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71. 发明授权

US07914603B2 Particle trap for a plasma source 失效
标题翻译：用于等离子体源的粒子阱
公开(公告)号：US07914603B2
公开(公告)日：2011-03-29
申请号：US12147078
申请日：2008-06-26
申请人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
发明人： Ali Shajii , Xing Chen , Andrew Cowe , David Burtner , William Robert Entley , ShouQian Shao
IPC分类号： B01D46/46
CPC分类号： H01J37/32357 , H01J37/32871 , Y10S55/15 , Y10T29/4935
摘要： A particle trap for a remote plasma source includes a body structure having an inlet for coupling to a chamber of a remote plasma source and an outlet for coupling to a process chamber inlet. The particle trap for a remote plasma source also includes a gas channel formed in the body structure and in fluid communication with the body structure inlet and the body structure outlet. The gas channel can define a path through the body structure that causes particles in a gas passing from a first portion of the channel to strike a wall that defines a second portion of the gas channel at an angle relative to a surface of the wall. A coolant member can be in thermal communication with the gas channel.
摘要翻译：用于远程等离子体源的颗粒捕集器包括具有用于耦合到远程等离子体源的室的入口和用于耦合到处理室入口的出口的主体结构。用于远程等离子体源的颗粒捕获器还包括形成在主体结构中并与主体结构入口和主体结构出口流体连通的气体通道。气体通道可以限定穿过主体结构的路径，其使得从通道的第一部分通过的气体中的颗粒撞击限定气体通道的第二部分的壁，该壁相对于壁的表面成一定角度。冷却剂构件可以与气体通道热连通。

72. 发明申请

US20100219757A1 Method and Apparatus of Providing Power to Ignite and Sustain a Plasma in a Reactive Gas Generator 有权
标题翻译：提供功率以激发和维持反应性气体发生器中的等离子体的方法和装置
公开(公告)号：US20100219757A1
公开(公告)日：2010-09-02
申请号：US12394904
申请日：2009-02-27
申请人： Souheil Benzerrouk , Siddharth P. Nagarkatti , Andrew Cowe , Ali Shajii , Jesse E. Ambrosina , Ken Tran , Xing Chen
发明人： Souheil Benzerrouk , Siddharth P. Nagarkatti , Andrew Cowe , Ali Shajii , Jesse E. Ambrosina , Ken Tran , Xing Chen
IPC分类号： H05H1/24
CPC分类号： H01J37/32009 , H01J37/321
摘要： Described are methods and apparatuses, including computer program products, for igniting and/or sustaining a plasma in a reactive gas generator. Power is provided from an ignition power supply to a plasma ignition circuit. A pre-ignition signal of the plasma ignition circuit is measured. The power provided to the plasma ignition circuit is adjusted based on the measured pre-ignition signal and an adjustable pre-ignition control signal. The adjustable pre-ignition control signal is adjusted after a period of time has elapsed.
摘要翻译：描述了用于在反应性气体发生器中点燃和/或维持等离子体的方法和装置，包括计算机程序产品。从点火电源向等离子体点火电路供电。测量等离子体点火电路的预点火信号。基于所测量的预先点火信号和可调节的预点火控制信号来调节提供给等离子体点火电路的功率。经过一段时间后，调节可调节点火控制信号。

73. 发明申请

US20100076879A1 SYSTEM AND METHOD OF PROVIDING SERVICES VIA PEER-TO-PEER-BASED NEXT GENERATION NETWORK 有权
标题翻译：通过基于对等体的下一代网络提供服务的系统和方法
公开(公告)号：US20100076879A1
公开(公告)日：2010-03-25
申请号：US12594238
申请日：2008-04-04
申请人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
发明人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
IPC分类号： G06Q30/00 , G06F15/173 , G06Q50/00 , G06F21/00
CPC分类号： H04L67/104 , G06Q30/04 , H04L63/102 , H04L67/1093 , H04L67/14 , H04L67/306
摘要： A peer-to-peer network comprises a plurality of intelligent terminal nodes, each intelligent terminal node being operable to establish, maintain, and tear-down communication sessions with another intelligent terminal node, a plurality of network service nodes coupled to the plurality of intelligent terminal nodes, the plurality of network service nodes comprise at least one of the plurality of intelligent terminal nodes, at least one user P2P function module operable to store, locate and distribute service resource information related to user policies, and at least one network P2P function module operable to store, locate and distribute service resource information related to operator provider policies, and operable to exert stricter security control than the at least one user P2P function module.
摘要翻译：对等网络包括多个智能终端节点，每个智能终端节点可操作以建立，维护和拆除与另一智能终端节点的通信会话，耦合到多个智能终端节点的多个网络服务节点所述多个网络服务节点包括所述多个智能终端节点中的至少一个，至少一个用户P2P功能模块，其可操作以存储，定位和分发与用户策略相关的服务资源信息，以及至少一个网络P2P功能模块，其可操作以存储，定位和分发与运营商提供商策略相关的服务资源信息，并且可操作以施加比所述至少一个用户P2P功能模块更严格的安全控制。

