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81. 发明授权

US07791810B2 Scanned beam display having high uniformity and diminished coherent artifacts 有权
标题翻译：扫描光束显示具有高均匀性和减少的相干伪像
公开(公告)号：US07791810B2
公开(公告)日：2010-09-07
申请号：US11963091
申请日：2007-12-21
申请人： Karlton D. Powell
发明人： Karlton D. Powell
IPC分类号： G02B27/14
CPC分类号： G02B27/0081 , G02B26/10 , G02B27/0025 , G02B27/0101 , G02B27/48 , G02B2027/0123
摘要： Briefly, in accordance with one or more embodiments, time averaged Moiré patterns may be utilized in a scanned beam display having a Gaussian beam profile or the like in order to tailor uniformity of the image by controlling both the near field and far field regions of the display to result in a stable and uniform scanned beam display image. Consideration is made regarding the light source parameters of focus numerical aperture, profile, shape, and/or wavelength to achieve higher uniformity and stability without resulting in significant visible coherent artifacts such as tiled intensity patterns and/or Moiré.
摘要翻译：简而言之，根据一个或多个实施例，可以在具有高斯光束轮廓等的扫描光束显示器中使用时间平均的莫尔图案，以便通过控制图像的近场和远场区域来定制图像的均匀性显示以产生稳定且均匀的扫描光束显示图像。考虑聚焦数值孔径，轮廓，形状和/或波长的光源参数，以实现更高的均匀性和稳定性，而不会导致显着的可见的相干伪影，如平铺强度图案和/或莫尔。

82. 发明授权

US07710655B2 Display with image-guiding substrate 有权
标题翻译：显示图像导向基板
公开(公告)号：US07710655B2
公开(公告)日：2010-05-04
申请号：US11603962
申请日：2006-11-21
申请人： Mark O. Freeman , Karlton D. Powell
发明人： Mark O. Freeman , Karlton D. Powell
IPC分类号： G02B27/14
CPC分类号： G02B27/0103 , G02B5/1814 , G02B5/30 , G02B6/00 , G02B6/0018 , G02B6/0028 , G02B6/0031 , G02B6/0035 , G02B6/0055 , G02B6/0056 , G02B6/0068 , G02B6/06 , G02B27/0081 , G02B27/0101 , G02B27/102 , G02B27/104 , G02B27/1086 , G02B27/145 , G02B27/149 , G02B27/28 , G02B27/285 , G02B27/4272 , G02B2027/0118 , G02B2027/012 , G02B2027/0125 , G02B2027/0174
摘要： A display system includes an angle-mapped display engine operable to launch angle-mapped image-bearing rays through an image-guiding substrate for display.
摘要翻译：显示系统包括角度映射显示引擎，其可操作以通过用于显示的图像引导基板发射经角度映射的图像承载射线。

83. 发明申请

US20100102226A1 PATTERNING DEVICE HOLDING APPARATUS AND APPLICATION THEREOF 有权
标题翻译：图案装置保存装置及其应用
公开(公告)号：US20100102226A1
公开(公告)日：2010-04-29
申请号：US12256828
申请日：2008-10-23
申请人： Hsuan-Bin HUANG , You-Jin Wang , Chung-Shih Pan
发明人： Hsuan-Bin HUANG , You-Jin Wang , Chung-Shih Pan
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , H01J2237/2007 , H01J2237/20207
摘要： A patterning device holding apparatus includes a support platform unit with a plurality of first positioning projections and a gripper unit. The gripper unit includes a head portion and a plurality of second positioning projections disposed on the head portion, and a rolling member set at a base portion. The grapping and releasing of the patterning device is achieved by the rotation of the gripper unit about a pivot substantially parallel with the center axis of the rolling member. The first and second positioning projections corporately abut against the edges of a patterning device to fix the patterning device in place.
摘要翻译：图案形成装置保持装置包括具有多个第一定位突起和夹持单元的支撑平台单元。夹持单元包括头部和设置在头部上的多个第二定位突起，以及设置在基部的滚动体。图案形成装置的拍摄和释放通过夹持器单元围绕基本上平行于滚动构件的中心轴线的枢轴的旋转来实现。第一和第二定位突起共同地抵靠图案形成装置的边缘，以将图案形成装置固定就位。

84. 发明授权

US07705298B2 System and method to determine focus parameters during an electron beam inspection 有权
标题翻译：在电子束检查期间确定焦点参数的系统和方法
公开(公告)号：US07705298B2
公开(公告)日：2010-04-27
申请号：US11939530
申请日：2007-11-13
申请人： Xuedong Liu , Zhonghua Dong , Wei Fang , Zhong-Wei Chen
发明人： Xuedong Liu , Zhonghua Dong , Wei Fang , Zhong-Wei Chen
IPC分类号： H01J37/28 , H01J37/21 , H01J3/14
CPC分类号： H01J37/28 , H01J37/21 , H01J2237/14 , H01J2237/216 , H01J2237/2817
摘要： This invention relates to apparatus and method to fast determine focus parameters in one pre-scan during an e-beam inspection practice. More specifically, embodiments of the present invention provide an apparatus and method that provide accurate focus tuning after primary focusing has been done.
摘要翻译：本发明涉及在电子束检查实践期间快速确定一次预扫描中的焦点参数的装置和方法。更具体地，本发明的实施例提供了一种在进行主要聚焦之后提供精确聚焦调谐的装置和方法。

