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71. 发明申请

US20020041421A1 Microactuator for optical switching and method for fabricating the same 有权
公开(公告)号：US20020041421A1
公开(公告)日：2002-04-11
申请号：US09842648
申请日：2001-04-27
发明人： Yong-seop Yoon
IPC分类号： G02B026/08
CPC分类号： G02B6/357 , G02B6/3512 , G02B6/3546 , G02B6/358 , G02B6/3584
摘要： A microactuator includes a wafer; a lower electrode formed on an upper surface of the wafer; a side electrode formed on the upper surface of the wafer in a perpendicular relation with the lower electrode; a pair of supporting posts protruding from the upper surface of the wafer, spaced from the lower electrode at a predetermined distance, respectively; a reflector spaced from the side electrode at a predetermined distance, and facing the lower electrode; and a pair of torsion springs disposed between the reflector and the supporting posts, and elastically supporting the reflector enabling pivoting movement of the reflector. By employing the side electrode, the microactuator can be driven with a low voltage. Also, since the side electrode serves as a stopper, the microactuator can pivot the reflector at an exact desired angle, without having to use a separate device.

72. 发明授权

US06360036B1 MEMS optical switch and method of manufacture 失效
标题翻译： MEMS光开关及其制造方法
公开(公告)号：US06360036B1
公开(公告)日：2002-03-19
申请号：US09483669
申请日：2000-01-14
申请人： James G. Couillard
发明人： James G. Couillard
IPC分类号： G02B635
CPC分类号： G02B6/3596 , G02B6/3518 , G02B6/3546 , G02B6/3566 , G02B6/357 , G02B6/358 , G02B6/3584 , H01H2001/0047
摘要： An optical switch on a planar optical circuit substrate includes a cantilevered arm having a control element selectively movable in a direction into the plane of the substrate into a waveguide slot of the substrate for switching optical signals carried by the waveguide. The arm can be actuated by thermal or piezoelectric actuators to deflect between a rest position allowing signal information from a waveguide to continue along the waveguide and a second position with the control element of the cantilevered arm extending into the slot for selectively blocking or changing the direction of the incoming signal. In an alternative embodiment of the invention, a second arm is provided which moves laterally and can be selectively actuated in sequence with the first cantilevered arm for overlying and latching the switching arm in the second or light controlling position, such that the MEMS switch can remain in an active state without further application of a control signal thereto. Arrays of MEMS switches are formed on a single wafer by selective etching and are bonded to arrays of optical waveguides to provide multiple switch modules.
摘要翻译：平面光电路基板上的光开关包括悬臂，所述悬臂具有可选择地沿着基板平面的方向移动到基板的波导槽中的控制元件，用于切换由波导承载的光信号。臂可以由热或压电致动器致动，以在静止位置之间偏转，允许来自波导的信号信息沿着波导继续，并且第二位置与悬臂的控制元件延伸到槽中以选择性地阻挡或改变方向的输入信号。在本发明的替代实施例中，提供了第二臂，其横向移动并且可以依次用第一悬臂臂选择性地致动，以在第二或光控制位置上覆盖和锁定开关臂，使得MEMS开关可以保持处于活动状态，而不进一步施加控制信号。 MEMS开关的阵列通过选择性蚀刻形成在单个晶片上，并且被结合到光波导阵列以提供多个开关模块。

