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    • 83. 发明申请
    • LIBRARY ACCURACY ENHANCMENT AND EVALUATION
    • 图书馆精确度增强与评估
    • US20080071504A1
    • 2008-03-20
    • US11946821
    • 2007-11-28
    • Shifang LiJunwei BaoWei Liu
    • Shifang LiJunwei BaoWei Liu
    • G06F15/00
    • G01B11/24G03F7/70625
    • The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated diffraction signals. Each simulated diffraction signal contains at least one set of four reflectivity parameters for a wavelength and/or angle of incidence. One of the four reflectivity parameters is selected. A value for the selected reflectivity parameter is determined using the identity relationship and values of the remaining three reflectivity parameters. The determined value for the selected reflectivity parameter is compared to the value in the obtained set of four reflectivity parameters to evaluate and improve the accuracy of the library. The identity relationship can also be used to reduce the data storage in a library.
    • 通过利用模拟衍射信号固有的身份关系来评估用于在晶片上形成的结构的光学计量学中的模拟衍射信号库的精度。 每个模拟衍射信号包含用于波长和/或入射角的至少一组四个反射率参数。 选择四个反射率参数之一。 使用身份关系和剩余的三个反射率参数的值确定所选反射率参数的值。 将所选反射率参数的确定值与获得的四个反射率参数组中的值进行比较,以评估和提高库的准确性。 身份关系也可用于减少库中的数据存储。
    • 85. 发明授权
    • Composition employing a novel human kinase
    • 使用新的人类激酶的组合物
    • US07297525B2
    • 2007-11-20
    • US10702496
    • 2003-11-07
    • Wei LiuLeeying WuHuimin Chen
    • Wei LiuLeeying WuHuimin Chen
    • C12N9/12C12N15/54
    • C12N9/1205
    • This invention provides compositions, organisms and methodologies employing a novel human protein kinase, MCRK1. The novel human kinase has sequence homology to rat myotonic dystrophy kinase-related Cdc42 binding kinase (MRCK) alpha. The gene encoding the novel kinase is localized in locus 11q13 of human chromosome 11. The novel protein kinase comprises multiple functional/structural domains that include a kinase domain, a pkinase_C domain, a DAG-PE binding domain, and a CNH domain. The sequence and structure similarity between the novel human protein and rat MRCK alpha indicates that the novel human protein may function as a downstream effector of Cdc42 in cytoskeleton reorganization.
    • 本发明提供了使用新型人蛋白激酶MCRK1的组合物,生物体和方法。 新型人类激酶与大鼠肌强直性营养不良激酶相关的Cdc42结合激酶(MRCK)α具有序列同源性。 编码新型激酶的基因位于人染色体11的位点11q13中。新型蛋白激酶包含多个功能/结构域,其包括激酶结构域,pkinase_C结构域,DAG-PE结合结构域和CNH结构域。 新型人类蛋白质与大鼠MRCKα之间的序列和结构相似性表明新型人类蛋白质可能在细胞骨架重组中起到Cdc42的下游作用。
    • 86. 发明申请
    • Library accuracy enhancement and evaluation
    • 图书馆精确度增强和评估
    • US20070225940A1
    • 2007-09-27
    • US11390798
    • 2006-03-27
    • Shifang LiJunwei BaoWei Liu
    • Shifang LiJunwei BaoWei Liu
    • G06F19/00
    • G01B11/24G03F7/70625
    • The accuracy of a library of simulated-diffraction signals for use in optical metrology of a structure formed on a wafer is evaluated by utilizing an identity relationship inherent to simulated diffraction signals. Each simulated diffraction signal contains at least one set of four reflectivity parameters for a wavelength and/or angle of incidence. One of the four reflectivity parameters is selected. A value for the selected reflectivity parameter is determined using the identity relationship and values of the remaining three reflectivity parameters. The determined value for the selected reflectivity parameter is compared to the value in the obtained set of four reflectivity parameters to evaluate and improve the accuracy of the library. The identity relationship can also be used to reduce the data storage in a library.
    • 通过利用模拟衍射信号固有的身份关系来评估用于在晶片上形成的结构的光学计量学中的模拟衍射信号库的精度。 每个模拟衍射信号包含用于波长和/或入射角的至少一组四个反射率参数。 选择四个反射率参数之一。 使用身份关系和剩余的三个反射率参数的值确定所选反射率参数的值。 将所选反射率参数的确定值与获得的四个反射率参数组中的值进行比较,以评估和提高库的准确性。 身份关系也可用于减少库中的数据存储。