85. 发明申请

US20100073748A1 Scanning Mirror Control 有权
标题翻译：扫描镜像控制
公开(公告)号：US20100073748A1
公开(公告)日：2010-03-25
申请号：US12235500
申请日：2008-09-22
申请人： Steve Holmes , Clint Charles Rollins , Margaret K. Brown , Michael L. Schaaf , Bruce C. Rothaar , Robert J. Jackson , Lifford McLauchlan , Mehrube Mehrubeoglu , Gregory Schneider
发明人： Steve Holmes , Clint Charles Rollins , Margaret K. Brown , Michael L. Schaaf , Bruce C. Rothaar , Robert J. Jackson , Lifford McLauchlan , Mehrube Mehrubeoglu , Gregory Schneider
IPC分类号： G02B26/10
CPC分类号： G02B26/121 , G05B13/024 , H02K41/0354 , H02P29/50
摘要： A scanning beam projection system includes a scanning mirror having a fast-scan axis and a slow-scan axis. Movement on the slow-scan axis is controlled by a slow-scan scanning mirror control system. The control system receives position information describing angular displacement of the mirror. An outer loop of the control system operates in the frequency domain and determines harmonic drive coefficients for a scanning mirror drive signal. An inner loop of the control system operates in the time domain and compensates for a scanning mirror resonant vibration mode at a frequency within the frequency band occupied by the harmonic drive coefficients.
摘要翻译：扫描光束投影系统包括具有快速扫描轴和慢扫描轴的扫描镜。慢扫描轴上的移动由慢扫描扫描镜控制系统控制。控制系统接收描述镜的角位移的位置信息。控制系统的外环在频域中工作，并确定扫描镜驱动信号的谐波驱动系数。控制系统的内部环路在时域中工作，并且以谐波驱动系数占据的频带内的频率补偿扫描镜共振振动模式。

86. 发明授权

US07679804B2 Non-resonant drive for adaptive trajectory of a scanner system having a MEMS device 有权
标题翻译：具有MEMS装置的扫描器系统的自适应轨迹的非谐振驱动
公开(公告)号：US07679804B2
公开(公告)日：2010-03-16
申请号：US11796230
申请日：2007-04-26
申请人： Dean R. Brown , Wyatt O. Davis , Gregory T. Gibson , Richard A. James
发明人： Dean R. Brown , Wyatt O. Davis , Gregory T. Gibson , Richard A. James
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B7/1821
摘要： Briefly, in accordance with one or more embodiments, a MEMS device for a scanner system may be driven in a non-resonant mode of operation. The drive signal provided to the MEMS device may be tailored to prevent the MEMS device from exhibiting resonance characteristics and to cause the MEMS device to operate non-resonantly. In one or more embodiments, a filter may be used to tailor the frequency components of the drive signal, for example to sufficiently attenuate frequency components at or near the resonant frequency of the drive signal. A direct current signal may be provided to the MEMS device to provide an offset to scanned light beam for example to provide beam steering, and the sweep range and/or sweep frequency may be adjusted for example to steer the scanning field of view off axis from the user pointing axis.
摘要翻译：简而言之，根据一个或多个实施例，可以以非谐振工作模式驱动用于扫描器系统的MEMS装置。可以调整提供给MEMS器件的驱动信号，以防止MEMS器件表现出谐振特性，并使MEMS器件非谐振地工作。在一个或多个实施例中，可以使用滤波器来定制驱动信号的频率分量，例如以充分衰减在驱动信号的谐振频率处或附近的频率分量。可以向MEMS器件提供直流信号以提供扫描光束的偏移，例如以提供光束转向，并且可以调整扫描范围和/或扫描频率以例如将扫描视场偏离轴线用户指向轴。

87. 发明申请

US20100053753A1 Optical Relay for Compact Head Up Display 有权
标题翻译：用于紧凑型头枕显示器的光学继电器
公开(公告)号：US20100053753A1
公开(公告)日：2010-03-04
申请号：US12490959
申请日：2009-06-24
申请人： Nenad Nestorovic , Joel E. Hegland
发明人： Nenad Nestorovic , Joel E. Hegland
IPC分类号： G02B27/01 , G02B27/28
CPC分类号： G02B27/0101 , G02B26/101 , G02B27/28 , G02B2027/011 , G02B2027/012 , G02B2027/0123 , G02B2027/0127
摘要： An optical relay (500) includes a glare trap (512) that in one embodiment has one or more surfaces configured to reflect light impinging the surface (550) at an angle less than a first angle (722) relative to a normal line (710), and to transmit light impinging the surface (550) at an angle greater than a second angle (723) relative to the normal line (710). In other embodiments, the glare trap (512) reflects light impinging at an angle greater than a first angle and transmit light impinging at an angle that is less than a second angle. The separation between the first angle (722) and second angle (723) can be on the order of 20 degrees or more, but this angle can be reduced or eliminated when polarized light is used within the optical relay (500).
摘要翻译：光学继电器（500）包括眩光捕获器（512），其在一个实施例中具有一个或多个表面，其被配置为反射相对于法线（710）以小于第一角度（722）的角度照射表面（550）），并且以相对于法线（710）大于第二角度（723）的角度透射照射表面（550）的光。在其他实施例中，眩光捕获器（512）反射以大于第一角度的角度入射的光并透射以小于第二角度的角度入射的光。第一角度（722）和第二角度（723）之间的间隔可以在20度或更大的数量级上，但是当在光学继电器（500）内使用偏振光时，可以减小或消除该角度。

