spaced, parallel pads to engage opposed outer side portions of a wafer boat. The end effector receives a wafer boat from a robotic arm of an elevator. The robotic arm moves transversely relative to the track to position the wafer boat over the track on which the paddle carriage moves. The end effector carriage moves the end effector pads under the wafer boat, lifts it from a pair of elevator tines, moves the wafer boat over a desired part of the paddle, and lowers the wafer boat onto the paddle. The end effector carriage then returns the end effector to an initial location. The elevator and end effector main the wafer boat at a slight tilt as it is shifted from a wafer boat queue to the cantilever paddle so as to prevent rattling of wafers held in slots of the wafer boat due to vibration of the system.
摘要翻译：用于将晶片舟自动加载到悬臂桨上用于将晶片舟插入炉管中的系统包括在轨道上移动的末端执行器支架，并支撑具有间隔开的平行焊盘的端部执行器，以接合晶片的相对的外侧部分船。末端执行器从电梯的机器人臂接收晶片舟。机器人臂相对于轨道横向移动，以将晶片舟定位在桨架上移动的轨道上。端部执行器托架将末端执行器垫片移动到晶片舟皿下方，从一对升降机吊杆将其移动，使晶片舟皿移动到桨叶的所需部分上，并将晶片舟皿降低到桨叶上。末端执行器支架然后将末端执行器返回到初始位置。电梯和末端执行器在晶片舟从晶片舟队移动到悬臂桨叶时以稍微的倾斜为主，以防止由于系统的振动而保持在晶片舟的槽中的晶片的晃动。

4. 发明授权

US4767251A Cantilever apparatus and method for loading wafer boats into cantilever diffusion tubes 失效
标题翻译：悬臂装置和将晶片舟装载到悬臂扩散管中的方法
公开(公告)号：US4767251A
公开(公告)日：1988-08-30
申请号：US860661
申请日：1986-05-06
申请人： J. S. Whang
发明人： J. S. Whang
IPC分类号： C30B31/10 , F16B39/24 , F27D3/00
CPC分类号： H01L21/67754 , C30B31/103 , Y10S414/14
摘要： An apparatus for loading semiconductor wafers into a cantilever diffusion tube includes a cantilever paddle supporting a boatload of wafers. The paddle is moved into alignment with the open end of the cantilever diffusion tube. The open end portion of cantilever diffusion tube is moved to surround the paddle and boat load of wafers. The paddle is lowered slightly, causing the boat load of wafers to be supported on an inside surface of the cantilever diffusion tube and providing clearance around the paddle. The cantilever tube is withdrawn from the paddle, which then is withdrawn from the path of the cantilever diffusion tube. The cantilever tube and the boatload of wafers is moved into the hot zone of the furnace. After a heat treating operation, the cantilever diffusion tube is withdrawn from the furnace, and the reverse operation is performed to unload the boatload of wafers. In one embodiment of the invention, a plug is inserted into the open end of the cantilever diffusion tube after the boat load of wafers is loaded therein. In another embodiment, a tube passes through the plug and communicates with an external coupling to an external gas source.
摘要翻译：用于将半导体晶片装载到悬臂扩散管中的装置包括支撑舟状载体的悬臂梁。桨叶移动成与悬臂扩散管的开口端对准。悬臂扩散管的开口端部移动以围绕晶片的桨和舟状负载。桨叶稍微降低，导致晶片的舟状载荷被支撑在悬臂扩散管的内表面上并且提供围绕桨的间隙。悬臂管从桨中取出，然后将其从悬臂扩散管的路径中取出。将悬臂管和载重的晶片移入炉的热区。在热处理操作之后，将悬臂扩散管从炉中取出，并执行相反的操作以卸载载重的晶片。在本发明的一个实施例中，在将晶片的载荷加载到其中之后，将插头插入悬臂扩散管的开口端。在另一个实施例中，管穿过插塞并与外部耦合器连通到外部气体源。

5. 发明申请

US20140057386A1 Systems and Methods for Depositing and Charging Solar Cell Layers 有权
公开(公告)号：US20140057386A1
公开(公告)日：2014-02-27
申请号：US13954099
申请日：2013-07-30
申请人： Amtech Systems, Inc.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/1868 , H01J37/32082 , H01J37/32146 , H01J37/32706 , H01L31/02167 , H01L31/02168 , H01L31/068 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention may be used to charge a layer (such as a passivation layer and/or antireflective layer) of a solar cell (e.g., wafer) with a positive or negative charge. The layer may retain the charge to improve operation of the solar cell. The charged layer may include any suitable dielectric material capable of retaining either a negative or a positive charge. Systems and methods of the present invention permit in-situ charging of a layer. Charging of a layer may be accomplished during or after deposition of the layer including after completing the whole solar cell process, in other words, on a finished cell.

