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    • 85. 发明授权
    • Semiconductor device and method of fabricating the same
    • 半导体装置及其制造方法
    • US06614119B1
    • 2003-09-02
    • US09521771
    • 2000-03-09
    • Michio AsahinaJunichi TakeuchiNaohiro MoriyaKazuki Matsumoto
    • Michio AsahinaJunichi TakeuchiNaohiro MoriyaKazuki Matsumoto
    • H01L2940
    • H01L21/76814H01L21/28518H01L21/76801H01L21/76828H01L21/76829H01L21/76834H01L21/76837H01L21/76843H01L21/76856H01L21/76876H01L21/76877
    • A semiconductor device having a contact structure that can exhibit superlative step coverage without causing voids or wiring discontinuities, using aluminum or aluminum alloys as a conductive substance for via-holes. A method of fabricating the semiconductor device comprises, for at least one layer of wiring regions above the first wiring region on a semiconductor substrate, the following steps (a) to (f): (a) a step of forming a via-hole in a second interlayer dielectric formed above the first wiring region on a semiconductor substrate; (b) a degassing step for removing gaseous components included within the interlayer dielectric by a heat treatment under reduced pressure and at the substrate temperature of 300° C. to 550° C.; (c) a step of forming a wetting layer on the surface of the interlayer dielectric and the via-hole; (d) a step of cooling the substrate to a temperature of no more than 100° C.; (e) a step of forming a first aluminum layer comprising one of aluminum and an alloy in which aluminum is the main component on the wetting layer at a temperature of no more than 200° C.; and (f) a step of forming a second aluminum layer comprising one of aluminum and an alloy in which aluminum is the main component on the first aluminum layer at a temperature of at least 300° C.
    • 一种具有接触结构的半导体器件,其可以显示出最高级的覆盖范围,而不引起空隙或接线不连续性,使用铝或铝合金作为通孔的导电物质。 制造半导体器件的方法包括:对于在半导体衬底上的第一布线区域上方的布线区域中的至少一层的以下步骤(a)至(f):(a)形成通孔的步骤 形成在半导体衬底上的第一布线区域上方的第二层间电介质; (b)通过减压热处理和基板温度在300℃至550℃下除去层间电介质中包含的气体组分的脱气步骤; (c)在层间电介质和通孔的表面上形成润湿层的步骤; (d)将基板冷却至不超过100℃的温度; (e)在不超过200℃的温度下形成包含铝和合金中的铝的第一铝层的步骤,其中铝是润湿层上的主要成分; 以及(f)在至少300℃的温度下形成第一铝层的步骤,所述第二铝层包括铝和合金之一,其中铝是第一铝层上的主要成分。
    • 90. 发明申请
    • HOLOGRAPHIC RECORDING METHOD
    • 全景记录方法
    • US20110228663A1
    • 2011-09-22
    • US12880828
    • 2010-09-13
    • Masaya TeraiKazuki MatsumotoRumiko HayaseYoshiaki KawamonzenNorikatsu SasaoMasahiro Kanamaru
    • Masaya TeraiKazuki MatsumotoRumiko HayaseYoshiaki KawamonzenNorikatsu SasaoMasahiro Kanamaru
    • G11B7/00
    • G11B7/0065G11B7/083
    • A holographic recording method includes the following steps: irradiating an optical recording medium with a coherent reference beam and a coherent information beam to produce a hologram in the optical recording medium while irradiating the optical recording medium with an incoherent pretreatment beam to consume a polymerization inhibitor; irradiating the hologram with the reference beam to extract a reproduction beam while stopping irradiating the optical recording medium with the reference beam; sensing the signal beam with an image pick-up unit to detect an intensity of the signal beam; and calculating a bit error rate with a control unit to irradiate the hologram with the information beam if the bit error rate is larger than a prescribed value, or to stop irradiating the optical recording medium with the reference beam, the information beam and the pretreatment beam if the bit error rate is smaller than the prescribed value.
    • 全息记录方法包括以下步骤:用光学记录介质照射具有相干参考光束和相干信息光束的光学记录介质,以在光学记录介质中用不相干的预处理光束照射消耗阻聚剂; 用参考光束照射全息图以提取再现光束,同时停止用参考光束照射光学记录介质; 用图像拾取单元感测信号光束以检测信号光束的强度; 如果比特错误率大于规定值,则用控制单元计算与信息光束照射全息图的比特错误率,或停止用参考光束照射光学记录介质,信息光束和预处理光束 如果误码率小于规定值。