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81. 发明授权

US07217666B2 Reactive ion milling/RIE assisted CMP 失效
标题翻译：反应离子研磨/ RIE辅助CMP
公开(公告)号：US07217666B2
公开(公告)日：2007-05-15
申请号：US10792330
申请日：2004-03-02
申请人： Hung-Chin Guthrie , Ming Jiang , Jerry Lo , Aron Pentek , Yi Zheng
发明人： Hung-Chin Guthrie , Ming Jiang , Jerry Lo , Aron Pentek , Yi Zheng
IPC分类号： H01L21/461
CPC分类号： B24B1/00 , G11B5/00 , G11B5/3116 , G11B5/3163 , H01L21/00 , Y10T29/49032 , Y10T29/49044 , Y10T29/49048
摘要： A method for forming a high aspect ratio magnetic structure in a magnetic write head using a combination of chemical mechanical polishing and reactive ion etching.
摘要翻译：使用化学机械抛光和反应离子蚀刻的组合在磁写头中形成高纵横比磁结构的方法。

82. 发明授权

US08339734B2 Magnetic write head having a wrap around trailing shield with an asymetrical side gap 有权
标题翻译：磁写头具有围绕后屏蔽的不对称侧间隙的缠绕
公开(公告)号：US08339734B2
公开(公告)日：2012-12-25
申请号：US12766764
申请日：2010-04-23
申请人： Aron Pentek , Yi Zheng
发明人： Aron Pentek , Yi Zheng
IPC分类号： G11B5/235 , G11B5/23
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/23 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A magnetic write head having a magnetic write pole with a wrap around magnetic trailing shield. The wrap around magnetic trailing shield is separated by a first non-magnetic side gap at a first side of the write pole and by a second non-magnetic side gap at a second side of the write pole. The first second non-magnetic side gap is larger than the first non-magnetic side gap and is preferably at least twice the thickness of the first non-magnetic side gap. This design provides additional protection adjacent track interference at one side of the write pole and additional protection against magnetic write field loss at the other side of the write pole.
摘要翻译：一种具有磁性写磁极的磁性写头，其具有围绕磁性后屏蔽的环绕。绕磁屏蔽的缠绕由写磁极的第一侧的第一非磁性侧隙和写极的第二侧的第二非磁性侧间隙分开。第一第二非磁性侧间隙大于第一非磁性侧间隙，优选为第一非磁性侧间隙的厚度的至少两倍。该设计提供了额外的保护，在写入极的一侧附近有跟踪干扰，并且在写入极的另一侧具有额外的防磁磁场损耗的保护。

83. 发明申请

US20110233167A1 METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A TAPERED WRITE POLE 有权
标题翻译：用于制造具有尖头写入字符的全部磁性写头的方法
公开(公告)号：US20110233167A1
公开(公告)日：2011-09-29
申请号：US12748182
申请日：2010-03-26
申请人： Aron Pentek , Thomas J.A. Roucoux , Yi Zheng
发明人： Aron Pentek , Thomas J.A. Roucoux , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a tapered leading edge and a tapered trailing edge. The method includes forming a non-magnetic bump player over a surface, forming a mask over the non-magnetic bump layer and performing a first ion milling to form a tapered back edge on the non-magnetic bump layer. A magnetic write pole material is then deposited over the surface and over the non-magnetic bump layer. Then a non-magnetic step structure is formed over the magnetic write pole material and an ion milling is performed to form a taper on the upper surface of the write pole. The write pole lateral dimensions can then be defined, and a non-magnetic bump formed over the tapered portion of the upper surface of the write pole. Another ion milling can then be performed to extend the taper of the surface of the write pole.
摘要翻译：一种用于制造具有带有锥形前缘和锥形后缘的写极的磁写头的方法。所述方法包括在表面上形成非磁性碰撞播放器，在非磁性凸块层上形成掩模，并执行第一离子铣削以在非磁性凸块层上形成锥形后缘。然后将磁性写入磁极材料沉积在表面上并在非磁性凸起层上方。然后在磁性写入磁极材料上形成非磁性阶梯结构，并且执行离子铣削以在写入极的上表面上形成锥形。然后可以限定写入极横向尺寸，并且在写入极的上表面的锥形部分上形成非磁性凸块。然后可以执行另一种离子铣削来延伸写极的表面的锥度。