6. 发明申请

US20020154970A1 Wafer boat elevator system and method 有权
标题翻译：晶圆船电梯系统及方法
公开(公告)号：US20020154970A1
公开(公告)日：2002-10-24
申请号：US09859567
申请日：2001-05-16
申请人： Amtech Systems, Inc.
发明人： John M. Martin , Arthur W. Harrison , Allen D. Edwards
IPC分类号： B65G049/07
CPC分类号： H01L21/67098 , H01L21/67766
摘要： An apparatus for assisting the loading of a plurality of wafer boats into a multi-level wafer boat loading system (1) includes a vertical elevator mechanism (10) attached to the wafer boat loading system (1). A vertically movable horizontal wafer boat platform (181B) is attached to a vertically movable carriage (31) included in the elevator mechanism and vertically movable along a linear track (30 therein. A control system (25) associated with the vertical elevator mechanism includes a processor for executing a stored program which stores information representing a plurality of elevation levels the plurality of cantilever paddles (5), respectively, and which responds to a selection signal corresponding to manual selection of one of the elevator levels to control a drive mechanism (22,27) which moves the wafer boat support platform (18B) from an initial position to the selected elevator level. Each of a plurality of heat shield devices (50) includes a heat reflector plate (51) that is movable in response to a controller (75) to advance the heat reflector plate (51) in front of a scavenger opening to prevent excessive heating in the boat loading region during wafer boat loading/unloading operations.
摘要翻译：用于辅助将多个晶片舟装载到多级晶片舟装载系统（1）中的装置包括附接到晶片舟装载系统（1）的垂直升降机构（10）。垂直移动的水平晶片舟形平台（181B）安装在电梯机构中的可垂直移动的托架（31）上，并可沿着线性轨道（30）垂直移动，与垂直升降机构相关的控制系统（25）处理器，用于执行分别存储表示多个悬臂桨叶（5）的多个高度水平的信息的存储程序，并且响应于对应于手动选择一个电梯级别的选择信号来控制驱动机构（22 ，27），其将所述晶片舟状支撑平台（18B）从初始位置移动到所选择的升降机水平，多个隔热装置（50）中的每一个包括热反射板（51），其可响应于控制器（75），以在散热器开口前方推进热反射板（51），以防止在晶片舟装载/卸载操作期间在船装载区域中的过度加热 ations

7. 发明申请

US20130133578A1 SYSTEMS FOR CHARGING SOLAR CELL LAYERS 审中-公开
标题翻译：用于充电太阳能电池层的系统
公开(公告)号：US20130133578A1
公开(公告)日：2013-05-30
申请号：US13676923
申请日：2012-11-14
申请人： AMTECH SYSTEMS, INC.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/18
CPC分类号： H01L31/18 , H01J37/32082 , H01J37/32174 , H01J37/32577 , H01L31/02167 , H01L31/02168 , H01L31/068 , H01L31/1868 , Y02E10/547 , Y02P70/521
摘要： Systems and methods of the present invention can be used to charge a charge-holding layer (such as a passivation layer and/or antireflective layer) of a solar cell with a positive or negative charge as desired. The charge-holding layer(s) of such a cell can include any suitable dielectric material capable of holding either a negative or a positive charge, and can be charged at any suitable point during manufacture of the cell, including during or after deposition of the passivation layer(s).
摘要翻译：本发明的系统和方法可用于根据需要对正电荷或负电荷对太阳能电池的电荷保持层（例如钝化层和/或抗反射层）进行充电。这种电池的电荷保持层可以包括能够保持负电荷或正电荷的任何合适的介电材料，并且可以在电池的制造期间的任何合适的点进行充电，包括在沉积期间或之后钝化层。