73. 发明申请

US20020018613A1 Rolling shutter optical switch device with latch electrode and slits in shutter 失效
标题翻译：具有闩锁电极的卷帘快门光开关装置和快门中的狭缝
公开(公告)号：US20020018613A1
公开(公告)日：2002-02-14
申请号：US09799923
申请日：2001-03-05
发明人： Carl O. Bozler , Steven Rabe
IPC分类号： G02B006/35
CPC分类号： B81B3/0072 , B81B3/0008 , B81B2201/045 , G02B6/3518 , G02B6/3546 , G02B6/3564 , G02B6/357 , G02B6/358 , G02B6/3584 , G02B26/02 , G02B26/0816
摘要： An optical switch device includes a rolling shutter or membrane attached at one of its edges to a substrate near an optical port in the substrate. The rolling shutter can assume one of two states. In a first closed state, the membrane is uncoiled onto the substrate over the port such that light directed at the port impinges on the shutter. In a second open state, the membrane is rolled up away from the port such that light directed at the port impinges on the port. In one embodiment, a mirror is formed on the membrane such that when the membrane is in the closed state over the substrate, light directed at the port is reflected by the mirror. In one configuration, the optical port includes a hole or aperture such light passed through the port without interference. The device can include a latch electrode the far end of the membrane such that when it is rolled out, it can be held in position by a latching voltage applied across the latch electrode and the substrate. Slits can be formed in the membrane to keep the mirror flat by relieving strain in the membrane and to allow gases in proximity to the device to pass through the membrane as it is activated. The shutter can include dimples to minimize the area of contact between the membrane and the substrate to reduce the probability of the two sticking together. The attachment edge of the membrane can be made shorter than its width to reduce distortions in the membrane to keep the mirror flat. A raised annular rim can be provided around the port such that when the shutter is held down over the port it is pulled taut and flat over the rim. This feature is also used to maintain flatness in the mirror. The switch device can be used as part of an array of optical switches.
摘要翻译：一种光学开关装置包括将其一个边缘附接到衬底附近的光学端口的基板的卷帘门或薄膜。滚动快门可以采取两种状态之一。在第一关闭状态下，膜在端口上展开到基板上，使得指向端口的光照射在快门上。在第二打开状态下，膜从端口卷起，使得指向端口的光照射在端口上。在一个实施例中，在膜上形成反射镜，使得当膜在衬底上处于关闭状态时，指向端口的光被反射镜反射。在一个配置中，光学端口包括孔或孔，这样的光通过端口而不受干扰。该装置可以包括位于膜的远端的闩锁电极，使得当其被推出时，其可以通过施加在闩锁电极和基板上的锁存电压而保持就位。可以在膜中形成狭缝，以通过减轻膜中的应变来保持反射镜平坦，并允许邻近装置的气体在被激活时通过膜。快门可以包括凹坑以最小化膜和基底之间的接触面积，以减少两者粘在一起的可能性。膜的附着边缘可以比其宽度短，以减少膜中的变形，以保持镜子平坦。可以围绕端口设置凸起的环形边缘，使得当快门被按压在端口上时，其被拉紧并在边缘上平坦。此功能也用于保持镜子的平整度。开关器件可用作光开关阵列的一部分。

74. 发明申请

US20010030818A1 Optical router including bistable optical switch and method thereof 审中-公开
标题翻译：包括双稳态光开关的光路由器及其方法
公开(公告)号：US20010030818A1
公开(公告)日：2001-10-18
申请号：US09752831
申请日：2001-01-03
发明人： Rodney L. Clark , Jay A. Hammer , John R. Karpinsky
IPC分类号： G02B005/08 , G02B007/182
CPC分类号： G02B6/358 , G02B6/3512 , G02B6/3524 , G02B6/3528 , G02B6/3546 , G02B6/355 , G02B6/357 , G02B6/3584
摘要： A bistable optical micro-switch controls the routing of an optical beam. The micro-switch has at least one optical micro-element, which is stable through electrical power interrupts, for directing the optical beam. A change in the state of the optical micro-element is effected by a vertical micro-actuator, which is biased by a micro-spring. A micro-latch can be used to keep the tensed micro-spring from un-tensing when electrical power is interrupted. A micro-latch holds the micro-element in at least one mechanically tensed, stable state.
摘要翻译：双稳态光学微型开关控制光束的布线。微型开关具有至少一个通过电力中断稳定的光学微元件，用于引导光束。光学微元件的状态的变化由垂直的微型致动器实现，微型致动器被微型弹簧偏置。当电力中断时，可以使用微型闩锁来保持张紧的微型弹簧不受拉紧。微型闩锁将微元件保持在至少一个机械张紧的稳定状态。

