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81. 发明授权

US07834992B2 Method and its apparatus for detecting defects 失效
标题翻译：检测缺陷的方法及其装置
公开(公告)号：US07834992B2
公开(公告)日：2010-11-16
申请号：US11695743
申请日：2007-04-03
申请人： Minoru Yoshida , Shunji Maeda
发明人： Minoru Yoshida , Shunji Maeda
IPC分类号： G01N21/00
CPC分类号： G01N21/9501 , G01N21/4738
摘要： In the present invention, to make corrective matching thereof, it is designed as follows; position effect of defects coordinates, which are output from an inspection apparatus, is allowed, coordinates of inspected data are mutually corrected, and a state of coincidence or non-coincidence among a plurality sets of inspected data is output or displayed. Inspection data is designed to include kinds, kinds difference and dimension of defects. A state of coincidence or non-coincidence between inspected data is designed to be output or displayed appropriately, by kinds or dimensions, or by a grouping thereof, of a defects object. The same sample is inspected by every time of passing a production step, and a state of data increase or decrease, or coincidence or non-coincidence between the inspected data is designed to be output or displayed.
摘要翻译：在本发明中，为了进行校正匹配，设计如下：允许从检查装置输出的缺陷坐标的位置效果，相互校正被检查数据的坐标，并且输出或显示多组检查数据之间的一致或不一致的状态。检验数据旨在包括缺陷的种类，种类差异和尺寸。被检查数据之间的重合或不一致的状态被设计为通过种类或尺寸或其分组来输出或显示缺陷对象。通过每次通过生产步骤检查相同的样品，并且被设计为输出或显示检查数据之间的数据增加或减少或一致或不一致的状态。

82. 外观设计

USD622633S1 Vehicle body, toy replica and/or other replicas 有权
标题翻译：车体，玩具副本和/或其他副本
公开(公告)号：USD622633S1
公开(公告)日：2010-08-31
申请号：US29348201
申请日：2009-12-09
申请人： Taisuke Nakamura , Shinya Momokawa , Minoru Yoshida , Akihiro Sugita
设计人： Taisuke Nakamura , Shinya Momokawa , Minoru Yoshida , Akihiro Sugita

83. 发明申请

US20100205699A1 MAGNETIC DEVICE INSPECTION APPARATUS AND MAGNETIC DEVICE INSPECTION METHOD 失效
标题翻译：磁性装置检查装置和磁性装置检查方法
公开(公告)号：US20100205699A1
公开(公告)日：2010-08-12
申请号：US12649468
申请日：2009-12-30
申请人： Takehiro TACHIZAKI , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
发明人： Takehiro TACHIZAKI , Masahiro Watanabe , Hideaki Sasazawa , Minoru Yoshida , Tsuneo Nakagomi , Teruaki Tokutomi
IPC分类号： G01Q60/52 , G01Q60/50
CPC分类号： G01Q60/54 , G01Q60/56 , G01Q70/12
摘要： Applying an alternating current to a magnetic head as a sample generates an alternate-current magnetic field from the sample. A cantilever includes a probe that is made of a magnetic material or is coated with a magnetic material. The cantilever is displaced when it approaches the sample. Detecting the displacement of the cantilever detects distribution of the magnetic field from the sample. It is possible to fast measure distribution of the magnetic field generated from the sample when a frequency of the alternating current applied to the sample differs from a resonance frequency of the cantilever.
摘要翻译：以交替电流作为样品施加磁头会产生来自样品的交流磁场。悬臂包括由磁性材料制成或涂覆有磁性材料的探针。悬臂在接近样品时被移位。检测悬臂的位移检测样品的磁场分布。当施加到样品的交流电流的频率与悬臂的共振频率不同时，可以快速测量从样品产生的磁场的分布。