84. 发明申请

US20100155232A1 METHOD FOR MANUFACTURING A MAGNETIC WRITE HEAD HAVING A WRITE POLE TRAILING EDGE TAPER 审中-公开
标题翻译：制造具有写波纹边缘磁头的磁头写头的方法
公开(公告)号：US20100155232A1
公开(公告)日：2010-06-24
申请号：US12343014
申请日：2008-12-23
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： C23C14/00
CPC分类号： G11B5/3163 , G11B5/1278 , G11B5/3116 , G11B5/315 , H01F41/34
摘要： A method for manufacturing a magnetic write head for perpendicular magnetic data recording, having a write pole with a tapered trailing edge for improved write field at small bit lengths. The trailing edge taper is formed by a deposition process that can be performed after the write pole flare point has already been formed, and especially after a wrap around shield side gap has been formed. This advantageously allows the distance between the write pole flare point and the trailing edge taper to be closely controlled.
摘要翻译：一种用于制造用于垂直磁数据记录的磁写头的方法，具有带有锥形后缘的写极，以便以较小的位长改善写入场。后缘锥形是通过可以在已经形成写入磁极扩张点之后进行的沉积工艺形成的，特别是在形成了围绕屏蔽侧间隙之后。这有利地允许密切控制写磁极扩张点和后缘锥度之间的距离。

85. 发明授权

US07712206B2 Method for manufacturing a magnetic write head having a trailing shield with an accurately controlled trailing shield gap thickness 有权
标题翻译：一种制造具有后挡板的磁写头的方法，其具有精确控制的后屏蔽间隙厚度
公开(公告)号：US07712206B2
公开(公告)日：2010-05-11
申请号：US11439297
申请日：2006-05-22
申请人： Ming Jiang , Aron Pentek , Yi Zheng
发明人： Ming Jiang , Aron Pentek , Yi Zheng
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/3143 , G11B5/112 , G11B5/1278 , G11B5/3163 , Y10T29/49021 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head for use in perpendicular magnetic recording, the write head having a write pole with a trailing shield. After forming a magnetic write pole such as by masking and ion milling a magnetic write pole layer, a thin layer of alumina is deposited. This is followed by the deposition of a thin layer of Rh. Then, a thick layer of alumina is deposited, having a thickness that is preferably at least equal to the height of the write pole layer. A chemical mechanical polish is then performed until a portion of the Rh layer over the top (trailing edge) of the write pole is exposed. A material removal process such as ion milling is then performed to remove the exposed Rh layer exposing the thin alumina layer there beneath. Since the Rh trailing gap layer is electrically conductive it can also serve as a seed layer for electroplating the magnetic trailing shield.
摘要翻译：一种用于构造用于垂直磁记录的磁写头的方法，该写头具有带后挡板的写极。在通过掩蔽和离子铣削磁性写入磁极层形成磁性写入磁极之后，沉积薄层的氧化铝。随后沉积一层薄薄的Rh。然后，沉积厚的氧化铝层，其厚度优选至少等于写入极层的高度。然后执行化学机械抛光，直到暴露在写柱的顶部（后缘）上的Rh层的一部分。然后进行诸如离子研磨的材料去除工艺以除去暴露在其下面的薄氧化铝层的暴露的Rh层。由于Rh拖尾间隙层是导电的，所以它也可以用作用于电镀磁性后屏蔽的种子层。

86. 发明申请

US20090152234A1 PROCESS FOR SELF-ALIGNED FLARE POINT AND SHIELD THROAT DEFINITION PRIOR TO MAIN POLE PATTERNING 有权
标题翻译：自动对准点的过程和主要绘图前的屏蔽定义
公开(公告)号：US20090152234A1
公开(公告)日：2009-06-18
申请号：US11956277
申请日：2007-12-13
申请人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Hung-Chin Guthrie , Ming Jiang , Edward Hin Pong Lee , Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： B44C1/22
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3146 , G11B5/315
摘要： A method for manufacturing a magnetic write head having a write pole with a flared step feature that defines a secondary flare point. The method involves depositing a magnetic write pole material on a substrate and then depositing a magnetic material over the write pole material followed by a non-magnetic material. A first mask is formed having a front edge to define the location of the secondary flare point, and one or more material removal processes are used to remove portions of the magnetic layer and non-magnetic layer that are not protected by this first mask. The first mask is replaced by a second mask that is configured to define a write pole, and an ion milling is performed to define the write pole. Shadowing from the magnetic layer and non-magnetic layer form a flared secondary flare point.
摘要翻译：一种用于制造具有定义二次闪光点的具有扩口步骤特征的写极的磁写头的方法。该方法包括将磁性写入极材料沉积在衬底上，然后将磁性材料沉积在写入极材料上，随后是非磁性材料。形成第一掩模，其具有前边缘以限定次级火炬点的位置，并且使用一个或多个材料去除过程来去除未被该第一掩模保护的磁性层和非磁性层的部分。第一个掩模由配置为定义写入极的第二个掩模代替，并且执行离子铣削来定义写入极点。从磁性层和非磁性层的阴影形成扩张的次级耀斑点。