75. 发明授权

US06243507B1 Connection-verification in optical MEMS crossconnects via mirror-dither 有权
标题翻译：通过镜像抖动在光学MEMS交叉连接中进行连接验证
公开(公告)号：US06243507B1
公开(公告)日：2001-06-05
申请号：US09472682
申请日：1999-12-27
申请人： Evan Lee Goldstein , Lih-Yuan Lin , Leda Maria Lunardi
发明人： Evan Lee Goldstein , Lih-Yuan Lin , Leda Maria Lunardi
IPC分类号： G02B612
CPC分类号： G02B6/3588 , G02B6/3512 , G02B6/3518 , G02B6/3546 , G02B6/357 , G02B6/358 , G02B6/4204 , G02B26/0833
摘要： Integrated connection-verification system for use in a micro-electro-mechanical system (MEMS) crossconnect device. The system uses application of a dithering signal such as a sinusoidal bias to an electrode plate associated with a micro-mirror switching element to dither the micro-mirror. The optical signal from the dithering micro-mirror is fed through a beam splitter, a portion of the optical signal thus being directed to a photodetector. If intensity modulation in the optical signal corresponding to the frequency of the dithering signal is detected by the photodetector associated with the micro-mirror, the connection path between the desired input and output ports is verified.
摘要翻译：用于微机电系统（MEMS）交叉连接装置的集成连接验证系统。该系统使用诸如正弦偏压的抖动信号施加到与微镜开关元件相关联的电极板来抖动微反射镜。来自抖动微镜的光信号通过分束器馈送，因此光信号的一部分被引导到光电检测器。如果由与微镜相关联的光电检测器检测到与抖动信号的频率相对应的光信号中的强度调制，则验证所需输入和输出端口之间的连接路径。

76. 发明授权

US5998906A Electrostatic microactuator and method for use thereof 有权
标题翻译：静电微致动器及其使用方法
公开(公告)号：US5998906A
公开(公告)日：1999-12-07
申请号：US135158
申请日：1998-08-17
申请人： John H. Jerman , John D. Grade , Joseph D. Drake
发明人： John H. Jerman , John D. Grade , Joseph D. Drake
IPC分类号： G02B6/35 , G02B6/42 , G02B26/08 , G11B7/135 , H02N1/00
CPC分类号： G02B6/357 , G02B26/0833 , G02B26/0841 , G02B6/4216 , G11B7/1384 , H02N1/008 , G02B6/3518 , G02B6/3548 , G02B6/358 , G02B6/3584
摘要： An electrostatic microactuator comprising a substrate and at least one comb drive assembly having first and second comb drive members. Each of the first and second comb drive members is provided with comb drive fingers. The first comb drive member is mounted on the substrate. The at least one comb drive assembly is disposed between the first and second spaced-apart, beam-like spring members. The second comb drive member overlies the substrate. Each of the first and second beam-like members have a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate. The second comb drive member is movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.
摘要翻译：一种静电微致动器，其包括基板和至少一个具有第一和第二梳状驱动构件的梳状驱动组件。第一和第二梳状驱动构件中的每一个设置有梳齿驱动指。第一梳状驱动构件安装在基底上。至少一个梳子驱动组件设置在第一和第二间隔开的梁状弹簧构件之间。第二梳状驱动构件覆盖在基底上。第一和第二梁状构件中的每一个具有固定到基板的第一端部和固定到第二梳状驱动构件的第二端部，用于将第二梳状驱动构件悬挂在基板上。第二梳状驱动构件可以在第一和第二梳状驱动构件的梳状驱动指状物间隔开的第一位置和第一和第二梳状驱动构件的梳状驱动指状物交叉的第二位置之间移动。

