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    • 81. 发明授权
    • Investigation device and investigation method
    • 调查手段及调查方法
    • US06968079B2
    • 2005-11-22
    • US09886976
    • 2001-06-25
    • Akira YoshikawaKazuhisa MachidaHitoshi KomuroTakehiro HiraiKatsuhiro Kitahashi
    • Akira YoshikawaKazuhisa MachidaHitoshi KomuroTakehiro HiraiKatsuhiro Kitahashi
    • G01N21/956G06T1/00G06T7/00G06T7/60H01L21/66G06K9/00
    • G06T7/001G06T7/0002G06T7/60G06T2200/24G06T2207/30148
    • The present invention relates to an inspection device and inspection method of a specimen, particularly to the inspection device and inspection method of defects of semiconductor wafers, and the object is to cope with the increase of inspection images and provide an inspection device and inspection method which is capable of classification by sub class, meeting the user needs, in addition to the automatic classification by an inspection device.To achieve the afore-mentioned object, the present invention provides an inspection device, comprising a storage means for storing the images obtained and a display means equipped with the first display area for displaying multiple images stored in the storage means and the second display area for displaying the images which are classified according to the characteristics of the displayed images (called the classified images), wherein the display means displays the class of the specimen, displays the sub class which is set manually for each class, and also displays the images selected by the sub class as a mass of the classified images for each sub class.
    • 本发明涉及一种试样的检查装置和检查方法,特别涉及检查装置和半导体晶片的缺陷检查方法,其目的是应对检查图像的增加,并提供检查装置和检查方法, 能够通过子类进行分类,满足用户需求,除了通过检查设备进行自动分类。 为了实现上述目的,本发明提供了一种检查装置,包括:存储装置,用于存储所获得的图像;以及显示装置,配备有用于显示存储在存储装置中的多个图像的第一显示区域和第二显示区域, 显示根据显示图像的特性(称为分类图像)分类的图像,其中显示装置显示样本的类别,显示为每个类别手动设置的子类,并且还显示所选择的图像 通过子类作为每个子类的分类图像的质量。
    • 87. 发明申请
    • OPTICAL DISC DEVICE
    • 光盘设备
    • US20090290463A1
    • 2009-11-26
    • US12302068
    • 2008-02-08
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • Yuuichi KuzeAkira YoshikawaKatsuya Watanabe
    • G11B20/18
    • G11B7/00375G11B7/00736G11B7/0948G11B20/1816G11B20/1883G11B2007/0013G11B2020/10925G11B2020/1826G11B2220/20G11B2220/237G11B2220/2537
    • The optical disc apparatus of this invention includes: an optical pickup, which irradiates an optical disc with a light beam and generates a light detection signal based on the beam reflected from the disc; a search section, which controls the pickup before data is written on a storage area of the disc, thereby adjusting the beam spot location and searching a reference one of information layers stacked for a defective area in the storage area of the disc; a defect decision section for detecting an error based on the detection signal and determining a portion of the storage area, where the error has occurred, as the defective area; a defect size measuring section for measuring the size of the defective area in an area of the reference layer and generating a defect information list indicating there is the defective area in the area of the reference layer; and a recording range control section for managing, by reference to the list, the storage area such that no data will be written on a perpendicularly projected area defined by projecting the defective area of the reference layer perpendicularly to another information layer.
    • 本发明的光盘装置包括:光学拾取器,其用光束照射光盘,并且基于从光盘反射的光束产生光检测信号; 搜索部分,其在数据被写入盘的存储区域之前控制拾取,从而调整光束位置并搜索堆叠在盘的存储区域中的缺陷区域的信息层中的参考一个; 缺陷判定部分,用于基于检测信号检测错误,并确定发生错误的存储区域的一部分作为缺陷区域; 缺陷尺寸测量部分,用于测量参考层的区域中的缺陷区域的尺寸,并产生指示在参考层的区域中存在缺陷区域的缺陷信息列表; 以及记录范围控制部分,用于通过参考列表来管理存储区域,使得不会将数据写入垂直于参考层的缺陷区垂直于另一信息层定义的垂直投影区域。
    • 89. 发明授权
    • Optical disk apparatus
    • 光盘装置
    • US07525883B2
    • 2009-04-28
    • US11172545
    • 2005-06-30
    • Akira YoshikawaKenji Kondo
    • Akira YoshikawaKenji Kondo
    • G11B7/08
    • G11B7/0946G11B7/08511G11B7/0908G11B2007/0013
    • An optical disk apparatus is provided with an actuator that moves a beam spot that is formed by an optical head on an optical disk to recording surfaces; position control portions that control a position of the beam spot based on the output signal of the optical head; a disturbance estimation observer relating to the actuator; and a summing circuit that takes a sum of the output of the position control portion and the output of the observer, so as to drive the actuator based on the output of the summing circuit. The optical disk apparatus further is provided with a system controller that turns the observer on and off, a LPF that attenuates the high-frequency components of the output of the observer and retains the final value of the observer when the observer is turned off, and a switching circuit that switches between the output of the observer and the output of the LPF according to whether the observer is on or off. When the observer processing is off, the output of the LPF is supplied to the summing circuit. Thereby, instability in the control due to observer processing can be avoided even at the time of mode transition or addition of disturbance from outside.
    • 光盘装置设置有致动器,其将由光学头形成的光束移动到光盘到记录表面; 位置控制部,其基于所述光学头的输出信号来控制所述光点的位置; 涉及致动器的扰动估计观察器; 以及求和电路,其获取位置控制部分的输出和观察者的输出的和,以便基于求和电路的输出来驱动致动器。 该光盘装置还设置有使观察者接通和关闭的系统控制器,LPF,其使观察者的输出的高频分量衰减,并且当观察者关闭时保持观察者的最终值;以及 切换电路,根据观察者是否开启,在观察者的输出和LPF的输出之间进行切换。 当观察者处理关闭时,LPF的输出被提供给求和电路。 因此,即使在模式转换时或从外部增加干扰的情况下也可以避免由观察者处理引起的控制的不稳定性。