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71. 发明授权

US06513898B1 Integrated inkjet print head and manufacturing process thereof 失效
标题翻译：集成喷墨打印头及其制造工艺
公开(公告)号：US06513898B1
公开(公告)日：2003-02-04
申请号：US09103016
申请日：1998-06-23
申请人： Benedetto Vigna , Riccardo Maggi
发明人： Benedetto Vigna , Riccardo Maggi
IPC分类号： B41J29393
CPC分类号： B41J2/1603 , B41J2/125 , B41J2/14129 , B41J2/14153 , B41J2/164 , B41J2002/14354 , B41J2202/13
摘要： An inkjet print head includes an ink drop emission mini-gun and a drop emission sensor integrated in a chip of semiconductor material. The mini-gun is formed by an ink chamber and a nozzle in communication with the ink chamber and the drop emission sensor includes a resistive element arranged in a position adjacent to the ink chamber. The resistance of the resistive element depends on the pressure exerted thereon, so that when the mini-gun emits an ink drop, it is subjected to a recoil movement which causes a change of pressure and hence of resistance in the resistive element; this change in resistance may be detected through suitable circuitry to identify whether and when a drop of ink has been emitted.
摘要翻译：喷墨打印头包括集成在半导体材料芯片中的墨滴发射微型枪和液滴发射传感器。微型枪由墨水室和与墨水室连通的喷嘴形成，并且液滴发射传感器包括布置在与墨水腔相邻的位置的电阻元件。电阻元件的电阻取决于施加在其上的压力，使得当微型枪发射墨滴时，其受到反冲运动，其导致电阻元件中的压力变化并因此导致电阻的变化; 可以通过合适的电路来检测电阻的这种变化，以识别是否和何时已经发射一滴墨水。

72. 发明授权

US06405592B1 Hermetically-sealed sensor with a movable microstructure 失效
标题翻译：密封传感器具有可移动的微结构
公开(公告)号：US06405592B1
公开(公告)日：2002-06-18
申请号：US09100838
申请日：1998-06-19
申请人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
发明人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
IPC分类号： G01P102
CPC分类号： B81C1/0023 , G01P1/02 , G01P15/0802
摘要： A sensor with a movable microstructure including a sensitive element, formed in a first chip of semiconductor material for producing an electrical signal dependent on a movement of at least one movable microstructure relative to a surface of the first chip. The sensitive element is enclosed in a hollow hermetic structure, and circuitry for processing the electrical signal is formed in a second chip of semiconductor material. The hollow hermetic structure includes a metal wall disposed on the surface of the first chip around the sensitive element, and the second chip is fixed to the metal wall.
摘要翻译：一种具有可移动微结构的传感器，包括敏感元件，其形成在半导体材料的第一芯片中，用于根据至少一个可移动微结构相对于第一芯片的表面的运动产生电信号。敏感元件封闭在中空密封结构中，并且用于处理电信号的电路形成在半导体材料的第二芯片中。中空密封结构包括设置在敏感元件周围的第一芯片的表面上的金属壁，第二芯片固定在金属壁上。

73. 发明授权

US06259584B1 Integrated device comprising a semiconductor material microactuator, in particular for a hard disk read/write head 有权
标题翻译：集成器件包括半导体材料微致动器，特别是用于硬盘读/写头
公开(公告)号：US06259584B1
公开(公告)日：2001-07-10
申请号：US09357443
申请日：1999-07-20
申请人： Dario Cini , Benedetto Vigna
发明人： Dario Cini , Benedetto Vigna
IPC分类号： G11B2102
CPC分类号： G11B21/02 , H02N1/006
摘要： A microactuator comprises an outer stator and an inner rotor electrostatically coupled to a stator. The rotor comprises a suspended mass with a substantially circular shape, and a plurality of mobile arms extending radially towards the exterior, starting from the suspended mass. The stator has a plurality of pairs of fixed arms extending radially to the suspended mass, a respective mobile arm being arranged between each pair of fixed arms. The fixed arms are divided into fixed drive arms connected to a drive stage for actuating the microactuator, and into fixed measure arms connected to a measure stage, and define a capacitive uncoupling structure.
摘要翻译：微型致动器包括外部定子和静电耦合到定子的内部转子。转子包括具有大致圆形形状的悬挂质量和从悬挂质量开始的径向向外延伸的多个移动臂。定子具有多个径向延伸到悬挂质量块的固定臂，相应的可动臂布置在每对固定臂之间。固定臂被分成固定的驱动臂，连接到用于致动微型致动器的驱动级，并且连接到测量台的固定的测量臂中，并且限定了电容解耦结构。

