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    • 82. 发明授权
    • Non-volatile memory having multi-bit data cells with double layered
floating gate structure
    • 具有双层浮栅结构的多位数据单元的非易失性存储器
    • US5789777A
    • 1998-08-04
    • US778410
    • 1997-01-02
    • Toshiaki Kojima
    • Toshiaki Kojima
    • G11C17/00G11C11/56G11C16/04H01L21/8247H01L27/115H01L29/788H01L29/792H01L29/76
    • G11C16/0475G11C11/5621G11C11/5628G11C11/5635G11C11/5642G11C16/0458H01L29/7887G11C2211/5612G11C2211/5613
    • The non-volatile memory has a storage cell complying with multi-bit data by means of a double layered floating gate architecture. The cell comprises: source 2 and drain 3 which are distant from each other along a direction L in a semiconductor substrate 1; a single first floating gate 4A which is provided between the source and the drain and above a principal plane of the semiconductor substrate and extends along a direction crossing the direction L; a control gate 5 which is placed between the drain ad source and above a principal plane of the first floating gate; high impurity concentration layers 21, 22 which are isolated from the source and drain in the semiconductor substrate; a plurality of second floating gates 4B.sub.1, 4B.sub.2 which respectively extend across the first floating gate and above a principal plane of the first floating gate and extend from a position different than either of the source and the drain up to a position above a principal plane of the high impurity concentration layer; and a plurality of program gates 6.sub.1, 6.sub.2 which are placed correspondingly above principal planes of the second floating gates.
    • 非易失性存储器具有通过双层浮栅结构符合多位数据的存储单元。 电池包括:沿着半导体衬底1中的方向L彼此远离的源极2和漏极3; 设置在源极和漏极之间并且位于半导体衬底的主平面之上并且沿着与方向L交叉的方向延伸的单个第一浮置栅极4A; 控制门5,其设置在排水道源和第一浮动门的主平面之上; 在半导体衬底中与源极和漏极隔离的高杂质浓度层21,22; 分别延伸穿过第一浮动栅极并位于第一浮动栅极的主平面上方并从不同于源极和漏极之一的位置延伸到多于第一浮动栅极的主平面上方的位置的多个第二浮动栅极4B1,4B2, 高杂质浓度层; 以及相应地设置在第二浮动门的主平面上方的多个编程门61,62。