84. 发明申请

US20090141264A1 Method and Apparatus for Observing and Inspecting Defects 审中-公开
标题翻译：观察和检查缺陷的方法和装置
公开(公告)号：US20090141264A1
公开(公告)日：2009-06-04
申请号：US12363856
申请日：2009-02-02
申请人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
发明人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
IPC分类号： G01N21/21 , G01J4/00
CPC分类号： G01N21/21 , G01N21/9501 , G01N21/956 , G01N21/95607 , G02B21/0016
摘要： A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
摘要翻译：缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置，用于照亮安装在安装件上的图案样品，并检测由其获得的反射光的光学图像。还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置，用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置，用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。

85. 发明授权

US07499162B2 Method and apparatus for observing and inspecting defects 有权
标题翻译：观察和检查缺陷的方法和装置
公开(公告)号：US07499162B2
公开(公告)日：2009-03-03
申请号：US11475667
申请日：2006-06-26
申请人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
发明人： Yukihiro Shibata , Shunji Maeda , Kazuo Yamaguchi , Minoru Yoshida , Atsushi Yoshida , Kenji Oka , Kenji Watanabe
IPC分类号： G01J4/00
CPC分类号： G01N21/21 , G01N21/9501 , G01N21/956 , G01N21/95607 , G02B21/0016
摘要： A defect inspecting apparatus includes a sample mounting device for mounting a sample; lighting and detecting apparatus for illuminating a patterned sample mounted on a mount and detecting the optical image of the reflected light obtained therefrom. Also included is a display for displaying the optical image detected by this lighting and detecting apparatus; an optical parameter setting device for setting and displaying optical parameters for the lighting and detecting apparatus on the display; and optical parameter adjusting apparatus for adjusting optical parameters set for the lighting and detecting apparatus according to the optical parameters set by the optical parameter setting apparatus; a storage device for storing comparative image data; and a defect detecting device for detecting defects from patterns formed on the sample by comparing the optical image detected by the optical image detecting apparatus with the comparative image data stored in the storage.
摘要翻译：缺陷检查装置包括用于安装样品的样品安装装置; 照明和检测装置，用于照亮安装在安装件上的图案样品，并检测由其获得的反射光的光学图像。还包括用于显示由该照明和检测装置检测的光学图像的显示器; 用于在显示器上设置和显示照明和检测装置的光学参数的光学参数设置装置; 以及光学参数调整装置，用于根据由所述光学参数设定装置设定的光学参数来调整对所述照明和检测装置设定的光学参数; 用于存储比较图像数据的存储装置; 以及缺陷检测装置，用于通过将由光学图像检测装置检测的光学图像与存储在存储器中的比较图像数据进行比较来检测在样本上形成的图案的缺陷。

86. 发明授权

US07463350B2 Method and apparatus for detecting defects of a sample using a dark field signal and a bright field signal 失效
标题翻译：使用暗场信号和亮场信号来检测样本的缺陷的方法和装置
公开(公告)号：US07463350B2
公开(公告)日：2008-12-09
申请号：US10981721
申请日：2004-11-05
申请人： Hidetoshi Nishiyama , Minoru Yoshida , Yukihiro Shibata , Shunji Maeda
发明人： Hidetoshi Nishiyama , Minoru Yoshida , Yukihiro Shibata , Shunji Maeda
IPC分类号： G01N21/00
CPC分类号： G01N21/95684
摘要： Disclosed is a method and apparatus for inspecting defects of patterns of a sample at high speed and with high sensitivity while damage of the sample arising from high-power pulsed light is reduced. Light emitted from a pulsed laser light source is transmitted through a pseudo continuous-wave forming optical system having an optical system capable of reducing energy per pulse and yet maintaining the entire amount of light of the pulsed light, a beam formation optical system, and a coherence reduction optical system, and a beam deflected by a deformation illumination optical system is made to reflect on a PBS to be irradiated on a wafer. The apparatus is configured so that the diffracted light from the wafer is focused by an objective lens, transmitted through light modulation units, focused to form a plurality of images on a plurality of image sensors in a visual-field divided parallel detection unit 12, and then defects are detected by a signal processing unit.
摘要翻译：公开了一种用于在高功率脉冲光下产生的样品损坏的情况下高速且高灵敏度地检查样品的图案的缺陷的方法和装置。从脉冲激光光源发出的光通过伪连续波形成光学系统传输，该光学系统具有能够减少每脉冲能量并且仍保持脉冲光的光量，光束形成光学系统和相干降低光学系统和由变形照明光学系统偏转的光束在PBS上反射以照射在晶片上。该装置被配置为使得来自晶片的衍射光被物镜聚焦，透镜通过光调制单元被聚焦以在视野分割并行检测单元12中的多个图像传感器上形成多个图像，以及那么由信号处理单元检测到缺陷。

