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71. 发明申请

US20060249674A1 Detector system of secondary and backscattered electrons for a scanning electron microscope 有权
标题翻译：用于扫描电子显微镜的二次和反向散射电子的检测器系统
公开(公告)号：US20060249674A1
公开(公告)日：2006-11-09
申请号：US11403823
申请日：2006-04-14
申请人： Witold Slowko
发明人： Witold Slowko
IPC分类号： H01J40/00
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/24475 , H01J2237/2448 , H01J2237/2608
摘要： A system for detecting secondary and backscattered electrons in a scanning electron microscope includes a microporous plate (9) that is disposed between a lower scintillator (5) and an upper scintillator (12). The lower scintillator (5) faces toward a specimen stage (11). A movable diaphragm (14) having an aperture (15) is located between the front end of a photomultiplier (7) and the respective ends of an upper light guide (13) and lower light guide (6). Inside an intermediate chamber (3), at least one focusing electrode (8) is placed, with its hole positioned coaxially with the hole in the microporous plate (9). The focusing electrode (8) is located on the surface of the lower scintillator (5).
摘要翻译：用于在扫描电子显微镜中检测次级和背向散射电子的系统包括设置在下部闪烁体（5）和上部闪烁体（12）之间的微孔板（9）。下部闪烁体（5）面向试样台（11）。具有孔（15）的可移动隔膜（14）位于光电倍增管（7）的前端和上导光体（13）和下导光体（6）的相应端之间。在中间室（3）内，放置至少一个聚焦电极（8），其孔与微孔板（9）中的孔同轴。聚焦电极（8）位于下部闪烁体（5）的表面上。

72. 发明授权

US06775452B2 Phosphor coated waveguide for efficient collection of electron-generated photons 失效
标题翻译：荧光涂层波导，用于有效收集电子生成的光子
公开(公告)号：US06775452B2
公开(公告)日：2004-08-10
申请号：US09861036
申请日：2001-05-18
申请人： Samuel C. Howells
发明人： Samuel C. Howells
IPC分类号： G02B602
CPC分类号： H01J37/244 , G02B6/241 , H01J2237/2443
摘要： A phosphor coated waveguide for efficient collection and detection of back-scattered electrons in an electron beam apparatus such as a scanning electron microscope is disclosed. The waveguide for directing photons to an optical detector generally comprises a first waveguide portion having opposing first and second faces defining a beveled hole therebetween to allow an electron beam to pass therethrough, the beveled hole decreasing in cross-sectional size from the first to the second face. A phosphor coating on the second face around the beveled hole converts the back-scattered electrons to photons. The first waveguide portion may include angled faces at an end further from the optical detector. A surface defined by the beveled hole and/or the angled faces may have a reflective coating. The waveguide may also include a second waveguide portion that adjoins and flares out relative to the first waveguide portion to further increase waveguide efficiency.
摘要翻译：公开了一种用于在诸如扫描电子显微镜的电子束装置中有效收集和检测反向散射电子的磷光体涂层波导。用于将光子引导到光学检测器的波导通常包括第一波导部分，其具有相对的第一和第二面，在其间限定了一个斜面孔，以允许电子束通过，该斜面孔的横截面尺寸从第一到第二面对。在斜面孔周围的第二面上的荧光体涂层将后向散射的电子转换成光子。第一波导部分可以包括在远离光学检测器的一端的成角度的表面。由斜面孔和/或倾斜面限定的表面可以具有反射涂层。波导还可以包括相对于第一波导部分邻接和扩张的第二波导部分，以进一步增加波导效率。

