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71. 发明授权

US08935959B2 Thermal type flow rate sensor 有权
标题翻译：热式流量传感器
公开(公告)号：US08935959B2
公开(公告)日：2015-01-20
申请号：US13638259
申请日：2011-04-01
申请人： Ryo Sato , Keiji Hanzawa
发明人： Ryo Sato , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/696 , G01F25/00
CPC分类号： G01F1/692 , G01F1/696 , G01F25/0007
摘要： To reduce a signal variation of a bridge circuit connected with a temperature sensing resistor that is caused by a strain even when the strain is generated at a diaphragm portion of a substrate installed with a heater resistor and the temperature sensing resistor. In a thermal type flow rate resistor including a substrate, a diaphragm 13 formed at the substrate, and a heat generating resistor 2 and temperature detecting resistors 7 through 10 formed on the diaphragm for detecting a flow rate of a measured fluid by heating the heat generating resistor, strain detecting resistors 11 and 12 are formed on an upstream side and on a downstream side of a flow of the measured fluid relative to the heat generating resistor on the diaphragm, an amount of a strain generated on the diaphragm is detected by the strain detecting resistors, and a flow rate signal detected by the heat generating resistor and the temperature detecting resistors is compensated for the strain based on the detected amount of the strain.
摘要翻译：即使当在安装有加热电阻器的基板的隔膜部分和温度感测电阻器上产生应变时，也可以减小由应变引起的与感温电阻器相连的桥接电路的信号变化。在包括基板的热式流量电阻器，形成在基板上的隔膜13和形成在隔膜上的发热电阻器2和温度检测电阻器7至10，用于通过加热产生的热量来检测被测流体的流量电阻器，应变检测电阻器11和12形成在测量流体相对于隔膜上的发热电阻器的流动的上游侧和下游侧，通过应变检测在隔膜上产生的应变量检测电阻器和由发热电阻器和温度检测电阻器检测的流量信号基于检测到的应变量来补偿应变。

72. 发明授权

US08627717B2 Thermal flow sensor 有权
标题翻译：热流量传感器
公开(公告)号：US08627717B2
公开(公告)日：2014-01-14
申请号：US13361372
申请日：2012-01-30
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698
摘要： A thermal flow sensor includes a heater temperature controller that realizes stable startup characteristics and prevents degradation of a sensor element and can also accommodate a smaller heater. The sensor also includes a semiconductor substrate; a cavity portion provided in the semiconductor substrate; a dielectric film provided on the semiconductor substrate; a thin layer area formed as a result of the dielectric film covering the cavity portion; a heating resistor provided in the thin layer area on the dielectric film; a first temperature-sensitive resistor provided in the thin layer area on the dielectric film; a heating controller; a second temperature-sensitive resistor provided near the heating resistor; and a flow rate detector that detects a flow rate of a fluid on the basis of temperature of the second temperature-sensitive resistor. The heating controller controls the temperature of the heating resistor on the basis of first and second reference temperatures.
摘要翻译：热流传感器包括加热器温度控制器，其实现稳定的启动特性并防止传感器元件的劣化并且还可以容纳较小的加热器。传感器还包括半导体衬底; 设置在所述半导体基板中的空腔部; 设置在所述半导体基板上的电介质膜; 作为覆盖空腔部分的电介质膜的结果而形成的薄层区域; 设置在电介质膜上的薄层区域中的加热电阻器; 设置在介电膜上的薄层区域中的第一温敏电阻器; 加热控制器设置在加热电阻附近的第二温敏电阻器; 以及流量检测器，其基于第二温度敏感电阻器的温度来检测流体的流量。加热控制器基于第一和第二参考温度来控制加热电阻器的温度。