87. 发明授权

US07312888B2 Image formation method and apparatus 失效
标题翻译：图像形成方法和装置
公开(公告)号：US07312888B2
公开(公告)日：2007-12-25
申请号：US10397869
申请日：2003-03-27
申请人： Minoru Yoshida , Takashi Sakayama , Toshitaka Nakagawa , Toshiyu Ishikawa , Yuichi Shiho , Tsuyoshi Watanabe , Manabu Hayashi
发明人： Minoru Yoshida , Takashi Sakayama , Toshitaka Nakagawa , Toshiyu Ishikawa , Yuichi Shiho , Tsuyoshi Watanabe , Manabu Hayashi
IPC分类号： G06F3/12 , G06K15/00
CPC分类号： H04N1/00212 , H04N1/00209 , H04N1/00957 , H04N2201/0082 , H04N2201/0086
摘要： An image formation apparatus, such as a facsimile machine, outputs a received document (image) in the form of a print. The image formation apparatus includes a receive section and an image formation section. The receive section receives an electronic mail and an attached document thereof over a network. The image formation section forms images of a main body of the electronic mail and the attached document. The images of the main body and the attached document are formed on separate sheets respectively.
摘要翻译：诸如传真机的图像形成装置以打印的形式输出接收到的文件（图像）。图像形成装置包括接收部分和图像形成部分。接收部分通过网络接收电子邮件及其附件。图像形成部分形成电子邮件的主体的图像和所附的文档。主体和附加文件的图像分别形成在不同的片材上。

88. 发明授权

US07274813B2 Defect inspection method and apparatus 有权
标题翻译：缺陷检查方法和装置
公开(公告)号：US07274813B2
公开(公告)日：2007-09-25
申请号：US11204181
申请日：2005-08-16
申请人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
发明人： Shunji Maeda , Kenji Oka , Yukihiro Shibata , Minoru Yoshida , Chie Shishido , Yuji Takagi , Atsushi Yoshida , Kazuo Yamaguchi
IPC分类号： G06K9/00
CPC分类号： G06T7/001 , G01N21/9501 , G01N21/95607 , G06T7/0004 , G06T2207/30148
摘要： A method of inspecting defects of a plurality of patterns that are formed on a substrate to have naturally the same shape. According to this method, in order to detect very small defects of the patterns with high sensitivity without being affected by irregular brightness due to the thickness difference between the patterns formed on a semiconductor wafer, a first pattern being inspected is detected to produce a first image of the first pattern, the first image is stored, a second pattern being inspected is detected to produce a second image of said second pattern, the stored first image and the second image are matched in brightness, and the brightness-matched first and second images are compared with each other so that the patterns can be inspected.
摘要翻译：检查在基板上形成的具有自然相同形状的多个图案的缺陷的方法。根据该方法，为了以高灵敏度检测图案的非常小的缺陷，不受由于在半导体晶片上形成的图案之间的厚度差而引起的不规则亮度的影响，检测出被检查的第一图案以产生第一图像第一图案被存储，检测出被检查的第二图案以产生所述第二图案的第二图像，所存储的第一图像和第二图像的亮度相匹配，并且亮度匹配的第一和第二图像彼此进行比较，从而可以检查图案。