73. 发明申请

US20030154773A1 Scanning atom probe and analysis method utilizing scanning atom probe 有权
标题翻译：扫描原子探针和分析方法利用扫描原子探针
公开(公告)号：US20030154773A1
公开(公告)日：2003-08-21
申请号：US10333318
申请日：2003-01-16
发明人： Osamu Nishikawa
IPC分类号： G01B005/28
CPC分类号： H01J49/40 , H01J37/256 , H01J37/285 , H01J49/06 , H01J2237/2443 , H01J2237/2446 , H01J2237/2818 , Y10S977/852
摘要： In a scanning atom probe (100), a surface topography of a specimen (3) is firstly analyzed by a surface topography analyzing unit (20). In the next place, an extraction electrode (5) is aligned to a desired area to be analyzed of a specimen surface. In case of analyzing electronic state of the area to be analyzed, negative bias voltage is impressed onto the specimen (3) from a direct current high voltage supply (2) and field emitted electrons are detected by a screen (9). In case of analyzing atomic arrangement and composition of the area to be analyzed, positive voltage is impressed onto the specimen (3) from the direct current high voltage supply (2) and a pulse generator (1) and positive ions generated by field evaporation are detected by a position sensitive ion detector (11) or a relfectron type mass analyzer (13).
摘要翻译：在扫描原子探针（100）中，首先通过表面形貌分析单元（20）分析样品（3）的表面形貌。接下来，将取出电极（5）与要分析的试样表面的所需区域对准。在分析要分析的区域的电子状态的情况下，从直流高压电源（2）将负偏压施加到样品（3）上，并且通过屏幕（9）检测场发射的电子。在分析待分析区域的原子排列和组成的情况下，从直流高压电源（2）和脉冲发生器（1）向样品（3）施加正电压，通过场蒸发产生的正离子为通过位置敏感离子检测器（11）或再生型质量分析仪（13）检测。

74. 发明授权

US06194719B1 Methods and apparatus for improving resolution and reducing noise in an image detector for an electron microscope 失效
公开(公告)号：US06194719B1
公开(公告)日：2001-02-27
申请号：US09096925
申请日：1998-06-12
申请人： Paul E. Mooney , John A. Hunt
发明人： Paul E. Mooney , John A. Hunt
IPC分类号： H01J37244
CPC分类号： H01J37/224 , H01J37/244 , H01J2237/2443 , H01J2237/2445
摘要： Methods and apparatus are provided which improve the performance of electron imaging detectors by reducing the total interaction volume of the detector and/or reducing the energy converting volume of the detector. In one embodiment, a method for improving resolution and reducing noise in an imaging electron detector for an electron microscope is provided and includes the step of decelerating the energetic electrons either before the electrons interact with, or as the electrons interact with, the energy converting volume of an imaging electron detector. In other embodiments, the lateral spatial travel of energetic electrons is limited as they traverse the imaging electron detector, or, the extent of electron back scatter from the energetic electrons is limited.

75. 发明授权

US6031230A Reflected electron detector and a scanning electron microscope device using it 失效
标题翻译：反射电子检测器和使用它的扫描电子显微镜装置
公开(公告)号：US6031230A
公开(公告)日：2000-02-29
申请号：US966923
申请日：1997-11-10
申请人： Jiro Toumatsu
发明人： Jiro Toumatsu
IPC分类号： H01J37/244 , H01J37/28 , H01J37/29
CPC分类号： H01J37/228 , H01J37/244 , H01J2237/2443
摘要： In a scanning electron microscope device having the plastic scintillator type reflected electron detector 17 that is installed below the front end surface 14a of the object lens 14 to detect reflected electrons from the specimen, the reflected electron detector 17 has the front end portion 38 of its scintillator 17a formed into the semicircular portion 44 having a radius almost equal to the radius of the front end surface 14a of the object lens 14. At least a part of the edge of the semicircular portion 44 is formed with the notched surface 39 that extends along the extension of the inclined surface 14b of the object lens 14. This increases the viewing angle of the optical microscope, which is used to locate the position of the specimen being observed, and also increases the solid angle of the detection plane of the detector with respect to the specimen. The reflected electron detector thus can arrest reflected electrons from the specimen efficiently.
摘要翻译：在具有塑料闪烁体型反射电子检测器17的扫描电子显微镜装置中，反射电子检测器17的前端部38位于物镜14的前端面14a的下方，检测来自检体的反射电子，形成半圆形部分44的闪烁体17a的半径几乎等于物镜14的前端表面14a的半径。半圆形部分44的边缘的至少一部分形成有沿着延伸的切口表面39 物镜14的倾斜表面14b的延伸。这增加了用于定位被观察的样本的位置的光学显微镜的视角，并且还增加了检测器的检测平面的立体角尊重标本。因此，反射的电子检测器可以有效地阻止来自标本的反射电子。

