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    • 72. 发明授权
    • Article for polishing semiconductor substrates
    • 用于抛光半导体衬底的文章
    • US07014538B2
    • 2006-03-21
    • US10382079
    • 2003-03-05
    • James V. TietzShijian LiManoocher BirangJohn M. WhiteSandra L. Rosenberg, legal representativeMarty ScalesRamin Emami
    • Lawrence M. Rosenberg, deceased
    • B24D11/00
    • B24B37/205B24B53/017B24D3/00B24D3/28B24D3/34
    • A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.
    • 一种用于使用固定研磨抛光垫的方法和装置,其包含用于化学机械抛光(CMP)的柱。 柱具有不同的形状,不同的尺寸,不同的高度,不同的材料,不同的磨料颗粒分布和不同的工艺化学品。 本发明还包括预处理包括多个柱的固定磨料制品,使得柱在背衬上方具有相等的高度以实现均匀的质地。 本发明涉及对现场速率测量(ISRM)装置的改进。 本发明在于提供一种机械装置,例如凹口,以确定何时接近研磨织物卷筒的端部。 本发明在于对其整个长度进行编码以确定网的不同部分的位置。 本发明在于在腹板的侧面或端部提供穿孔以改善处理。
    • 74. 发明授权
    • Superabrasive tool and method of manufacturing the same
    • 超研磨工具及其制造方法
    • US06312324B1
    • 2001-11-06
    • US09077024
    • 1998-05-27
    • Kosuke MitsuiToshio FukunishiKazunori KadomuraYukio ShimizuYoshio KoutaMasaaki YamanakaAkio Hara
    • Kosuke MitsuiToshio FukunishiKazunori KadomuraYukio ShimizuYoshio KoutaMasaaki YamanakaAkio Hara
    • B24D300
    • B24B53/017B24B3/06B24B37/16B24B53/12B24D3/00B24D5/00B24D7/00B24D18/00
    • A superabrasive tool such as a superabrasive grindstone (101; 102), a superabrasive dresser (103; 104; 105) or a superabrasive lap surface plate (106) includes a base (20) of steel and a superabrasive layer (10) formed on the base (20). The superabrasive layer (10) includes superabrasive grains (11) consisting of diamond grains, cubic boron nitride grains or the like and a holding layer consisting of a nickel plating layer (16) and a bond layer (17), or a brazing filler metal layer (18), holding the superabrasive grains (11) and fixing the same onto the base (20). Grooves (12) or holes (14) are formed on flat surfaces (19) of the superabrasive grains (11) exposed from the holding layer (16, 17; 18). The holding layer (16, 17; 18) holding and fixing the superabrasive grains (11) so that the surfaces of the grains are partially exposed is formed on the base (20). The grooves (12) or the holes (14) are formed by irradiating the surfaces of the superabrasive grains (11) exposed from the holding layer (16, 17; 18) with a laser beam (50). Working of high accuracy can be performed by forming the grooves (12) or the holes (14) on the surfaces of the superabrasive grains (11).
    • 超研磨工具,例如超研磨磨石(101; 102),超研磨修整器(103; 104; 105)或超级磨料搭接表面板(106),包括钢的基部(20)和形成在 基座(20)。 超级磨料层(10)包括由金刚石晶粒,立方氮化硼晶粒等构成的超磨料颗粒(11)和由镀镍层(16)和接合层(17)组成的保持层,或钎料 层(18),保持超磨料颗粒(11)并将其固定到基底(20)上。 在从保持层(16,17; 18)露出的超级磨料颗粒(11)的平坦表面(19)上形成槽(12)或孔(14)。 保持层(16,17; 18)在基体(20)上形成有保持和固定超磨料颗粒(11)以使颗粒的表面部分露出的部分。 通过用激光束(50)照射从保持层(16,17; 18)暴露的超级磨料颗粒(11)的表面,形成凹槽(12)或孔(14)。 可以通过在超级磨料颗粒(11)的表面上形成凹槽(12)或孔(14)来实现高精度的工作。