89. 发明授权

US07204984B2 Acetyllysine-recognizing monoclonal antibody and process for producing the same 有权
标题翻译：乙酰赖氨酸识别单克隆抗体及其制备方法
公开(公告)号：US07204984B2
公开(公告)日：2007-04-17
申请号：US10471475
申请日：2002-03-13
申请人： Yasuhiko Komatsu , Minoru Yoshida
发明人： Yasuhiko Komatsu , Minoru Yoshida
IPC分类号： C12N15/13 , A61K39/395
CPC分类号： C07K16/44
摘要： Anti-acetyllysine monoclonal antibody capable of recognizing Nε-acetyllysine regardless of the types of the adjacent amino acids. Namely, a monoclonal antibody having a light chain comprising a constant region having the amino acid sequence represented by SEQ ID NO:1 and a variable region having the amino acid sequence represented by SEQ ID NO:2 or an amino acid sequence derived from this amino acid sequence by deletion, substitution or addition of one to several amino acids, and a heavy chain comprising a constant region having the amino acid sequence represented by SEQ ID NO:3 and a variable region having the amino acid sequence represented by SEQ ID NO:4 or an amino acid sequence derived from this amino acid sequence by deletion, substitution or addition of one to several amino acids, and being capable of recognizing Nε-acetyllysine in a protein regardless of the types of the adjacent amino acids, i.e., being capable of accepting adjacent amino acids over a broad range; and a process for producing this monoclonal antibody characterized by using a chemically acetylated protein as an antigen.
摘要翻译：能够识别Nε - 乙酰赖氨酸的抗乙酰赖氨酸单克隆抗体，不管相邻氨基酸的类型如何。即，具有包含具有由SEQ ID NO：1表示的氨基酸序列的恒定区和具有由SEQ ID NO：2表示的氨基酸序列的可变区的氨基酸序列的轻链的单克隆抗体或由该氨基通过缺失，取代或添加一至几个氨基酸的酸序列，以及包含具有SEQ ID NO：3所示氨基酸序列的恒定区的重链和具有由SEQ ID NO：3表示的氨基酸序列的可变区。 4或由该氨基酸序列衍生的氨基酸序列，通过缺失，取代或添加一至几个氨基酸，并且能够识别蛋白质中的Nε - 乙酰赖氨酸，而不管相邻的氨基酸，即能够在宽范围内接受相邻的氨基酸; 其特征在于使用化学乙酰化蛋白作为抗原的该单克隆抗体的制备方法。

90. 发明申请

US20070002318A1 Method and apparatus for inspecting pattern defects 有权
标题翻译：检查图案缺陷的方法和装置
公开(公告)号：US20070002318A1
公开(公告)日：2007-01-04
申请号：US11518195
申请日：2006-09-11
申请人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe
发明人： Minoru Yoshida , Shunji Maeda , Atsushi Shimoda , Kaoru Sakai , Takafumi Okabe
IPC分类号： G01N21/88
CPC分类号： G01N21/95607 , G01N21/9501 , G01N21/95684 , G01N2021/9513
摘要： A method and apparatus for inspecting pattern defects emitting a laser beam, adjusting a light-amount of the laser beam, converting the light-amount adjusted laser beam into a slit-like laser light flux, lowering coherency of the slit-like laser light flux, and irradiating a sample with the coherence reduced slit-like laser light flux. An image of reflection light from the sample is obtained, and a detector is provided which includes the image sensor for receiving the image of the reflection light and for converting it into a detected image signal. An image processor is provided for detecting defects on patterns formed on the sample in accordance with the detected image signal.
摘要翻译：用于检查发射激光束的图案缺陷的方法和装置，调节激光束的光量，将调整光量的激光束转换成狭缝状激光束，降低狭缝状激光光束的相干性并且用相干减少的狭缝状激光束照射样品。获得来自样品的反射光的图像，并且提供检测器，其包括用于接收反射光的图像并将其转换成检测到的图像信号的图像传感器。提供了一种图像处理器，用于根据检测到的图像信号检测在样本上形成的图案上的缺陷。

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