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    • 81. 发明授权
    • Charged particle beam apparatus and method adjusting axis of aperture
    • 带电粒子束装置和方法调节孔径
    • US08124932B2
    • 2012-02-28
    • US12310149
    • 2007-08-03
    • Takashi OgawaYo YamamotoHiroshi Matsumura
    • Takashi OgawaYo YamamotoHiroshi Matsumura
    • G01N23/00
    • H01J37/09H01J37/15H01J37/20H01J37/28H01J37/3056H01J2237/024H01J2237/0458
    • A charged particle beam apparatus includes a charged particle source, an aperture, an object lens, an observing unit, an aperture driving portion, and a control portion. The control portion includes a spot pattern forming portion that forms a plurality of spot patterns on a surface of a sample by irradiating a charged particle beam, an analyzing portion that calculates a position of a spot center of the spot pattern and a geometrical center position of a halo, and an adjusting position determining portion that calculates an adjusting position based on a position of intersecting lines connecting the positions of the spot centers of the respective spot patterns and the center position of the halo. In this manner, the position of the aperture can be easily and accurately adjusted in a short period of time by moving the center axis of the aperture to the adjusting position.
    • 带电粒子束装置包括带电粒子源,孔径,物镜,观察单元,孔径驱动部分和控制部分。 控制部分包括通过照射带电粒子束在样品的表面上形成多个斑点图案的斑点图形形成部分,计算斑点图案的斑点中心的位置和几何中心位置的分析部分 光圈和调整位置确定部分,其基于连接各个光点图案的光点中心的位置和光晕的中心位置的交叉线的位置来计算调整位置。 以这种方式,通过将孔的中心轴线移动到调节位置,可以在短时间内容易且精确地调节孔径的位置。
    • 82. 发明申请
    • Focused ion beam apparatus
    • 聚焦离子束装置
    • US20110233401A1
    • 2011-09-29
    • US13065698
    • 2011-03-28
    • Kenichi NishinakaTakashi OgawaYoshihiro Koyama
    • Kenichi NishinakaTakashi OgawaYoshihiro Koyama
    • G01N23/225
    • H01J37/08H01J37/265H01J2237/006H01J2237/0807H01J2237/0827
    • Provided is a focused ion beam apparatus including: a storage section for storing, for each gas type, a set temperature of an emitter, a gas pressure of an ion source gas, an extraction voltage to be applied to an extraction electrode, a set value of a contrast, and a set value of a brightness; an input section for selecting and inputting a gas type; and a control section for reading out, from the storage section, the set temperature, the gas pressure, the extraction voltage, and the set value of the contrast and the set value of the brightness, which correspond to the input gas type, and respectively setting a heater, a gas control section, a voltage control section, and an adjustment section for an observation image.
    • 本发明提供一种聚焦离子束装置,其特征在于,包括:存储部,对于各气体类型,存储发光体的设定温度,离子源气体的气体压力,对提取电极施加的提取电压,设定值 的对比度和亮度的设定值; 用于选择和输入气体类型的输入部分; 以及控制部分,用于从存储部分读出对应于输入气体类型的对比度的设定温度,气体压力,提取电压和设定值以及亮度的设定值,并分别 设置加热器,气体控制部,电压控制部和用于观察图像的调整部。
    • 83. 发明授权
    • Electroluminescence display apparatus
    • 电致发光显示装置
    • US08009129B2
    • 2011-08-30
    • US12058800
    • 2008-03-31
    • Yuichi MatsuoTakashi Ogawa
    • Yuichi MatsuoTakashi Ogawa
    • G09G3/30
    • G09G3/3233G09G3/3291G09G2310/0297G09G2320/0233G09G2320/0285G09G2320/0295
    • During a blanking period of a video signal, an element driving transistor for controlling a drive current supplied to an EL element is operated in its saturation region to thereby set the EL element to an emission level, and a current flowing through the EL element at that time is detected. Each current detector includes a current detection amplifier and a successive approximation type AD converter, and a DA converter of the successive approximation type AD converter is commonly shared among a plurality of the AD converters. With this arrangement, sufficient AD converting speed can be attained while using a simple structure to execute current detection for correcting display variations.
    • 在视频信号的消​​隐期间,用于控制提供给EL元件的驱动电流的元件驱动晶体管在其饱和区域中工作,从而将EL元件设定为发光电平,以及流过EL元件的电流 检测到时间。 每个电流检测器包括电流检测放大器和逐次逼近型AD转换器,并且在多个AD转换器中共同共享逐次逼近型AD转换器的DA转换器。 通过这种布置,可以在使用简单的结构执行用于校正显示变化的电流检测的同时获得足够的AD转换速度。
    • 87. 发明授权
    • Lane marker recognition apparatus
    • 车道标识识别装置
    • US07933433B2
    • 2011-04-26
    • US11804939
    • 2007-05-21
    • Takashi Ogawa
    • Takashi Ogawa
    • G06K9/00
    • G06K9/4604G01S17/936
    • Data on a lane marker are extracted based on a centerline position, centerline shape, and width of a lane, which are projected for the present cycle. Data on a lane centerline are generated by adjusting x-axis components of the extracted data. A centerline position and centerline shape is calculated with the Hough's transformation using the generated data on the lane centerline. A frequency distribution is calculated for opposing positions with respect to the lane centerline. A lane width of the road is calculated by calculating an auto-correlation function with respect to the frequency distribution. A centerline position, centerline shape, and lane width at the present cycle and subsequent cycles are estimated/projected with the Kalman filter.
