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    • 83. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
    • 半导体器件及其制造方法
    • US20140138678A1
    • 2014-05-22
    • US14130844
    • 2012-06-26
    • Kazuatsu ItoHidehito Kitakado
    • Kazuatsu ItoHidehito Kitakado
    • H01L29/786H01L29/66
    • H01L29/7869H01L27/1225H01L29/66969H01L29/78618H01L29/78645H01L29/78696
    • A semiconductor device (100A) has an oxide semiconductor layer (11). The oxide semiconductor layer (11) has a channel region (11c), and a source region (11s) and drain region (11d) positioned on respective sides of the channel region (11c). The source region (11s) has a low-resistance source region (11sx) that has a lower resistance than the channel region (11c), and the drain region (11d) has a low-resistance drain region (11dx) that has a lower resistance than the channel region (11c). The carrier concentrations of the low-resistance source region (11sx) and the low-resistance drain region (11dx) become progressively lower from a connecting portion between a source electrode (17) and the low-resistance source region (11sx) and a connecting portion between a drain electrode (18) and the low-resistance drain region (11dx) towards the channel region (11c).
    • 半导体器件(100A)具有氧化物半导体层(11)。 氧化物半导体层(11)具有沟道区域(11c)以及位于沟道区域(11c)的相应侧面上的源极区域(11s)和漏极区域(11d)。 源极区域(11s)具有比沟道区域(11c)低的电阻的低电阻源极区域(11sx),漏极区域(11d)具有低电阻漏极区域(11dx) 电阻比通道区域(11c)。 低电阻源极区域(11sx)和低电阻漏极区域(11dx)的载流子浓度从源电极(17)和低电阻源极区域(11sx)之间的连接部分逐渐降低,并且连接 漏极电极(18)和低电阻漏极区域(11dx)之间的部分朝向沟道区域(11c)。
    • 84. 发明授权
    • Semiconductor device, active matrix substrate and display device
    • 半导体器件,有源矩阵基板和显示器件
    • US08648397B2
    • 2014-02-11
    • US13515921
    • 2010-11-02
    • Seiji KanekoHidehito Kitakado
    • Seiji KanekoHidehito Kitakado
    • H01L29/80
    • H01L29/78633G02F1/1368H01L29/78621H01L29/78645H01L29/78648
    • A switching element (a semiconductor device) (18) having a top gate electrode (21) and a bottom gate electrode (23) is provided with a silicon layer (a semiconductor layer) (SL) that is arranged between the top gate electrode (21) and the bottom gate electrode (a light-shielding film) (23) and that has a source region (24), a drain region (28), a channel region (26), and low-concentration impurity regions (25, 27). Furthermore, the bottom gate electrode (23) is arranged so as to overlap the channel region (26), a part of the low-concentration impurity region (25), which is adjacent to the source region (24), and a part of the low-concentration impurity region (27), which is adjacent to the drain region (28). The bottom gate electrode (23) is controlled so as to have a prescribed potential.
    • 具有顶栅极(21)和底栅电极(23)的开关元件(半导体器件)(18)设置有硅层(半导体层)(SL),其设置在顶栅电极 21)和底栅极(遮光膜)(23),并且具有源极区(24),漏极区(28),沟道区(26)和低浓度杂质区(25, 27)。 此外,底栅电极(23)被布置成与沟道区(26)重叠,与源区(24)相邻的低浓度杂质区(25)的一部分,和 与漏极区域(28)相邻的低浓度杂质区域(27)。 底栅极(23)被控制为具有规定的电位。
    • 85. 发明申请
    • THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREFOR, AND DISPLAY DEVICE
    • 薄膜晶体管及其制造方法及显示装置
    • US20140035478A1
    • 2014-02-06
    • US14002211
    • 2012-02-23
    • Hidehito KitakadoSumio Katoh
    • Hidehito KitakadoSumio Katoh
    • H01L29/786H05B37/02H01L29/66
    • H01L29/7869H01L29/45H01L29/66742H01L29/66969H01L29/78618H05B37/02
    • The invention provides a thin film transistor having current driving force that can be substantially improved. By heat treatment, the IGZO layer (45) from which oxygen is taken away by the titanium electrodes (65) becomes the low resistance regions (40b), and the IGZO layer (45) from which oxygen is not taken away remains as the high resistance region (40a). In this state, when the gate voltage is applied to the gate electrode (20), electrons in the low resistance regions (40b) near the boundaries with the high resistance region (40a) move respectively to the titanium electrode (65) sides. As a result, the length of the low resistance regions (40b) becomes short, and oppositely, the length of the high resistance region (40a) becomes longer by the size of the shortened low resistance regions. However, the electrical channel length (Le) becomes shorter than the source/drain interval space (Lch) as the limit resolution of the exposure device, and the current driving force becomes large.