77. 发明授权

US5796888A Optical switch apparatus 失效
标题翻译：光开关装置
公开(公告)号：US5796888A
公开(公告)日：1998-08-18
申请号：US718712
申请日：1996-09-24
申请人： Tohru Furukawa , Yoshikazu Nomura , Hiroshi Furukawa , Naoki Nakao , Nobuo Tomita
发明人： Tohru Furukawa , Yoshikazu Nomura , Hiroshi Furukawa , Naoki Nakao , Nobuo Tomita
IPC分类号： G02B6/38 , G02B6/35 , G02B6/36 , G02B26/08
CPC分类号： G02B6/3508 , G02B6/3548 , G02B6/358 , G02B6/3636 , G02B6/3652
摘要： According to the present invention, an optical switch apparatus is provided for switching the connections between a plurality of fixed optical fibers which are fixed and arranged on an optical fiber support base within a container filled with an index-of-refraction matching agent, and movable optical fibers provided on a movable base which is moved by a moving mechanism comprising a worm gear within the aforementioned container. In addition, a worm gear driving member and a cam driving member of a matching device are both provided on the exterior of the aforementioned container via a seal. This worm gear driving member which is connected to a control device, starts the positioning sequence and moves the movable base to a standby position following return of the movable base to a predetermined origin within the container. As a result, it is possible to prevent contamination of the index-of-refraction matching agent over a long period of time, and thereby reduce the connection loss to a satisfactory level. In addition, since the driving precision of the movable base is also improved, it is possible to achieve superior effects such as reduction of the array pitch of the fixed optical fibers, improvement of the precision and increase in the multiplicity of the optical switch apparatus.
摘要翻译：根据本发明，提供一种光开关装置，用于切换多个固定光纤之间的连接，固定光纤被固定并布置在填充有折射率匹配剂的容器内的光纤支撑基座上，并且可移动设置在由上述容器内的由蜗轮构成的移动机构移动的可动基座上的光纤。此外，蜗杆传动构件和匹配装置的凸轮驱动构件均经由密封件设置在上述容器的外部。连接到控制装置的该蜗轮传动构件开始定位顺序，并且在可移动底座返回到容器内的预定原点之前将可动基座移动到待机位置。结果，可以防止长时间的折射率匹配剂的污染，从而将连接损失降低到令人满意的水平。此外，由于可移动基座的驱动精度也提高，所以可以实现降低固定光纤的阵列间距，提高精度和提高光开关装置的多重性等优异的效果。

78. 发明授权

US5594820A Opto-mechanical device having optical element movable by twin flexures 失效
标题翻译：光学机械装置具有通过双弯曲可移动的光学元件
公开(公告)号：US5594820A
公开(公告)日：1997-01-14
申请号：US385477
申请日：1995-02-08
申请人： Philip M. Garel-Jones , Murray R. Harman , Timothy P. Cutts
发明人： Philip M. Garel-Jones , Murray R. Harman , Timothy P. Cutts
IPC分类号： G02B6/35 , G02B6/38 , G02B6/26 , G02B6/42
CPC分类号： G02B6/352 , G02B6/355 , G02B6/358
摘要： An opto-mechanical switch suitable for use in optical telecommunications systems comprises an input port and two output ports interconnected by an optical path, an optical element and an actuation mechanism for moving the optical element relative to the optical path so as to change coupling of light beams between the input port and the output ports. The optical element is supported by a flexible suspension unit comprising a pair of mutually-spaced twin elongate flexures. Each of the pair of flexures is attached at one end to an anchorage and at its other end to a mounting for optical element. The flexures are identical in length and flexibility and are spaced apart in the direction of displacement of the optical element. In use, when the actuator displaces the optical element, the flexures flex in common in the direction of displacement of the optical element. The optical element may be an optical fiber, a mirror, a prism, and so on. The twin flexures obviate the need for precision sliding surfaces which assures greater dependability, especially in switches which are used very infrequently, such as routing switches for re-routing traffic around a failed local station in a ring architecture system.
摘要翻译：适用于光通信系统的光机械开关包括通过光路互连的输入端口和两个输出端口，光学元件和用于相对于光路移动光学元件的致动机构，以便改变光的耦合输入端口和输出端口之间的光束。光学元件由包括一对相互间隔开的双伸长弯曲物的柔性悬挂单元支撑。一对弯曲部中的每一个在一端附接到锚固件，并且在另一端附接到用于光学元件的安装件。弯曲部的长度和柔性相同，并且在光学元件的位移方向上间隔开。在使用中，当致动器移动光学元件时，挠曲件在光学元件的位移方向上共同弯曲。光学元件可以是光纤，反射镜，棱镜等。双重弯曲消除了对精确滑动表面的需求，确保更高的可靠性，特别是在非常频繁使用的开关中，例如用于在环形架构系统中绕故障本地站重新路由流量的路由交换机。