87. 发明申请

US20090139080A1 FENCELESS MAIN POLE DEFINITION FOR ADVANCED PERPENDICULAR MAGNETIC WRITE HEAD 有权
标题翻译：高级磁性写字头的无缝主要定义
公开(公告)号：US20090139080A1
公开(公告)日：2009-06-04
申请号：US12343713
申请日：2008-12-24
申请人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
发明人： Aron Pentek , Sue Siyang Zhang , Yi Zheng
IPC分类号： G11B5/127
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49032 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic write head that avoids the challenges associated with the formation of fence structures during write pole definition. A magnetic write pole material is deposited. A mask structure is deposited over the magnetic write pole material. The mask structure includes a first hard mask, a marker layer, a physically robust, inorganic RIEable image transfer layer, a second hard mask structure over the image transfer layer and a photoresist layer over the second hard mask. A reactive ion etching process can be used to transfer the image of the photoresist mask and second hard mask layer onto the image transfer layer. An ion milling is performed to define the write pole. A layer of non-magnetic material such as alumina is deposited. An ion milling is performed until the marker layer has been reached, and another reactive ion etching is performed to remove the remaining hard mask.
摘要翻译：一种用于制造写磁头的磁头的方法，其避免了写磁极定义期间与栅栏结构的形成有关的挑战。沉积磁性写入极材料。掩模结构沉积在磁性写入极材料上。掩模结构包括第一硬掩模，标记层，物理上坚固的无机RIEable图像转印层，图像转印层上方的第二硬掩模结构和在第二硬掩模上的光致抗蚀剂层。可以使用反应离子蚀刻工艺将光致抗蚀剂掩模和第二硬掩模层的图像转印到图像转印层上。执行离子铣削以限定写入极。沉积一层非磁性材料如氧化铝。进行离子研磨直到达到标记层，并执行另一反应离子蚀刻以除去剩余的硬掩模。

88. 发明申请

US20080144215A1 ELECTRICAL LAPPING GUIDE FOR FLARE POINT CONTROL AND TRAILING SHIELD THROAT HEIGHT IN A PERPENDICULAR MAGNETIC WRITE HEAD 有权
标题翻译：用于磁头控制和导航屏蔽的电气导线指南在一个完整的磁性写头
公开(公告)号：US20080144215A1
公开(公告)日：2008-06-19
申请号：US11611824
申请日：2006-12-15
申请人： Wen-Chien David Hsiao , Ming Jiang , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien David Hsiao , Ming Jiang , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/147 , G11B5/23
CPC分类号： G11B5/3169 , G11B5/1278 , G11B5/3163 , G11B5/3166 , G11B5/3173 , G11B5/6005 , Y10T29/49021 , Y10T29/49039 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for constructing a magnetic write head using an electrical lapping guide to carefully control critical dimensions dining a lapping operation used to define an air bearing surface. The lapping guide is photolithographically patterned in a common photolithographic step with another write head structure so that special relation between the lapping guide and critical dimensions of the write head structure can be carefully maintained. For example, the electrical lapping guide can be patterned in a common photolithographic step as the write pole so that the location of the flare point can he carefully controlled with respect to the location of the lapping guide. A stitched flare structure can also be built together with the electrical lapping guide, then a self-aligned shield can be further built over this stitched flare structure so that both flare point and shield throat can be controlled tightly together by this electrical lapping guide during lapping process. Similarly, the lapping guide can be formed in a common photolithographic step with a trailing shield, so that a critical dimension such as throat height of the trailing shield can be carefully controlled with respect to the electrical lapping guide.
摘要翻译：一种使用电研磨导向器构造磁性写入头的方法，以仔细控制关键尺寸，以用于界定空气轴承表面的研磨操作。研磨导向器在具有另一写头结构的普通光刻步骤中光刻图案化，使得研磨引导件与写入头结构的关键尺寸之间的特殊关系可以被小心地保持。例如，电研磨引导件可以以普通的光刻步骤图案化为写入极，使得可以相对于研磨导轨的位置仔细地控制闪光点的位置。缝合的火炬结构也可以与电研磨导轨一起构建，然后可以在该缝合的火炬结构上进一步构建自对准的屏蔽，使得在研磨过程中这种电研磨引导件可以将喇叭口和屏蔽喉两者紧密地一起控制处理。类似地，研磨引导件可以在具有后挡板的普通光刻步骤中形成，使得可以相对于电研磨导轨小心地控制关键尺寸，例如后挡板的喉部高度。