74. 发明授权

US06198145B1 Method for manufacturing a semiconductor material integrated microactuator, in particular for a hard disc mobile read/write head, and a microactuator obtained thereby 有权
公开(公告)号：US06198145B1
公开(公告)日：2001-03-06
申请号：US09181717
申请日：1998-10-28
申请人： Paolo Ferrari , Benedetto Vigna
发明人： Paolo Ferrari , Benedetto Vigna
IPC分类号： H01L2982
CPC分类号： H02N1/006
摘要： The integrated microactuator has a stator and a rotor having a circular extension with radial arms which support electrodes extending in a substantially circumferential direction and interleaved with one another. For the manufacture, first a sacrificial region is formed on a silicon substrate; an epitaxial layer is then grown; the circuitry electronic components and the biasing conductive regions are formed; subsequently a portion of substrate beneath the sacrificial region is removed, forming an aperture extending through the entire substrate; the epitaxial layer is excavated to define and separate from one another the rotor and the stator, and finally the sacrificial region is removed to release the mobile structures from the remainder of the chip.

75. 发明授权

US6153875A Optical two-dimensional position sensor in a control device for automotive applications 失效
标题翻译：用于汽车应用的控制装置中的光学二维位置传感器
公开(公告)号：US6153875A
公开(公告)日：2000-11-28
申请号：US85534
申请日：1998-05-27
申请人： Flavio Francesco Villa , Benedetto Vigna , Paolo Ferrari
发明人： Flavio Francesco Villa , Benedetto Vigna , Paolo Ferrari
IPC分类号： G01D5/34
CPC分类号： G01D5/34
摘要： An optical two-dimensional position sensor including a selective optical unit which faces, and is displaceable relative to, an integrated device. The selective optical unit is formed by a polarized light source and a filter with four quadrants which permits passage of light through two quadrants only. The selective optical unit is attached to a control lever such as to translate in a plane along a first direction and a second direction, and to pivot around an axis which is orthogonal to the preceding directions. In a transparent package, the integrated device comprises a first group of sensor elements which are spaced along the first direction, a second group of sensor elements which are spaced along the second direction and a third group of sensor elements which detect an angular position of the selective optical unit. Electronics which are integrated with the sensor elements generates a code which is associated with each position which is assumed by the selective optical unit and a control signal which corresponds to a function to be performed.
摘要翻译：一种光学二维位置传感器，包括面向并可相对于集成装置移位的选择性光学单元。选择性光学单元由偏振光源和具有四个象限的滤光片形成，其允许光仅通过两个象限。选择性光学单元附接到控制杆，例如沿着第一方向和第二方向在平面中平移，并且围绕与前述方向正交的轴线枢转。在透明封装中，集成器件包括沿着第一方向间隔开的第一组传感器元件，沿着第二方向间隔开的第二组传感器元件，以及第三组传感器元件，其检测选择光学单元。与传感器元件集成的电子产生与由选择性光学单元所假设的每个位置相关联的代码和对应于要执行的功能的控制信号。