    • 基于当前周期投影的车道的中心线位置,中心线形状和宽度来提取车道标记上的数据。 通过调整提取的数据的x轴分量来生成车道中心线上的数据。 使用车道中心线上的生成数据,使用霍夫变换计算中心线位置和中心线形状。 针对相对于车道中心线的相对位置计算频率分布。 通过计算相对于频率分布的自相关函数来计算道路的车道宽度。 使用卡尔曼滤波器估计/投影当前周期和随后周期的中心线位置,中心线形状和车道宽度。
    • 89. 发明授权
    • Charged-particle beam apparatus
    • 带电粒子束装置
    • US07804066B2
    • 2010-09-28
    • US12177563
    • 2008-07-22
    • Takashi OgawaHiroto Muto
    • Takashi OgawaHiroto Muto
    • G01N23/00G21K7/00
    • H01J37/02H01J37/16H01J37/185H01J2237/022H01J2237/12H01J2237/31749
    • Provided is a charged-particle beam apparatus capable of preventing a small amount of dust from being attached to an electrostatic lens serving as an objective lens to apply a high voltage to the electrostatic lens.The charged-particle beam apparatus 1 includes a chamber 2 which has an interior 2a evacuated by an intra-chamber evacuating means 4, and a lens-barrel 3 which emits a charged-particle beam B1 onto a sample S put in the interior 2a of the chamber 2. The lens-barrel 3 includes a cylindrical body 5 which includes an emission outlet 6 for emission of the charged-particle beam B1, a charged-particle supply part 7 which is housed at a side of a proximal end 5b in an interior 5a of the cylindrical body 5 and releases the charged-particle beam B1, and an objective lens 11 which is housed at a side of a distal end 5b in the interior 5b of the cylindrical body 5 and has an electrostatic lens for generating an electric field and converging the charged-particle beam B1 released from the charged-particle supply part 7. The cylindrical body 5 of the lens-barrel 3 is provided with a gas supplying means 12 capable of supplying a gas G to the interior 5b of the cylindrical body 5, and the gas supplying means 12 is provided at a side of a proximal end of the objective lens 11.
    • 本发明提供一种能够防止少量灰尘附着在作为物镜的静电透镜上以对静电透镜施加高电压的带电粒子束装置。 带电粒子束装置1包括:腔室2,其具有通过室内排气装置4抽真空的内部2a;以及透镜筒3,其将带电粒子束B1发射到放置在内部2a的内部2a中的样品S上 透镜镜筒3包括圆柱体5,其包括用于发射带电粒子束B1的发射出口6,带电粒子供应部分7,其被容纳在基端部5b的一侧 圆筒体5的内部5a并释放带电粒子束B1,以及物镜11,其容纳在圆筒体5的内部5b中的远端5b的一侧,并具有用于产生电 并且使从带电粒子供应部件7释放的带电粒子束B1会聚。透镜镜筒3的圆柱体5设置有气体供给装置12,其能够将气体G供应到圆柱形 主体5和气体供应 g装置12设置在物镜11的近端的一侧。
    • 90. 发明授权
    • Vehicle mirror device
    • 车载镜装置
    • US07759892B2
    • 2010-07-20
    • US11892809
    • 2007-08-27
    • Yuji ShoTakashi Ogawa
    • Yuji ShoTakashi Ogawa
    • G05D3/00
    • B60R1/07
    • A vehicle mirror device includes a base unit configured to be fixed to a vehicle, a body unit that includes a mirror and is rotatably attached to the base unit, and a driving unit that drives the body unit to rotate with respect to the base unit. The driving unit includes a motor that drives the body unit to rotate, a current detecting circuit that detects current fluctuation due to rotation of the motor, and a switching circuit that switches ON or OFF current supply to the motor. While current fluctuation is detected, the switching circuit keeps current supply to the motor ON. While no current fluctuation is detected, the switching circuit switches OFF current supply to the motor.
    • 一种车辆用反射镜装置,包括:被配置为固定在车辆上的基座单元,包括反射镜并可旋转地安装在基座单元上的主体单元,以及驱动单元,其驱动主体单元相对于基座单元旋转。 驱动单元包括驱动本体单元旋转的电动机,检测由电动机的旋转引起的电流波动的电流检测电路,以及向电动机接通或断开电流供给的开关电路。 当检测到电流波动时,开关电路保持电机向电机供电。 当没有检测到电流波动时,开关电路切断电动机的电流供应。