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    • 82. 发明授权
    • Scanning charged particle microscope
    • 扫描带电粒子显微镜
    • US06852973B2
    • 2005-02-08
    • US10410224
    • 2003-04-09
    • Hidekazu SuzukiAtsushi Uemoto
    • Hidekazu SuzukiAtsushi Uemoto
    • G02B7/28G01N23/225G02B7/36G21K7/00H01J37/21H01J37/28G01N13/16
    • G01N23/225H01J37/21H01J37/28H01J2237/216H01J2237/2817
    • The present invention sets out to provide a scanning charged particle microscope equipped with a rapid control function capable of extrapolating an in-focus point from image information for a single frame and an automatic focusing system capable of reliably and precisely carrying out a focusing operation for a horizontal pattern image. The automatic focusing system provided in the scanning charged particle microscope of the present invention is provided with means for changing a focal point each raster scan line, and control means for comparing image information each scanning line and extrapolating focusing positions. The scanning line can then be made to be an inclined scanning line that is a combination of a horizontal component and a vertical component with respect to a chip array on a semiconductor wafer. Further, a method is adopted comprising a first step of reliably taking in a coarse in-focus point and a second step of detecting the in-focus point with a high degree of precision.
    • 本发明提供了一种装备有能够从单帧的图像信息中外推聚焦点的快速控制功能的扫描带电粒子显微镜,以及能够可靠且精确地进行聚焦操作的自动对焦系统 水平图案图像。 提供在本发明的扫描带电粒子显微镜中的自动对焦系统设置有用于改变每个光栅扫描线的焦点的装置,以及用于将每个扫描线和外插聚焦位置的图像信息进行比较的控制装置。 然后可以将扫描线制成为相对于半导体晶片上的芯片阵列的水平分量和垂直分量的组合的倾斜扫描线。 此外,采用包括可靠地获取粗焦点的第一步骤和以高精度检测对焦点的第二步骤的方法。