79. 发明授权

US5345521A Architecture for optical switch 失效
标题翻译：光开关架构
公开(公告)号：US5345521A
公开(公告)日：1994-09-06
申请号：US90862
申请日：1993-07-12
申请人： T. Gus McDonald , R. Mark Boysel
发明人： T. Gus McDonald , R. Mark Boysel
IPC分类号： G02B6/26 , G02B6/35 , G02B26/08 , H04Q3/52
CPC分类号： G02B6/3564 , G02B26/0841 , G02B6/3512 , G02B6/3556 , G02B6/358 , G02B6/3582 , G02B6/3584
摘要： An optical switching device with switch elements (224) similar to digital micromirror devices (DMD). The switching element (224) resides in a trench (216) between two elevated areas on the substrate (214a, 214b). Sending and receiving fibers (218a, 218b) face each other across the trench (216) with the switch element (224) between them. When the switch is ON, light travels through lenses (220a, 220b) in the trench (216) from one fiber (218b) to the other (218a). When the switch is flipped OFF, the element (224) is activated and blocks the light from the sending fiber (218b) by reflecting or absorbing the light from the sending fiber (218b). The switch is activated and possibly deactivated by addressing electrodes (226a, 226b) under the element (224), which deflects through an air gap towards the activated electrode (226b). For better deflection angles the posts can be arranged closer to one end of the element than the other. An alternate hinge architecture is also provided.
摘要翻译：具有类似于数字微镜器件（DMD）的开关元件（224）的光学开关器件。开关元件（224）位于衬底（214a，214b）上的两个升高区域之间的沟槽（216）中。发送和接收光纤（218a，218b）跨越沟槽（216）并与它们之间的开关元件（224）彼此面对。当开关接通时，光从沟槽216中的一个光纤218b到另一个218a通过透镜220a，220b。当开关翻转为OFF时，元件（224）被激活，并通过反射或吸收来自发送光纤（218b）的光来阻挡来自发送光纤（218b）的光。开关被激活并且可能通过寻址元件（224）下的电极（226a，226b）而被激活，该电极通过空气间隙朝向激活的电极（226b）偏转。为了获得更好的偏转角度，柱可以比另一个更靠近元件的一端。还提供了另一种铰链架构。

80. 发明授权

US5268974A Optical switch with piezoelectric bimorph 失效
标题翻译：具有压电双晶片的光开关
公开(公告)号：US5268974A
公开(公告)日：1993-12-07
申请号：US848111
申请日：1992-03-09
申请人： Kazuyasu Hikita , Hiroyuki Iizuka , Yoshiaki Tanaka
发明人： Kazuyasu Hikita , Hiroyuki Iizuka , Yoshiaki Tanaka
IPC分类号： G02B26/02 , G02B6/35 , G02B26/08 , H01L41/09 , G02B6/26
CPC分类号： G02B6/3578 , G02B6/3566 , G02B6/353 , G02B6/3552 , G02B6/358 , G02B6/3598
摘要： An optical switch for use as a shutter for intercepting or passing light signals, such as beam lights, including a piezoelectric actuator attached at one end thereof to a base plate and at its other end to an optical shielding object for intercepting or passing over light beams, a mirror installed on a location close to the place where the piezoelectric actuator is attached to the base plate to reflect passed light beams, and the piezoelectric actuator being coupled to a source of energy. The light signals are intercepted or passed by the movement of the object due to modifications of the piezoelectric actuator, and the passed light signals are reflected by the mirror and detected by an optical detector.
摘要翻译：一种光开关，用作用于遮挡或传递光信号的光闸，例如光束灯，包括一端连接到基板的压电致动器，另一端连接到光屏蔽物体上，用于拦截或通过光束，安装在靠近压电致动器附接到基板的位置以反射通过的光束的反射镜上的反射镜，并且压电致动器耦合到能量源。由于压电致动器的变形，光信号被物体的运动截取或通过，并且通过的光信号被反射镜反射并被光学检测器检测。

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