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    • 74. 发明授权
    • Apparatus for sidewall profile control during an etch process
    • 在蚀刻过程中用于侧壁轮廓控制的装置
    • US06248206B1
    • 2001-06-19
    • US08724660
    • 1996-10-01
    • Harald HerchenMichael D WelchWilliam BrownWalter Richardson Merry
    • Harald HerchenMichael D WelchWilliam BrownWalter Richardson Merry
    • C23F102
    • H01J37/32082H01J37/3299H01L21/31116
    • A process is provided for controlling the slope of the sidewalls of an opening produced in a semiconductor wafer during an etch process. Microwave or radio frequency energy is remotely applied to pre-excite a process gas. Radio frequency energy is also supplied to the process gas within the process chamber. The sidewall slope is varied by varying the ratio of the amount of remote microwave or radio frequency energy supplied and that of the radio frequency energy supplied within the process chamber. The sidewall slope is also shaped by controlling the process gas flow rate and composition, and the pressure within the process chamber. A more vertical, anisotropic etch profile is obtained with increased radio frequency energy and lower process chamber pressure. A more horizontal, isotropic profile is obtained with decreased radio frequency energy and higher process chamber pressure. A narrower etched feature having smaller interlayer and active element contact regions than the corresponding feature size on the overlying photoresist layer may thereby be provided.
    • 提供了一种用于控制在蚀刻工艺期间在半导体晶片中产生的开口的侧壁的斜率的工艺。 微波或射频能量被远程应用于预处理气体。 射频能量也被提供给处理室内的处理气体。 通过改变提供的远程微波或射频能量与处理室内提供的射频能量的比率来改变侧壁倾斜度。 侧壁倾斜也通过控制工艺气体流速和组成以及处理室内的压力来成形。 通过增加射频能量和较低的处理室压力获得更垂直的各向异性蚀刻轮廓。 通过降低射频能量和更高的处理室压力获得更水平,各向同性的曲线。 因此可以提供具有比覆盖的光致抗蚀剂层上的相应特征尺寸更小的中间层和有源元件接触区域的较窄蚀刻特征。
    • 80. 发明授权
    • Sliding joint system for railway tracks, allowing a great longitudinal
excursion, particularly for suspension bridges
    • 用于铁路轨道的滑动接头系统,允许大的纵向偏移,特别是悬吊桥
    • US5634591A
    • 1997-06-03
    • US428134
    • 1995-05-26
    • William Brown
    • William Brown
    • E01B11/42E01D19/06
    • E01D19/065E01B11/42
    • Sliding joint system in a railway track allowing a great longitudinal excursion--particularly for suspension bridges--comprising, for each rail of the track, a first fixed rail (1) having an end tapered on the outwardly facing sides of the track, and a second rail (2) positioned next to the tapered surface of the first rail (1) and sliding along the same, while continuously extending beyond the tapered surface in an oblique direction, outwardly of the track, at an acute angle. The base flange of the second rail (2) is preferably of reduced width, equal to that of its head, so as to be more flexible. The deviation and sliding of the second rail (2) in respect of the first rail (1) are ensured by guides comprising: a first set of three guide rollers (3, 4, 5) meant to align the second rail (2) parallel to the main longitudinal axis of the track; a plurality of secondary rollers (6) with fixed vertical axes, positioned so as to face the tapered surface of the first rail (1); and pairs of coupled guide rollers (7), positioned at regular intervals along a first guide channel (8) of the second rail (2). The second rail (2) thus bends into and out of alignment with the first rail (1), upon thermal extension or contraction of the bridge, thereby to accommodate great variations in the length of the bridge whilst maintaining continuous tracks.
    • PCT No.PCT / EP93 / 02984第 371日期:1995年5月26日 102(e)日期1995年5月26日PCT提交1993年10月27日PCT公布。 公开号WO94 / 10383 日期1994年5月11日在轨道上滑动接合系统,允许大的纵向偏移 - 特别是悬挂桥 - 包括对于轨道的每个轨道,第一固定轨道(1)在轨道的向外的侧面上具有锥形 以及位于第一轨道(1)的锥形表面附近并沿其滑动的第二轨道(2),同时在倾斜方向上以锐角向外延伸超出该锥形表面。 第二导轨(2)的基部凸缘优选地具有相当于其头部的宽度,以便更柔性。 第二导轨(2)相对于第一导轨(1)的偏移和滑动通过导向器来确保,导轨包括:第一组三个导向辊(3,4,5),用于使第二导轨(2)平行 到轨道的主纵轴; 具有固定的垂直轴的多个次级辊(6),其定位成面对第一轨道(1)的锥形表面; 以及沿着第二轨道(2)的第一引导通道(8)以规则间隔设置的成对的联接导向辊(7)。 因此,当桥的热延伸或收缩时,第二轨道(2)弯曲成与第一轨道(1)对齐,从而适应桥梁的长度的很大变化,同时保持连续轨迹。