76. 发明授权

US6109106A Process for manufacturing high-sensitivity accelerometric and gyroscopic integrated sensors, and sensor thus produced 失效
标题翻译：用于制造高灵敏度加速度和陀螺仪集成传感器的过程以及由此产生的传感器
公开(公告)号：US6109106A
公开(公告)日：2000-08-29
申请号：US126625
申请日：1998-07-30
申请人： Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
发明人： Paolo Ferrari , Benedetto Vigna , Pietro Montanini , Marco Ferrera
IPC分类号： G01P9/04 , B81B3/00 , G01C19/56 , G01P15/08 , G01P15/125 , H01L21/762 , H01L21/764 , H01L41/08
CPC分类号： H01L21/764 , B81C1/00246 , G01P15/0802 , G01P15/125 , H01L21/76202 , B81B2201/0235 , B81B2201/0242 , B81C2201/0109 , B81C2201/0177 , B81C2203/0735 , B81C2203/0778 , G01P2015/0814
摘要： A movable mass forming a seismic mass is formed starting from an epitaxial layer and is covered by a weighting region of tungsten which has high density. To manufacture the mass, buried conductive regions are formed in the substrate. Then, at the same time, a sacrificial region is formed in the zone where the movable mass is to be formed and oxide insulating regions are formed on the buried conductive regions so as to partially cover them. An epitaxial layer is then grown, using a nucleus region. A tungsten layer is deposited and defined and, using a silicon carbide layer as mask, the suspended structure is defined. Finally, the sacrificial region is removed, forming an air gap.
摘要翻译：从外延层开始形成形成地震质量块的移动体，并且由具有高密度的钨的加权区域覆盖。为了制造质量，在衬底中形成掩埋的导电区域。然后，同时，在要形成可移动物体的区域中形成牺牲区域，并且在掩埋的导电区域上形成氧化物绝缘区域，以便部分地覆盖它们。然后使用核区域生长外延层。沉积和限定钨层，并且使用碳化硅层作为掩模，限定悬浮结构。最后，去除牺牲区域，形成气隙。

77. 发明申请

US20140009430A1 COMBINING TOUCH SCREEN AND OTHER SENSING DETECTIONS FOR USER INTERFACE CONTROL 有权
标题翻译：组合触摸屏和用户界面控制的其他感应检测
公开(公告)号：US20140009430A1
公开(公告)日：2014-01-09
申请号：US13544713
申请日：2012-07-09
申请人： Francesco Italia , Giuseppe Noviello , Chee Yu Ng , Benedetto Vigna
发明人： Francesco Italia , Giuseppe Noviello , Chee Yu Ng , Benedetto Vigna
IPC分类号： G06F3/044
CPC分类号： G06F3/044 , G06F3/0416
摘要： A touch sensitive display includes a capacitive touch sensor configured to output capacitance values. A motion sensor makes a motion detection and generates a motion signal including a motion value indicative of sensed motion detection. A touch detection circuit is coupled to receive the capacitance values and motion values. The touch detection circuit processes the capacitance values to make a hovering detection and a touching detection with respect to the display. The touch detection circuit further generates an output signal including the motion value correlated in time with each of the hovering detection and touching detection. The output signal may be processed as a user interface control signal. The output signal may also be processed to determine an impulsive strength of the touching detection as a function of an elapsed time between hover and touch and the measured motion values.
摘要翻译：触敏显示器包括被配置为输出电容值的电容式触摸传感器。运动传感器进行运动检测并产生运动信号，该运动信号包括指示检测到的运动检测的运动值。耦合触摸检测电路以接收电容值和运动值。触摸检测电路处理电容值以对显示进行悬停检测和触摸检测。触摸检测电路进一步生成包括与悬停检测和触摸检测中的每一个相关的运动值的输出信号。可以将输出信号作为用户界面控制信号进行处理。还可以处理输出信号以确定触摸检测的脉冲强度作为在悬停和触摸之间经过的时间以及所测量的运动值的函数。