76. 发明授权

US5635720A Resolution-enhancement device for an optically-coupled image sensor for an electron microscope 失效
标题翻译：用于电子显微镜的光耦合图像传感器的分辨率增强装置
公开(公告)号：US5635720A
公开(公告)日：1997-06-03
申请号：US539017
申请日：1995-10-03
申请人： Paul E. Mooney , Ondrej L. Krivanek
发明人： Paul E. Mooney , Ondrej L. Krivanek
IPC分类号： H01J29/89 , H01J37/22 , H01J37/244
CPC分类号： H01J37/224 , H01J29/892 , H01J2237/2443 , H01J2237/2445
摘要： An apparatus designed to be positioned in the projection chamber of an electron microscope to detect electron images and/or diffraction patterns from a sample and convert those electron images into light images is provided. The apparatus transfers light images to an imaging sensor for recording while enhancing resolution of the light images by absorbing substantially all laterally scattered light before it reaches the imaging sensor.
摘要翻译：一种被设计为位于电子显微镜的投影室中以检测来自样品的电子图像和/或衍射图案并将这些电子图像转换成光图像的装置。该装置将光图像传送到用于记录的成像传感器，同时通过在到达成像传感器之前基本上吸收所有横向散射的光，同时增强光图像的分辨率。

77. 发明授权

US5447614A Method of processing a sample using a charged beam and reactive gases and system employing the same 失效
标题翻译：使用带电束和反应性气体处理样品的方法及采用该方法的系统
公开(公告)号：US5447614A
公开(公告)日：1995-09-05
申请号：US260907
申请日：1994-06-15
申请人： Yuuichi Hamamura , Satoshi Haraichi , Akira Shimase , Junzou Azuma , Fumikazu Itoh , Toshio Yamada , Yasuhiro Koizumi , Michinobu Mizumura
发明人： Yuuichi Hamamura , Satoshi Haraichi , Akira Shimase , Junzou Azuma , Fumikazu Itoh , Toshio Yamada , Yasuhiro Koizumi , Michinobu Mizumura
IPC分类号： H01J37/244 , H01J37/317 , C23C14/46 , B23K15/00
CPC分类号： H01J37/317 , H01J37/244 , H01J37/3056 , H01J2237/006 , H01J2237/2443 , H01J2237/24435 , H01J2237/304 , H01J2237/31744
摘要： A method of processing a sample using a charged beam and reactive gases and a system employing the same, the method and system being able to perform the reactive etching and the beam assisted deposition using a charged particle detector free from the degradation of the performance due to the reactive gas. The system is designed in such a way that a shutter mechanism is provided in the form of the charged particle detector, and a chamber for accommodating the charged particle detector can be evacuated. In the observation of the sample, the charged particle detector is turned on to open the shutter mechanism, and in the processing of the sample, the charged particle detector is turned off or left as it is to shut the shutter mechanism to evacuate the inside of the charged particle detector.
摘要翻译：使用带电束和反应性气体处理样品的方法以及使用其的系统的方法和方法，所述方法和系统能够执行反应性蚀刻和使用带电粒子检测器进行的束辅助沉积，其不会由于反应气体。该系统设计成使得以带电粒子检测器的形式提供快门机构，并且可以抽出用于容纳带电粒子检测器的室。在样品的观察中，带电粒子检测器被打开以打开快门机构，并且在样品的处理中，带电粒子检测器被关闭或离开以关闭快门机构以将内部带电粒子检测器。

