会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 83. 发明授权
    • Method and apparatus for wafer level burn-in
    • 晶圆级老化的方法和装置
    • US06352868B1
    • 2002-03-05
    • US09524421
    • 2000-03-11
    • Wen-Kun Yang
    • Wen-Kun Yang
    • G01R3126
    • G01R31/2879
    • A built-in circuit for wafer level burn-in of a die. The burn-in circuit includes a main burn-in control circuit, a word line control circuit and a bit line control circuit. A number of internal probing pads are also provided to receive voltages for stressing a gate oxide or capacitor oxide layer. A burn-in test system has a plurality of programmable power suppliers and programmable relays for providing control and power signals to a membrane or micro spring probe card used for the wafer level burn-in of multiple dice at the same time. Wafers are loaded and aligned in a prober with an automatic probing station and a hot chuck for the burn-in. The wafer level burn-in reduces the burn-in time of an integrated circuit chip from several days to several minutes.
    • 晶圆级老化的内置电路。 老化电路包括主老化控制电路,字线控制电路和位线控制电路。 还提供多个内部探测焊盘以接收用于施加栅极氧化物或电容器氧化物层的电压。 老化测试系统具有多个可编程电源供应商和可编程继电器,用于同时向用于多个骰子的晶片级老化的膜或微型弹簧探针卡提供控制和功率信号。 晶圆被装载并在探测器中与自动探测站和用于老化的热卡盘对准。 晶圆级老化将集成电路芯片的老化时间从几天减少到几分钟。