89. 发明申请

US20070211384A1 PERPENDICULAR MAGNETIC WRITE HEAD HAVING A CONFORMAL, WRAP-AROUND, TRAILING MAGNETIC SHIELD FOR REDUCED ADJACENT TRACK INTERFERENCE 有权
标题翻译：具有一致性，缠绕，跟踪磁屏蔽的平滑磁头，用于减少相邻的跟踪干扰
公开(公告)号：US20070211384A1
公开(公告)日：2007-09-13
申请号：US11744054
申请日：2007-05-03
申请人： Wen-Chien Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
发明人： Wen-Chien Hsiao , Yimin Hsu , Vladimir Nikitin , Aron Pentek , Yi Zheng
IPC分类号： G11B5/147
CPC分类号： G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , G11B5/3163
摘要： A perpendicular magnetic write head having a conformal wrap around trailing shield. The write head includes a write pole that can be configured with a trapezoidal shape as viewed from the Air Bearing Surface (ABS) and which includes a wrap around trailing magnetic shield. The magnetic shield has a trailing portion that is separated from the leading edge of the writ pole by a non-magnetic trailing gap, and has side shield portions that are separated from first and second side portions of the write pole by first and second non-magnetic side gaps. The magnetic shield can be configured with notches at either side of the trailing portion of magnetic shield. These notches can extend in the trailing direction by a distance that is preferably ¼ to 1 times the trailing gap thickness. The width of the straight, trailing portion of the shield is preferable ½ to 1 times of the main pole width.
摘要翻译：垂直磁性写头，其具有围绕后屏蔽的保形包裹。写入头包括写入极，其可以被配置为从空气轴承表面（ABS）观察到的梯形形状，并且包括围绕尾部磁屏蔽的包裹。磁屏蔽具有通过非磁性拖尾间隙与写极的前缘分离的后部，并且具有通过第一和第二非隔离部分与写入极的第一和第二侧部分离的侧面屏蔽部分，磁侧隙。磁屏蔽可以在磁屏蔽的尾部的任一侧配置有凹口。这些凹口可以在拖尾方向上延伸一段距离，优选为后缘间隙厚度的1/4至1倍。屏蔽的直的后部的宽度优选为主极宽度的1/2至1倍。

90. 发明申请

US20070115584A1 Write head design and method for reducing adjacent track interference in at very narrow track widths 有权
标题翻译：用于在非常窄的轨道宽度上减少相邻轨道干扰的写头设计和方法
公开(公告)号：US20070115584A1
公开(公告)日：2007-05-24
申请号：US11286077
申请日：2005-11-23
申请人： Hamid Balamane , Yimin Hsu , Aron Pentek , Yi Zheng
发明人： Hamid Balamane , Yimin Hsu , Aron Pentek , Yi Zheng
IPC分类号： G11B5/147
CPC分类号： G11B5/3163 , G11B5/112 , G11B5/1278 , G11B5/3116 , G11B5/3146 , G11B5/315 , Y10T29/49021
摘要： A perpendicular write head having a wrap around trailing shield for reducing stray field writing and adjacent track interference. A method for constructing such a write head allows for excellent control of side shield gap thickness and trailing shield gap thickness, and allows the ratio of side gap to trailing gap thicknesses to be maintained at about two to one as desired. The method includes depositing forming a write pole by constructing a mask which may include a bi-layer hard mask, and then ion milling to form the write pole. Once the write pole has been formed, a layer of alumina or some other non-magnetic material can be conformally deposited. A reactive ion mill (RIM) can be performed to open up the top of the write pole (remove the horizontally disposed portions of the alumina layer). Then, a second layer of alumina or some other non-magnetic material can be deposited, and the write pole can be plated. The thickness of the side shield gaps is defined by the sum of the final thicknesses of the first and second alumina layers, while the thickness of the first magnetic layer defines the thickness of the trailing shield gap.
摘要翻译：垂直写头，其具有围绕后屏蔽的卷绕，用于减少杂散场写入和相邻轨道干涉。用于构造这样的写头的方法允许对侧屏蔽间隙厚度和后屏蔽间隙厚度的优良控制，并且允许侧间隙与后间隙厚度的比率根据需要保持在大约二对一。该方法包括通过构成可包括双层硬掩模的掩模沉积形成写入极，然后进行离子铣削以形成写入极。一旦形成了写极，就可以共形沉积一层氧化铝或其它非磁性材料。可以执行反应离子磨（RIM）以打开写柱的顶部（去除氧化铝层的水平放置的部分）。然后，可以沉积第二层氧化铝或一些其它非磁性材料，并且可以对写入极进行电镀。侧屏蔽间隙的厚度由第一和第二氧化铝层的最终厚度之和限定，而第一磁性层的厚度限定了后屏蔽间隙的厚度。

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