    • 本发明提供一种薄膜晶体管,其具有可大大改善的电流驱动力。 通过热处理,由钛电极(65)夺取氧的IGZO层(45)成为低电阻区域(40b),并且不吸收氧气的IGZO层(45)保持为高 电阻区域(40a)。 在该状态下,当栅电极(20)施加栅极电压时,与高电阻区域(40a)的边界附近的低电阻区域(40b)中的电子分别移动到钛电极(65)侧。 结果,低电阻区域(40b)的长度变短,相反地,通过缩短的低电阻区域的尺寸,高电阻区域(40a)的长度变长。 然而,电通道长度(Le)比作为曝光装置的极限分辨率的源极/漏极间隔空间(Lch)短,并且电流驱动力变大。
    • 86. 发明申请
    • THIN FILM TRANSISTOR, MANUFACTURING METHOD THEREFOR, AND DISPLAY DEVICE
    • 薄膜晶体管,其制造方法和显示器件
    • US20130334530A1
    • 2013-12-19
    • US14002794
    • 2012-03-02
    • Sumio KatohHidehito Kitakado
    • Sumio KatohHidehito Kitakado
    • H01L29/786H01L33/00
    • H01L29/78693H01L27/1222H01L29/41733H01L29/78609H01L29/78618H01L29/7869H01L29/78696H01L33/0041
    • The invention provides a thin film transistor that can reduce an off-current flowing in end-parts in a channel width direction of a channel layer and a manufacturing method therefor.Widths of a source electrode (160a) and a drain electrode (160b) are smaller than a width of a channel layer (140). Accordingly, in the channel layer (140), low resistance regions (140b) are formed to surround respectively the source electrode (160a) and the drain electrode (160b). A high resistance region (140a) having a higher resistance value than those of the low resistance regions (140b) remains not only in the region sandwiched between the two low resistance regions (140b), but also in the end parts in the channel width direction. As a result, in a TFT (100), the high resistance region (140a) is extended not only to the channel region sandwiched between the source electrode (160a) and the drain electrode (160b), but also to the end parts in the channel width direction. Accordingly, the off-current flowing through the end parts in the channel width direction reduces.