74. 发明申请

US20090019156A1 System and Method of Providing Services via a Peer-To-Peer-Based Next Generation Network 有权
标题翻译：通过基于对等的下一代网络提供服务的系统和方法
公开(公告)号：US20090019156A1
公开(公告)日：2009-01-15
申请号：US12062404
申请日：2008-04-03
申请人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
发明人： Li Mo , Weijun Lee , Larry Shaoyan Ma , Xing Chen
IPC分类号： G06F15/16 , H04L9/32 , G06F17/30
CPC分类号： H04L67/104 , H04L63/102 , H04L67/1093 , H04L67/14 , H04L67/306
摘要： A peer-to-peer network comprises a plurality of intelligent terminal nodes, each intelligent terminal node being operable to establish, maintain, and tear-down communication sessions with another intelligent terminal node, a plurality of network service nodes coupled to the plurality of intelligent terminal nodes, the plurality of network service nodes comprise at least one of the plurality of intelligent terminal nodes, at least one user P2P function module operable to store, locate and distribute service resource information related to user policies, and at least one network P2P function module operable to store, locate and distribute service resource information related to operator provider policies, and operable to exert stricter security control than the at least one user P2P function module.
摘要翻译：对等网络包括多个智能终端节点，每个智能终端节点可操作以建立，维护和拆除与另一智能终端节点的通信会话，耦合到多个智能终端节点的多个网络服务节点所述多个网络服务节点包括所述多个智能终端节点中的至少一个，至少一个用户P2P功能模块，其可操作以存储，定位和分发与用户策略相关的服务资源信息，以及至少一个网络P2P功能模块，其可操作以存储，定位和分发与运营商提供商策略相关的服务资源信息，并且可操作以施加比所述至少一个用户P2P功能模块更严格的安全控制。

75. 发明申请

US20080142729A1 Inductively-coupled plasma source 有权
标题翻译：感应耦合等离子体源
公开(公告)号：US20080142729A1
公开(公告)日：2008-06-19
申请号：US11639680
申请日：2006-12-15
申请人： Xing Chen
发明人： Xing Chen
IPC分类号： H05H1/24
CPC分类号： H05H1/46 , C03B19/143 , C03B37/0183 , C03B37/01861 , H01J37/321 , H01J37/32522 , H01J37/3266 , H05H2001/4652
摘要： A method and apparatus for exciting gas that involves generating an alternating magnetic field unidirectionally through a magnetic core defining a gap, across the gap and through a plasma vessel that includes dielectric material. The magnetic field induces an electric field in the plasma vessel that generates the plasma.
摘要翻译：一种用于激发气体的方法和装置，其涉及通过限定间隙的磁芯单向产生交变磁场，跨越间隙并通过包括电介质材料的等离子体容器。磁场在等离子体容器中产生产生等离子体的电场。

76. 发明授权

US06552296B2 Toroidal low-field reactive gas source 有权
公开(公告)号：US06552296B2
公开(公告)日：2003-04-22
申请号：US09953763
申请日：2001-09-17
申请人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
发明人： Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
IPC分类号： B23K1000
CPC分类号： H01J37/32009 , H01J27/16 , H01J37/321 , H01J37/32357 , H01J37/32862
摘要： An improved toroidal low-field plasma source allows plasma ignition within a wider range of gas conditions than permitted by prior art plasma sources. Power efficiency of the plasma source is improved by automatically adjusting the power delivered to the plasma based on the load to the power supply. The plasma source can be operated over a wider pressure range than allowed by prior art plasma sources. The plasma source can be operated so as to increase the output of atomic species from the source. The plasma source can be operated to increase the etch rate of organic materials. The plasma source can efficiently remove hazardous gas compounds from effluent gas streams by converting them into scrubbable products.

77. 发明授权

US5771094A Film measurement system with improved calibration 失效
标题翻译：电影测量系统具有改进的校准
公开(公告)号：US5771094A
公开(公告)日：1998-06-23
申请号：US790090
申请日：1997-01-29
申请人： Joseph Carter , Jennming Chen , Xing Chen
发明人： Joseph Carter , Jennming Chen , Xing Chen
IPC分类号： G01J3/28 , G01J3/36 , G01J4/00 , G01N21/21
CPC分类号： G01J3/36 , G01J4/00 , G01J2003/2866
摘要： The pixel position-to-wavelength calibration function of film measurement devices such as spectroscopic ellipsometers and spectroreflectometers may shift due to temperature and humidity changes and mechanical factors. One or more wavelength markers provided by the light source or reference sample may be used to correct the calibration function. The pixel positions of one or more persistent wavelength markers are noted during the calibration process and the current positions of such markers are again noted to account for shifts due to various factors to correct the calibration function.
摘要翻译：诸如光谱椭偏仪和光谱仪的胶片测量装置的像素位置到波长校准功能可能由于温度和湿度变化和机械因素而移动。可以使用由光源或参考样本提供的一个或多个波长标记来校正校准功能。在校准过程中注意到一个或多个持久波长标记的像素位置，并且再次注意到这些标记的当前位置以解释由于校正功能的各种因素导致的移位。