8. 发明授权

US5888048A Automatic wafer boat loading 失效
标题翻译：自动晶圆舟装载
公开(公告)号：US5888048A
公开(公告)日：1999-03-30
申请号：US96331
申请日：1998-06-12
申请人： John M. Martin , Arthur W. Harrison
发明人： John M. Martin , Arthur W. Harrison
IPC分类号： H01L21/677 , B65G25/04
CPC分类号： H01L21/67781 , Y10S414/138 , Y10S414/14
摘要： A system for automatic loading of wafer boats onto a cantilever paddle for insertion of the wafer boats into a furnace tube includes an end effector carriage moving on a track and supporting an end effector having spaced, parallel pads to engage opposed outer side portions of a wafer boat. The end effector receives a wafer boat from a robotic arm of an elevator. The robotic arm moves transversely relative to the track to position the wafer boat over the track on which the paddle carriage moves. The end effector carriage moves the end effector pads under the wafer boat, lifts it from a pair of elevator tines, moves the wafer boat over a desired part of the paddle, and lowers the wafer boat onto the paddle. The end effector carriage then returns the end effector to an initial location. The elevator and end effector main the wafer boat at a slight tilt as it is shifted from a wafer boat queue to the cantilever paddle so as to prevent rattling of wafers held in slots of the wafer boat due to vibration of the system.
摘要翻译：用于将晶片舟自动加载到悬臂桨上用于将晶片舟插入炉管中的系统包括在轨道上移动的末端执行器支架，并支撑具有间隔开的平行焊盘的端部执行器，以接合晶片的相对的外侧部分船。末端执行器从电梯的机器人臂接收晶片舟。机器人臂相对于轨道横向移动，以将晶片舟定位在桨架上移动的轨道上。端部执行器托架将末端执行器垫片移动到晶片舟皿下方，从一对升降机吊杆将其移动，使晶片舟皿移动到桨叶的所需部分上，并将晶片舟皿降低到桨叶上。末端执行器支架然后将末端执行器返回到初始位置。电梯和末端执行器在晶片舟从晶片舟队移动到悬臂桨叶时以稍微的倾斜为主，以防止由于系统的振动而保持在晶片舟的槽中的晶片的晃动。

9. 发明授权

US5364667A Photo-assisted chemical vapor deposition method 失效
标题翻译：光辅助化学气相沉积法
公开(公告)号：US5364667A
公开(公告)日：1994-11-15
申请号：US67286
申请日：1993-05-25
申请人： Ji H. Rhieu
发明人： Ji H. Rhieu
IPC分类号： H01L21/205 , C23C16/44 , C23C16/455 , C23C16/48 , B05D3/06
CPC分类号： C23C16/45519 , C23C16/482 , C23C16/488
摘要： In a photo-CVD system, ultraviolet light is introduced into a reaction chamber from light emitting elements of ultraviolet light sources, through transparent bulb surfaces thereof, and through elongated light pipes in a sealed wall bounding the reaction chamber. This prevents molecules of reactant gas in the reaction chamber from reaching and being deposited on the transparent bulb surfaces, and thereby prevents buildup of such reactant molecules from occurring and impeding flow of ultraviolet light into the reaction chamber.
摘要翻译：在光CVD系统中，将紫外光从紫外光源的发光元件通过其透明的灯泡表面引入反应室，并通过细长的光管在包围反应室的密封壁中引入。这样可防止反应室中的反应气体分子到达并沉积在透明的灯泡表面上，从而防止这种反应物分子的积聚发生并阻止紫外光流入反应室。

10. 发明申请

US20140150850A1 SOLAR CELL COATING 审中-公开
标题翻译：太阳能电池涂料
公开(公告)号：US20140150850A1
公开(公告)日：2014-06-05
申请号：US13690954
申请日：2012-11-30
申请人： AMTECH SYSTEMS, INC.
发明人： Jeong-Mo Hwang
IPC分类号： H01L31/048
CPC分类号： H01L31/048 , F24S25/20 , F24S80/52 , H02S40/10 , Y02E10/40 , Y02E10/50
摘要： Embodiments of the present invention help prevent Potential-Induced Degradation (PID) in solar cell modules. A solar cell module according to one embodiment of the present invention comprises a glass sheet, a frame covering at least a portion of the glass sheet, a plurality of solar cells at least partially covered by the glass sheet, and a hydrophobic coating covering at least a portion of the frame and at least a portion of the glass sheet.
摘要翻译：本发明的实施例有助于防止太阳能电池模块中的电位降低（PID）。根据本发明的一个实施例的太阳能电池模块包括玻璃板，覆盖玻璃板的至少一部分的框架，至少部分地被玻璃板覆盖的多个太阳能电池以及至少覆盖的疏水涂层框架的一部分和玻璃板的至少一部分。

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