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    • 83. 发明授权
    • Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions
    • 用于在非常高的气流和RF功率密度条件下限制RF等离子体的等离子体处理装置和方法
    • US06744212B2
    • 2004-06-01
    • US10077072
    • 2002-02-14
    • Andreas FischerDave TrussellBill KennedyPeter Loewenhardt
    • Andreas FischerDave TrussellBill KennedyPeter Loewenhardt
    • C23C1600
    • H01J37/32082H01J37/32623H01J37/32642
    • The present invention includes a system and method for confining plasma within a plasma processing chamber. The plasma processing apparatus comprises a first electrode, a power generator, a second electrode, at least one confinement ring, and a ground extension surrounding the first electrode. The first electrode is configured to receive a workpiece and has an associated first electrode area. The power generator is operatively coupled to the first electrode, and the power generator is configured to generate RF power that is communicated to the first electrode. The second electrode is disposed at a distance from the first electrode. The second electrode is configured to provide a complete electrical circuit for RF power communicated from the first electrode. Additionally, the second electrode has a second electrode area that is greater than the first electrode area. At least one confinement ring is configured to assist confine the plasma. The plasma is generated with the RF power being communicated between the first electrode and the gas residing inside the confinement rings. The ground extension drains charge from the plasma boundaries with a grounded conductive surface.
    • 本发明包括用于将等离子体限制在等离子体处理室内的系统和方法。 等离子体处理装置包括第一电极,发电机,第二电极,至少一个限制环和围绕第一电极的接地延伸部。 第一电极被配置为接收工件并且具有相关联的第一电极区域。 功率发生器可操作地耦合到第一电极,并且发电机被配置为产生与第一电极连通的RF功率。 第二电极设置在离第一电极一定距离处。 第二电极被配置为提供从第一电极传送的RF功率的完整电路。 另外,第二电极具有大于第一电极区域的第二电极区域。 至少一个限制环被配置成辅助限制等离子体。 产生等离子体,其中RF功率在第一电极和驻留在限制环内部的气体之间连通。 接地延长线从等离子体边界带有接地导电表面的电荷。
    • 86. 发明授权
    • Arrangement for securing components in an optical system
    • 用于固定光学系统中部件的布置
    • US5926326A
    • 1999-07-20
    • US000412
    • 1998-02-03
    • Andreas FischerReiner HofmannArmin Leitel
    • Andreas FischerReiner HofmannArmin Leitel
    • G02B7/02
    • G02B7/026
    • An arrangement is provided for fixing components of an optical system such as lenses, mounting rings, and the like. The components which are guided radially in the tube are held in the axial direction under pretensioning in an elastic manner. The arrangement is designed for fixing components in the axial direction in which the pretensioning force can be varied in definable steps. This is done by providing that a detachable fastening ring and also the tube have catch elements at concentric circumferential surfaces, which catch elements are constructed as complementing locking elements. Under axially directed force, the catch elements of the fastening ring can be engaged in the catch elements at the tube and the catch elements can be disengaged in the opposite force direction. The pretensioning force which is exerted by the fastening ring on the components to be held depends upon the extent to which the catch elements of the fastening ring and of the tube overlap.
    • PCT No.PCT / EP97 / 02928 371日期1998年2月3日 102(e)1998年2月3日PCT 1997年6月5日PCT公布。 WO97 / 48000 PCT出版物 日期1997年12月18日提供了用于固定诸如透镜,安装环等的光学系统的部件的布置。 在管内径向引导的部件以弹性方式在预拉伸下沿轴向保持。 该装置被设计用于沿轴向方向固定部件,其中预张力可以在可定义的步骤中变化。 这通过提供可拆卸的紧固环以及管在同心圆周表面处具有捕获元件来实现,该捕获元件被构造为补充锁定元件。 在轴向定向的力下,紧固环的卡扣元件可以在管中接合在捕获元件中,并且捕获元件可以沿相反的力方向脱离。 由紧固环施加在要保持的部件上的预张紧力取决于紧固环和管的捕获元件重叠的程度。
    • 89. 发明授权
    • Methods and apparatuses for effectively reducing gas residence time in a plasma processing chamber
    • 有效减少等离子体处理室中气体停留时间的方法和装置
    • US09299541B2
    • 2016-03-29
    • US13436728
    • 2012-03-30
    • Andreas Fischer
    • Andreas Fischer
    • H01J37/32
    • H01J37/32972
    • Methods and apparatuses for controlling plasma generation in a plasma processing chamber to reduce an effective residence time of by-product gases or to control in real time the concentration of certain polymer pre-cursors or reaction by-products in the plasma processing chamber are disclosed. The gas residence time is “effectively” reduced by reducing the plasma reaction for at least a portion of the process time. Thresholds can be provided to control when the plasma reaction is permitted to proceed at the full rate and when the plasma reaction is permitted to proceed at the reduced rate. By reducing the rate of plasma by-product generation at least for a portion of the process time, the by-product gas residence time may be effectively reduced to improve process results.
    • 公开了用于控制等离子体处理室中的等离子体产生以减少副产物气体的有效停留时间或实时控制等离子体处理室中某些聚合物前体或反应副产物的浓度的方法和装置。 通过在处理时间的至少一部分减少等离子体反应,“有效地”减少气体停留时间。 可以提供阈值以控制何时允许血浆反应以全速进行,并且允许血浆反应以降低的速率进行。 通过至少在一部分处理时间内降低等离子体副产物产生速率,可以有效地减少副产物气体停留时间以改善工艺结果。