会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 82. 发明授权
    • Beam scanner and surface measurement apparatus
    • 光束扫描仪和表面测量仪器
    • US08098382B2
    • 2012-01-17
    • US12613212
    • 2009-11-05
    • Tak Gyum KimBae Kyun Kim
    • Tak Gyum KimBae Kyun Kim
    • G01N21/00
    • G01B11/24G01N21/94G01N21/9501G01N2201/1042G02B26/12
    • Disclosed are a beam scanner and a surface measurement apparatus. The beam scanner includes a spinning mirror having top and bottom reflective surfaces and a plurality of side reflective surfaces between the top and bottom reflective surfaces, and rotating about a rotary shaft penetrating the top and bottom reflective surfaces to scan beams, falling onto the side reflective surface, in one direction, a first light source emitting first beams to the side reflective surface, a second light source emitting second beams to at least one of the top and bottom reflective surfaces, and a detector receiving beams reflected by the spinning mirror, among the second beams. The beam scanner and the surface measurement apparatus can achieve high-speed, high resolution surface measurement since errors caused by the movement of the spinning mirror for beam scanning are minimized.
    • 公开了一种光束扫描器和表面测量装置。 光束扫描器包括具有顶部反射表面和底部反射表面的旋转镜和位于顶部和底部反射表面之间的多个侧面反射表面,并且绕着穿过顶部和底部反射表面的旋转轴旋转以扫描光束, 在一个方向上表面向第一反射表面发射第一光束的第一光源,向第一和第二反射表面中的至少一个发射第二光束的第二光源和接收由该纺镜反射的光束的检测器, 第二个梁。 光束扫描器和表面测量装置可以实现高速,高分辨率的表面测量,因为用于光束扫描的旋转镜的移动引起的误差最小化。