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    • 83. 发明申请
    • Projection Optical System, Method of Manufacturing Projection Optical System, Exposure Apparatus, and Exposure Method
    • 投影光学系统,投影光学系统的制造方法,曝光装置和曝光方法
    • US20080123086A1
    • 2008-05-29
    • US11662066
    • 2005-09-08
    • Yuji KudoTakeshi Iwasaki
    • Yuji KudoTakeshi Iwasaki
    • G01B9/00
    • G03F7/70591G02B13/143
    • A projection optical system provided with at least one of optical members made of a calcium fluoride single crystal, wherein each of the optical members satisfies at least any one of the following conditions of (i) to (iii): (i) an RMS value of a spatial frequency component having a number of periods fPD in partial diameter in a range from 10 periods to 50 periods inclusive out of fluctuation of a transmission wavefront relative to light having a wavelength of 633 nm is equal to or below 0.35 nm/cm; (ii) an RMS value of a spatial frequency component having a number of periods fPD in partial diameter in a range from 10 periods to 100 periods inclusive out of fluctuation of a transmission wavefront relative to light having a wavelength of 633 nm is equal to or below 0.45 nm/cm; and (iii) an RMS value of a spatial frequency component having a number of periods fPD in partial diameter in a range from 10 periods to 150 periods inclusive out of fluctuation of a transmission wavefront relative to light having a wavelength of 633 nm is equal to or below 0.50 nm/cm.
    • 一种设置有由氟化钙单晶制成的光学部件中的至少一个的投影光学系统,其中每个光学部件满足(i)至(iii)的以下条件中的至少一个:(i)RMS值 在相对于具有波长为633nm的光的发射波阵面的波动的范围内,在10个周期到50个周期的范围内具有部分直径的周期数f PD的空间频率分量相等 至或低于0.35nm / cm; (ii)具有从10个周期到100个周期的范围内的部分直径的周期数f PD的空间频率分量的RMS值,包括发射波阵面的波动相对于具有 633nm的波长等于或低于0.45nm / cm; 以及(iii)具有从10个周期到150个周期的范围内部分直径的多个周期f SUB PD的空间频率分量的RMS值,包括发射波阵面相对于具有 633nm的波长等于或小于0.50nm / cm。
    • 90. 发明申请
    • Image reading apparatus and image forming apparatus
    • 图像读取装置和图像形成装置
    • US20050128534A1
    • 2005-06-16
    • US11002195
    • 2004-12-03
    • Takeshi Iwasaki
    • Takeshi Iwasaki
    • G03B27/50H04N1/028H04N1/031H04N1/04
    • H04N1/0312H04N1/0311H04N1/1934H04N2201/02416H04N2201/02425H04N2201/02429H04N2201/02441H04N2201/02447H04N2201/04796
    • In an image reading apparatus, a plurality of reading sensors extend in a main scanning direction and separated from each other in the main scanning direction so as to be located in a staggered arrangement in which a part of one of the reading sensors in the longitudinal direction faces a part of adjacent one of the reading sensors in a sub-scanning direction. A first connection member is provided to the part of one of the reading sensors facing the part of the adjacent one of the reading sensors. The first connection member protrudes toward the adjacent one of the reading sensors. A second connection member is provided to the part of the adjacent one of the reading sensors facing the part of the one of the reading sensors. The second connection member protrudes toward the one of the reading sensors. The first and second connection members are brought into contact with each other by being urged by a spring.
    • 在图像读取装置中,多个读取传感器在主扫描方向上延伸并且在主扫描方向上彼此分离,以便位于交错排列中,其中一个读取传感器的纵向方向 在副扫描方向上面对相邻的读取传感器的一部分。 第一连接构件被提供给面向相邻一个读取传感器的一部分的读取传感器之一的部分。 第一连接构件向相邻的一个读取传感器突出。 第二连接构件被提供给面向读取传感器之一的部分的相邻的读取传感器的部分。 第二连接构件朝向读取传感器之一突出。 第一和第二连接构件通过被弹簧推动而相互接触。