78. 发明授权

US08433084B2 Assembly of a capacitive acoustic transducer of the microelectromechanical type and package thereof 有权
公开(公告)号：US08433084B2
公开(公告)日：2013-04-30
申请号：US12777058
申请日：2010-05-10
申请人： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
发明人： Sebastiano Conti , Benedetto Vigna , Mario Francesco Cortese
IPC分类号： H04R25/00
CPC分类号： B81C1/00158 , B81B3/0018 , B81B7/0061 , B81B2201/0257 , H01L2224/48091 , H01L2224/48137 , H01L2224/48145 , H01L2224/48479 , H01L2924/00014 , H01L2924/16151 , H01L2924/16152 , H04R1/04 , H04R1/06 , H04R1/086 , H04R1/2838 , H04R19/005 , H04R19/04 , H04R2201/003 , H01L2224/48471 , H01L2224/4554 , H01L2924/00012
摘要： A microelectromechanical-acoustic-transducer assembly has: a first die integrating a MEMS sensing structure having a membrane, which has a first surface in fluid communication with a front chamber and a second surface, opposite to the first surface, in fluid communication with a back chamber of the microelectromechanical acoustic transducer, is able to undergo deformation as a function of incident acoustic-pressure waves, and faces a rigid electrode so as to form a variable-capacitance capacitor; a second die, integrating an electronic reading circuit operatively coupled to the MEMS sensing structure and supplying an electrical output signal as a function of the capacitive variation; and a package, housing the first die and the second die and having a base substrate with external electrical contacts. The first and second dice are stacked in the package and directly connected together mechanically and electrically; the package delimits at least one of the front and back chambers.

79. 发明申请

US20070183116A1 Micro-electro-mechanical variable capacitor for radio frequency applications with reduced influence of a surface roughness 有权
标题翻译：用于射频应用的微机电可变电容器，具有减小的表面粗糙度的影响
公开(公告)号：US20070183116A1
公开(公告)日：2007-08-09
申请号：US11338427
申请日：2006-01-24
申请人： Chantal Combi , Andrea Rusconi Clerici Beltrami , Benedetto Vigna
发明人： Chantal Combi , Andrea Rusconi Clerici Beltrami , Benedetto Vigna
IPC分类号： H01G5/00 , H01G7/00
CPC分类号： H01G5/18 , H01L28/60
摘要： A micro-electro-mechanical variable capacitor has a first and a second electrode, and a dielectric region arranged on the first electrode. An intermediate electrode is arranged on the dielectric region. The first electrode is fixed and anchored to a substrate, and the second electrode includes a membrane movable with respect to the first electrode according to an external actuation, in particular an electrostatic force due to an actuation voltage applied between an actuation electrode and the first electrode. The second electrode is suspended over the intermediate electrode in a first operating condition, and contacts the intermediate electrode in a second operating condition; in particular, in the second operating condition, a short-circuit is established between the second electrode and the intermediate electrode.
摘要翻译：微机电可变电容器具有第一和第二电极以及布置在第一电极上的电介质区域。中间电极布置在电介质区域上。第一电极被固定并固定到基底，并且第二电极包括根据外部致动而相对于第一电极可移动的膜，特别是由于施加在致动电极和第一电极之间的致动电压引起的静电力。第二电极在第一操作状态下悬挂在中间电极上，并在第二操作状态下接触中间电极; 特别是在第二工作状态下，在第二电极和中间电极之间建立起短路。

80. 发明申请

US20060150731A1 Portable apparatus with an accelerometer device for free-fall detection 有权
公开(公告)号：US20060150731A1
公开(公告)日：2006-07-13
申请号：US11302486
申请日：2005-12-12
申请人： Luca Fontanella , Benedetto Vigna , Ernesto Lasalandra , Caterina Riva
发明人： Luca Fontanella , Benedetto Vigna , Ernesto Lasalandra , Caterina Riva
IPC分类号： G01P15/00
CPC分类号： G11B19/04 , G01P15/0891 , G01P15/18
摘要： A portable apparatus having an accelerometer device and a supporting element in the accelerometer device, having a first body of semiconductor material integrating a sensor element that detects movements of the first body and generates a signal correlated to the detected movement; a second body of semiconductor material that integrates a conditioning electronics and that is electrically connected to the first body; and conductive bumps that provide electrical connection of the first and second bodies to the supporting element. In particular, the conductive bumps connect the first and second bodies to the supporting element without the interposition of any packaging.

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