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    • 82. 发明申请
    • SWITCH USING MICRO ELECTRO MECHANICAL SYSTEM
    • 使用微电子机械系统开关
    • US20070134835A1
    • 2007-06-14
    • US11566952
    • 2006-12-05
    • Hiroshi FukudaToshiyuki Mine
    • Hiroshi FukudaToshiyuki Mine
    • H01L21/00H01L29/84
    • H01H59/0009G02B6/357G02B6/358G02B6/3584H01H2001/0042H01H2001/0063
    • A MEMS switch is provided with a substrate, a diaphragm which is disposed on the substrate with interposing a cavity therebetween and is elastically deformed by electrostatic force, a switch drive electrode disposed on the substrate, and a switch drive electrode disposed on the diaphragm. Further, a charge accumulation electrode is disposed on the diaphragm between the switch drive electrode and the switch drive electrode. When charge is accumulated in the charge accumulation electrode, electrostatic force is generated between the charge accumulation electrode and the switch drive electrode, thereby deforming the diaphragm. Accordingly, a small-sized bistable MEMS switch whose structure is simple, whose holding state is stable for a long period, and which can be easily mounted together with a semiconductor integrated circuit can be realized.
    • MEMS开关设置有基板,隔膜,其设置在基板上,在其间插入空腔并且通过静电力弹性变形,设置在基板上的开关驱动电极和设置在隔膜上的开关驱动电极。 此外,电荷累积电极设置在开关驱动电极和开关驱动电极之间的隔膜上。 当在电荷累积电极中积累电荷时,在电荷累积电极和开关驱动电极之间产生静电力,从而使隔膜变形。 因此,可以实现其结构简单,其保持状态长时间稳定并且可以容易地与半导体集成电路一起安装的小尺寸双稳态MEMS开关。
    • 84. 发明申请
    • Disk array apparatus and liquid cooling apparatus thereof
    • 磁盘阵列装置及其液体冷却装置
    • US20060176665A1
    • 2006-08-10
    • US11346297
    • 2006-02-03
    • Hitoshi MatsushimaHiroshi FukudaShunsuke Yamana
    • Hitoshi MatsushimaHiroshi FukudaShunsuke Yamana
    • G06F1/20
    • G06F1/206G06F2200/201Y02D10/16
    • In a cooling structure for use in a disk array apparatus, having boxes 27, each containing disk drives 26 therein by a lager number thereof, in each of the unit housings 114 are provided a air-blow fan 33, and also a liquid cooling system having a pump 107 for transmitting a liquid coolant, a radiator for discharging heats absorbed within the liquid coolant into an outside air, and pipes 101 for connecting those, etc., wherein a rotation speed of the pump is detected by a temperature sensor 120 attached on the pipe in the vicinity of an inlet of the radiator, thereby changing it depending on the temperature detected. With this, it is possible to achieve an improvement on cooling performances of the disk drives, which are contained within the housing of the disk array apparatus, and also to reduce an increase of temperature of the disk drives and unevenness in temperature among the disk drives, thereby enabling an improvement on the reliability and long lifetime of the disk drives and the cooling system thereof.
    • 在用于磁盘阵列装置的冷却结构中,具有盒27,每个单元壳体114中的每一个包含盘驱动器26,每个单元壳体114中设置有鼓风扇33,以及液体冷却系统 具有用于传送液体冷却剂的泵107,用于将液体冷却剂中吸收的热量排放到外部空气中的散热器和用于连接那些的那些的管101等,其中泵的旋转速度由附接的温度传感器120检测 在散热器入口附近的管道上,由此根据检测到的温度而改变。 由此,能够实现包含在盘阵列装置的壳体内的盘驱动器的冷却性能的提高,并且还能够减少盘驱动器的温度升高和盘驱动器之间的温度不均匀 从而能够提高盘驱动器及其冷却系统的可靠性和长寿命。
    • 86. 发明授权
    • Pattern inspection method
    • 图案检验方法
    • US07049589B2
    • 2006-05-23
    • US10752527
    • 2004-01-08
    • Atsuko YamaguchiHiroshi FukudaRyuta TsuchiyaHiroki KawadaShozo Yoneda
    • Atsuko YamaguchiHiroshi FukudaRyuta TsuchiyaHiroki KawadaShozo Yoneda
    • G01N23/00
    • G01B15/04G01B15/08
    • The present invention may include a pattern inspection method of extracting a pattern edge shape from an image obtained by a scanning microscope and inspecting the pattern. A control section and a computer of the scanning microscope process the intensity distribution of reflected electrons or secondary electrons, find the distribution of gate lengths in a single gate from data about edge positions, estimate the transistor performance by assuming a finally fabricated transistor to be a parallel connection of a plurality of transistors having various gate lengths, and determine the pattern quality and grade based on an estimated result. In this manner, it is possible to highly, accurately and quickly estimate an effect of edge roughness on the device performance and highly accurately and efficiently inspect patterns in accordance with device specifications.
    • 本发明可以包括从由扫描显微镜获得的图像中提取图案边缘形状并检查图案的图案检查方法。 扫描显微镜的控制部分和计算机处理反射电子或二次电子的强度分布,从关于边缘位置的数据中找到单个栅极中栅极长度的分布,通过假设最终制造的晶体管为 具有各种栅极长度的多个晶体管的并联连接,并且基于估计结果确定图案质量和等级。 以这种方式,可以高度,准确和快速地估计边缘粗糙度对器件性能的影响,并且根据器件规格高精度和有效地检查图案。
    • 89. 发明申请
    • Video signal processing apparatus
    • 视频信号处理装置
    • US20060023084A1
    • 2006-02-02
    • US11187796
    • 2005-07-25
    • Hiroshi Fukuda
    • Hiroshi Fukuda
    • H04N5/76
    • G11B27/34G11B27/031
    • A video signal processing apparatus able to obtain a suitable still image from a squeezed video signal, including a converting unit configured to judge whether or not a video signal has been squeezed based on an input video signal and aspect information indicating the aspect ratio of the video signal and to inverse-squeeze it to the designated video signal when judging that it was squeezed as a result of the judgment to convert it to a video signal of a still image of a prescribed image size and a still image recording and/or reproduction unit configured to record the video signal of the still image converted by the converting unit.
    • 一种视频信号处理装置,其能够从压缩的视频信号中获得合适的静止图像,所述视频信号处理装置包括:转换单元,被配置为基于输入的视频信号判断视频信号是否已经被挤压,以及指示视频的宽高比的方位信息 信号,并且当判断为将其转换成规定图像尺寸的静止图像的视频信号和静止图像记录和/或再现单元的判断结果时,将其反压缩到指定的视频信号 被配置为记录由转换单元转换的静止图像的视频信号。