88. 发明申请

US20100053591A1 Scanned Proximity Detection Method and Apparatus for a Scanned Image Projection System 有权
标题翻译：用于扫描图像投影系统的扫描接近检测方法和装置
公开(公告)号：US20100053591A1
公开(公告)日：2010-03-04
申请号：US12615138
申请日：2009-11-09
申请人： Gregory T. Gibson , Joshua M. Hudman , Margaret K. Brown , Christian Dean DeJong
发明人： Gregory T. Gibson , Joshua M. Hudman , Margaret K. Brown , Christian Dean DeJong
IPC分类号： G01C3/08
CPC分类号： H04N9/3129
摘要： A encoded image projection system (100) is configured to determine the proximity of the system to a projection surface (106). The encoded image projection system (100) includes a light encoder (105) that scans a non-visible light beam (115) on the projection surface (106) selectively when scanning visible light to create an image. A detector (118) is then configured to receive reflections of the non-visible light beam (115) from the projection surface (106). A control circuit (120) is configured to determine the distance (124) between the projection surface (106) and the system from, for example, intensity data or location data received from the detector (118). Where the distances (124) are below a threshold, the control circuit (120) can either reduce the output power of the system or turn the system off.
摘要翻译：编码图像投影系统（100）被配置为确定系统与投影表面（106）的接近度。编码图像投影系统（100）包括当扫描可见光以产生图像时选择性地扫描投影表面（106）上的不可见光束（115）的光编码器（105）。然后，检测器（118）被配置为从投影表面（106）接收不可见光束（115）的反射。控制电路（120）被配置为从例如从检测器（118）接收的强度数据或位置数据确定投影表面（106）和系统之间的距离（124）。当距离（124）低于阈值时，控制电路（120）可以减小系统的输出功率或者关闭系统。

89. 发明申请

US20100026960A1 Scanned Beam Overlay Projection 有权
标题翻译：扫描光束叠加投影
公开(公告)号：US20100026960A1
公开(公告)日：2010-02-04
申请号：US12182264
申请日：2008-07-30
申请人： Randall B. Sprague
发明人： Randall B. Sprague
IPC分类号： G03B21/14
CPC分类号： G03B21/14 , H04N9/3129 , H04N9/3185 , H04N13/156 , H04N13/275
摘要： A scanning beam overlay projection system displays an image on a projection surface by scanning a light beam in a raster pattern. Reflective spots on the projection surface reflect light back to the projection system when illuminated by the light beam. A photodetector in the projection system detects the reflected light, and timing circuits determine where in the raster pattern the reflective spots are located. The image can be scaled and warped to correlate tagged points within the image with the locations of the reflective spots on the projection surface.
摘要翻译：扫描光束重叠投影系统通过以光栅图案扫描光束来在投影表面上显示图像。当被光束照射时，投影表面上的反射点将光反射回投影系统。投影系统中的光电检测器检测反射光，并且定时电路确定反射点位于光栅图案的哪里。图像可以缩放和翘曲以将图像内的标记点与投影表面上的反射点的位置相关联。

90. 发明申请

US20100019462A1 APPARATUS FOR INCREASING ELECTRIC CONDUCTIVITY TO A SEMICONDUCTOR WAFER SUBSTRATE WHEN EXPOSURE TO ELECTRON BEAM 有权
标题翻译：当电子束接触时，将电导率提高到半导体基底的装置
公开(公告)号：US20100019462A1
公开(公告)日：2010-01-28
申请号：US12179560
申请日：2008-07-24
申请人： Zhong-Wei CHEN , Yi Xiang Wang , Juying Dou
发明人： Zhong-Wei CHEN , Yi Xiang Wang , Juying Dou
IPC分类号： B23B31/28
CPC分类号： H01J37/026 , B82Y10/00 , B82Y40/00 , H01J37/20 , H01J37/3174 , H01J2237/0044 , H01J2237/2817 , Y10T279/17923 , Y10T279/23
摘要： An apparatus for increasing electric conductivity to a wafer substrate when exposures to electron beam irradiation is disclosed. More specifically, a more free mechanical contact between a wafer and electric contact pins (within an electrostatic chuck) is provided to significantly reduce the scratch and damage on the wafer backside.
摘要翻译：公开了当暴露于电子束照射时增加晶片衬底的导电性的装置。更具体地，提供晶片和电接触销（在静电卡盘内）之间更自由的机械接触，以显着减少晶片背面的划痕和损伤。

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