    • 本发明提供一种薄膜晶体管及其制造方法,该薄膜晶体管能够减小沟道层的沟道宽度方向的端部流过的截止电流。 源电极(160a)和漏电极(160b)的宽度小于沟道层(140)的宽度。 因此,在沟道层(140)中,分别形成有低电阻区域(140b)围绕源电极(160a)和漏电极(160b)。 具有比低电阻区域(140b)更高的电阻值的高电阻区域(140a)不仅保持在夹在两个低电阻区域(140b)之间的区域中,而且在通道宽度方向上的端部部分 。 结果,在TFT(100)中,高电阻区域(140a)不仅延伸到夹在源电极(160a)和漏电极(160b)之间的沟道区域,而且延伸到 通道宽度方向。 因此,在通道宽度方向流过端部的截止电流减少。
    • 89. 发明申请
    • CAPACITANCE CHANGE DETECTING CIRCUIT
    • 电容变化检测电路
    • US20110199329A1
    • 2011-08-18
    • US12998336
    • 2009-06-02
    • Hidehito KitakadoChristopher Brown
    • Hidehito KitakadoChristopher Brown
    • G06F3/045
    • G06F3/044G02F1/13338G09G3/3648
    • When a surface of a liquid crystal panel is pressed, the capacitance value of a variable capacitor changes. In at least one embodiment, one electrode of the variable capacitor is connected to a voltage supply line to which a common voltage is applied, and the other electrode of the variable capacitor is connected to a gate electrode of a TFT. The TFT outputs a voltage generated according to the capacitance value of the variable capacitor. One electrode of a control capacitor is connected to the gate electrode of the TFT, and the other electrode of the control capacitor is connected to a control voltage line to which a control voltage is applied. By applying a control voltage to the gate electrode of the TFT through the control capacitor, while the load capacitance of the control voltage line is reduced and a change in capacitance is detected with a high sensitivity, the sensitivity can be adjusted according to the application, person, etc., when used. By this, a capacitance change detecting circuit is provided that can detect a change in capacitance with a high sensitivity and can control the sensitivity when used.
    • 当按压液晶面板的表面时,可变电容器的电容值发生变化。 在至少一个实施例中,可变电容器的一个电极连接到施加公共电压的电压供给线,可变电容器的另一个电极连接到TFT的栅电极。 TFT输出根据可变电容器的电容值产生的电压。 控制电容器的一个电极连接到TFT的栅电极,控制电容器的另一个电极连接到施加控制电压的控制电压线。 通过控制电容器向TFT的栅电极施加控制电压,在控制电压线的负载电容降低并且以高灵敏度检测电容变化的同时,可以根据应用来调整灵敏度, 人等,使用时。 由此,提供了能够以高灵敏度检测电容变化并且可以在使用时控制灵敏度的电容变化检测电路。
    • 90. 发明申请
    • CAPACITANCE CHANGE DETECTING CIRCUIT
    • 电容变化检测电路
    • US20110193816A1
    • 2011-08-11
    • US12998312
    • 2009-06-02
    • Hidehito Kitakado
    • Hidehito Kitakado
    • G06F3/044G06F3/038
    • G06F3/044G06F3/0412G09G3/3648
    • In at least one embodiment, when a surface of a liquid crystal panel is pressed, the capacitance value of a variable capacitor changes. One electrode of the variable capacitor is connected to a voltage supply line to which a common voltage is applied, and the other electrode of the variable capacitor is connected to a gate electrode of a TFT. The TFT outputs a voltage generated according to the capacitance value of the variable capacitor. Another TFT is provided between a control voltage line to which a control voltage is applied and the gate electrode of the TFT. A gate electrode of the other TFT is connected to a row selection line. By providing the other TFT, a desired voltage is applied to the gate electrode of the TFT, whereby charge accumulated on the electrode is dissipated, enabling to prevent circuit malfunction. By reducing the load capacitance of the control voltage line, a change in capacitance can be detected with a high sensitivity. By this, a capacitance change detecting circuit is provided that can detect a change in capacitance with a high sensitivity without malfunction.
    • 在至少一个实施例中,当按压液晶面板的表面时,可变电容器的电容值发生变化。 可变电容器的一个电极连接到施加公共电压的电压供给线,并且可变电容器的另一个电极连接到TFT的栅电极。 TFT输出根据可变电容器的电容值产生的电压。 在施加控制电压的控制电压线和TFT的栅电极之间设置另一TFT。 另一个TFT的栅电极连接到行选择线。 通过提供另一TFT,期望的电压被施加到TFT的栅电极,由此累积在电极上的电荷消散,从而能够防止电路故障。 通过降低控制电压线的负载电容,可以高灵敏度地检测电容的变化。 由此,提供了能够以高灵敏度无故障地检测电容的变化的电容变化检测电路。