78. 发明授权

US5061856A Corpuscular beam device 失效
标题翻译：球形束装置
公开(公告)号：US5061856A
公开(公告)日：1991-10-29
申请号：US612507
申请日：1990-11-14
申请人： Jurgen Frosien , Rainer Spehr
发明人： Jurgen Frosien , Rainer Spehr
IPC分类号： G01Q30/02 , G01Q90/00 , H01J37/12 , H01J37/244 , H01J37/252
CPC分类号： H01J37/12 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01J2237/24475 , H01J2237/2449 , H01J2237/24507
摘要： The invention relates to a corpuscular beam device, such as an ion beam dce or an electron beam device, in which a primary corpuscular beam is focussed by means of an objective lens onto a sample. The secondary radiation emitted at the point of impact of the primary beam is accelerated onto the central electrode of the objective lens, this electrode being coated with scintillation material, and there produces light pulses which are converted by a light-sensitive detector into electrical signals and amplified.
摘要翻译：本发明涉及一种红细胞束装置，例如离子束装置或电子束装置，其中初级红细胞束通过物镜聚焦到样品上。在主光束的撞击点处发射的次级辐射被加速到物镜的中心电极上，该电极被闪烁材料涂覆，并且产生由光敏检测器转换成电信号的光脉冲，放大

79. 发明授权

US4818874A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US4818874A
公开(公告)日：1989-04-04
申请号：US181201
申请日：1988-04-13
申请人： Toyoji Ishikawa
发明人： Toyoji Ishikawa
IPC分类号： H01J37/244 , H01J37/28 , H01J37/256
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/2443 , H01J2237/2445 , H01J2237/2448 , H01J2237/24507
摘要： There is disclosed an electron microscope comprising a stage assembly for tilting, translating, or rotating the specimen, a first and a second detector disposed on opposite sides of the optical axis of the beam to detect secondary electrons produced in response to the incidence of the beam. The first detector is disposed relatively close to the optical axis. The second detector is located relatively remotely from the optical axis to prevent the state assembly from colliding against the detector when the assembly is tilted. The gains of the amplifiers to which the outputs of the first and second detectors are applied are made different to compensate for the imbalance between the intensities of the output signals from the detectors.
摘要翻译：公开了一种电子显微镜，其包括用于倾斜，平移或旋转试样的载物台组件，设置在所述束的光轴的相对侧上的第一和第二检测器，以检测响应于束的入射而产生的二次电子。第一检测器相对靠近光轴设置。第二检测器位于相对远离光轴的位置，以防止当组件倾斜时状态组件与检测器碰撞。使得施加第一和第二检测器的输出的放大器的增益不同，以补偿来自检测器的输出信号的强度之间的不平衡。

80. 发明授权

US4743757A Secondary electron emission control in electron microscopes 失效
标题翻译：电子显微镜中的二次电子发射控制
公开(公告)号：US4743757A
公开(公告)日：1988-05-10
申请号：US924806
申请日：1986-10-30
申请人： Vincent J. Coates
发明人： Vincent J. Coates
IPC分类号： H01J37/244 , H01J37/04
CPC分类号： H01J37/244 , H01J2237/2443 , H01J2237/2448 , H01J2237/2449 , H01J2237/24507
摘要： In a scanning electron microscope, a co-planar, split grid is interposed between an electron bombarded specimen and scintillator. A first positive potential is applied to one element of the split grid and a positive potential, variable with respect to the first potential, is applied to the other grid element for selectively controlling the collection of secondary emission electrons to thereby eliminate uneven secondary electron distribution that may result from various topographical features of the specimen.
摘要翻译：在扫描电子显微镜中，在电子轰击的样品和闪烁体之间插入共面的分割格栅。第一正电位被施加到分割栅格的一个元件，并且相对于第一电位可变的正电位被施加到另一个栅极元件，用于选择性地控制二次发射电子的集合，从而消除不均匀的二次电子分布，可能来自样本的各种形貌特征。

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