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    • 72. 发明申请
    • LAMINATE AND LAMINATE PRODUCTION APPARATUS
    • 层压板和层压板生产设备
    • US20100068528A1
    • 2010-03-18
    • US12562308
    • 2009-09-18
    • TOYOAKI HIEDA
    • TOYOAKI HIEDA
    • B32B7/00C23C14/00C23C14/58
    • B32B37/02B32B38/164B32B2037/243B32B2037/246B32B2309/65Y10T428/31504
    • The present invention provides a laminate and a laminate production apparatus capable of preventing dust from attaching to a substrate during transfer of the substrate. The laminate production apparatus includes: an A zone including a feeding and taking-up device which feeds a long-length substrate and takes up a laminate in which an underlying layer and a thin film are formed over the long-length substrate, and a coating device which applies a coating liquid onto the substrate to form a coated film; a B zone including a drying device which heat-treats the coated film; and a C zone including a vacuum film forming device which forms the thin film on the underlying layer, and a taking-up and feeding device which takes up and feeds the substrate on which surface the underlying layer is formed.
    • 本发明提供一种能够防止灰尘附着在基板上的层叠体和层叠体制造装置。 层压制造装置包括:A区,包括供给和卷取装置,其供给长长基材,并且在长长度基材上形成其中形成下层和薄膜的层压体;以及涂层 将涂布液施加到基板上以形成涂膜的装置; B区,包括热处理所述涂膜的干燥装置; 以及包括在下层形成薄膜的真空成膜装置的C区,以及在其上形成有下层的表面上吸收并供给基板的卷取和进给装置。
    • 78. 发明申请
    • Pellicle
    • 薄膜
    • US20050053777A1
    • 2005-03-10
    • US10936257
    • 2004-09-07
    • Donald Hilliard
    • Donald Hilliard
    • B32B17/00B44C1/165C03C27/00G01R29/08G01R31/308G02B27/12G02B27/14G02C7/00G02F1/03G02F1/07G02F1/13G02F1/1337B32B7/02B32B27/00B32B31/00
    • G01R29/0885B32B2037/246B32B2038/0076G01R31/308Y10T428/24942Y10T428/31504
    • A polymer-based pellicle structure is disclosed for incorporation into electro-optic modulators used in testing of electronic devices, such as devices incorporated in flat panel displays. The pellicle structure comprises a polymer pellicle base, a dielectric reflector deposited onto the base, the dielectric reflector comprising alternating layers of organic and inorganic dielectric materials. The disclosed pellicle structure provides numerous advantages over the prior art. When the disclosed pellicle structure is terminated with a polymer layer, the propensity for tearing or damage to the pellicle or the tested device is significantly ameliorated, due to the relative softeness, toughness, and much higher elasticity of the polymer over prior art inorganic compounds used for the same application. Other advantages related to production costs, and advantageous properties provided by the polymer layer are also disclosed.
    • 公开了一种基于聚合物的防护薄膜结构,用于结合到用于测试电子设备的电光调制器中,例如并入平板显示器中的器件。 防护薄膜结构包括聚合物防护薄膜基材,沉积在基底上的电介质反射器,介电反射器包括有机和无机介电材料的交替层。 所公开的薄膜结构提供了许多优于现有技术的优点。 当所披露的防护薄膜结构被聚合物层终止时,由于聚合物相对于现有技术的无机化合物的相对软度,韧性和高得多的弹性,所以撕裂或损坏防护薄膜组件或被测试装置的倾向得到显着改善 为同一个应用程序。 还公开了与生产成本相关的其它优点,以及由聚合物层提供的有利特性。