78. 发明授权

US5739321A 3-hydroxy .gamma.-lactone based enantionselective synthesis of azetidinones 失效
标题翻译：基于3-羟基γ-内酯的对映选择性合成氮杂环丁酮
公开(公告)号：US5739321A
公开(公告)日：1998-04-14
申请号：US655785
申请日：1996-05-31
申请人： Guang-Zhong Wu , Xing Chen , Yee-Shing Wong , Doris P. Schumacher , Martin Steinman
发明人： Guang-Zhong Wu , Xing Chen , Yee-Shing Wong , Doris P. Schumacher , Martin Steinman
IPC分类号： C07D205/08 , C07D205/04
CPC分类号： C07D205/08
摘要： The invention relates to a process for producing the compound of the formula ##STR1## which comprises reacting lactone of formula II ##STR2## with an imine of formula III': ##STR3## and converting the resulting chiral diol of formula VI: ##STR4## through several steps to obtain a compound of formula I'.
摘要翻译：本发明涉及制备式I的化合物的方法，其包括使式II的内酯与式III'的亚胺反应，并转化得到的式VI的手性二醇：通过几步来获得式I'化合物。

79. 发明授权

US5608526A Focused beam spectroscopic ellipsometry method and system 失效
标题翻译：聚焦光束椭偏仪的方法和系统
公开(公告)号：US5608526A
公开(公告)日：1997-03-04
申请号：US375353
申请日：1995-01-19
申请人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , Jean-Pierre Rey
发明人： Timothy R. Piwonka-Corle , Karen F. Scoffone , Xing Chen , Lloyd J. Lacomb, Jr. , Jean-Louis Stehle , Dorian Zahorski , Jean-Pierre Rey
IPC分类号： G01N21/21
CPC分类号： G01N21/211 , G01N2021/213
摘要： A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape,to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).
摘要翻译：使用反射光学器件的光谱椭偏仪的方法和系统通过从该区域反射辐射（优选宽带UV，可见光和近红外辐射）来测量样品的小区域。该系统优选地具有自动对焦组件和被编程用于根据测量结果确定样品上薄膜的厚度和/或复合折射率的处理器。优选地，沿着偏振器和分析器之间的光路仅采用反射光学元件，样品光束以反射光学器件的每个分量以低入射角反射，光束被反射聚焦到样品上的小的紧密斑点并且提供入射角选择元件用于仅选择仅以单个选定角度（或窄范围的角度）从样品反射的辐射。聚焦镜优选具有椭圆形状，以减少聚焦光束中的离轴像差。一些实施例包括作为单个仪器集成在一起的分光光度计和椭偏仪。在这种仪器中，分光光度计和椭偏仪共享一个辐射源，来自源的辐射可以通过分光光度计或椭偏仪聚焦到样品上的同一焦点。椭偏仪的优选实施例采用旋转的，最小长度的Rochon棱镜作为偏振器，并且包括具有增强的光电二极管阵列的光谱仪，以测量来自样品的反射辐射，以及参考通道（除了检测辐射的样品通道从样品）。

80. 发明申请

US20160237675A1 Modular Field Game Bunker System 审中-公开
标题翻译：模块化场地游戏掩体系统
公开(公告)号：US20160237675A1
公开(公告)日：2016-08-18
申请号：US14622413
申请日：2015-02-13
申请人： Xing Chen
发明人： Xing Chen
IPC分类号： E04B1/343 , A63B71/02
CPC分类号： A63B71/02 , A63H33/008
摘要： A modular game field bunker system comprises a plurality of interlocking frame pieces and a cover having an aesthetic feature disposed on at least an outer surface thereof. The interlocking frame pieces may be coupled together to form a structure having at least one wall. The structure preferably is fully enclosed by its walls and has an interior region defined therein for receiving a human player. The cover receives and fully covers the structure, and may partially define a doorway for entering and exiting the structure. The aesthetic feature of the cover may make the bunker appear in any of a variety of desired ways so as to customizably match a desired design scenario of the game field.
摘要翻译：模块化游戏场地掩体系统包括多个互锁框架件和具有设置在其至少外表面上的美学特征的盖。互锁框架件可以联接在一起以形成具有至少一个壁的结构。该结构优选地被其壁完全包围并且具有限定在其中的用于接收人类玩家的内部区域。盖子接收并完全覆盖结构，并且可以部分地限定用于进入和离开结构的门口。封面的美学特征可以使掩体以任何各种期望的方式出现，以便可定制地匹配游戏场的期望的设计场景。

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