73. 发明授权

US08336376B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US08336376B2
公开(公告)日：2012-12-25
申请号：US12844429
申请日：2010-07-27
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F1/699
摘要： Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
摘要翻译：提供一种热流量计中的加热温度调节电路，其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。热流量计包括：当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器，第二电阻器，第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻，并且通过控制发热电阻器的加热温度来测量流体的流量。热流量计包括：第一串联电路，其中固定电阻，第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路，其中第三电阻器和第四电阻器串联连接，并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。

74. 外观设计

USD660192S1 Airflow sensor 有权
标题翻译：气流传感器
公开(公告)号：USD660192S1
公开(公告)日：2012-05-22
申请号：US29385385
申请日：2011-02-14
申请人： Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Ryo Sato , Yasuo Onose
设计人： Keiji Hanzawa , Takeshi Morino , Yuki Okamoto , Ryo Sato , Yasuo Onose

75. 发明授权

US07992435B2 Air flow meter 有权
标题翻译：空气流量计
公开(公告)号：US07992435B2
公开(公告)日：2011-08-09
申请号：US12512512
申请日：2009-07-30
申请人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
发明人： Rintaro Minamitani , Keiji Hanzawa , Akio Yasukawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845
摘要： In a structure in which peripheral part of a diaphragm section of an electrical insulating film is covered with a protective film made of an organic material, the resistor wire on the diaphragm section crosses the peripheral part of the diaphragm section. At a place where a narrow wire of a resistance temperature detector and the like crosses the peripheral part of the diaphragm section, the protective film is thinner than the other part, and the dust impact resistance is reduced. At a place where a heating resistor wire connected to a heating resistor body or resistance temperature detector wires connected to resistance temperature detector bodies cross a periphery of the diaphragm section, a film component protruding from an electrical insulating film is arranged side by side with the heating resistor wire or the resistance temperature detector wires.
摘要翻译：在电绝缘膜的隔膜部分的周边部分被有机材料制成的保护膜覆盖的结构中，隔膜部分上的电阻器线与隔膜部分的周边部分交叉。在电阻温度检测器等的细线与隔膜部的周边部分交叉的地方，保护膜比其他部分薄，防尘性降低。在与加热电阻体连接的加热电阻线或与电阻温度检测体相连的电阻温度检测器线与隔膜部分的周边交叉的位置处，从电绝缘膜突出的膜部件并排配置，电阻丝或电阻温度检测器线。

76. 发明授权

US07647825B2 Thermal type flowmeter 失效
标题翻译：热式流量计
公开(公告)号：US07647825B2
公开(公告)日：2010-01-19
申请号：US12339485
申请日：2008-12-19
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/688 , G01F1/692 , G01F1/696 , G01F5/00
摘要： In the thermal type flowmeter for measuring the flow rate by a measuring element with an exothermic resistor and a temperature measuring resistor being shaped in the side of the surface of a substrate, a facing wall facing the surface of the measuring element is arranged, cantilever plate parts protruding from the facing wall toward the measuring element side are arranged, a gap is provided between the tip of the cantilever plate parts and the measuring element, and the cantilever plate parts are extended from the upper stream to the down stream of the measuring element.
摘要翻译：在用于测量具有放热电阻器的测量元件和在基板表面侧形成的温度测量电阻器的流量的热式流量计中，布置了面向测量元件表面的面向壁，悬臂板布置有从面向壁向测量元件侧突出的部分，在悬臂板部分的顶端和测量元件之间设置有间隙，并且悬臂板部分从测量元件的上游向下游延伸。

77. 发明授权

US07565255B2 Thermal flow meter and control system 有权
标题翻译：热流量计和控制系统
公开(公告)号：US07565255B2
公开(公告)日：2009-07-21
申请号：US10953608
申请日：2004-09-30
申请人： Atsushi Kanke , Izumi Watanabe , Keiji Hanzawa
发明人： Atsushi Kanke , Izumi Watanabe , Keiji Hanzawa
IPC分类号： G01F1/12
CPC分类号： G01F1/696 , G01F1/6845
摘要： In regard to an output of an intake flow meter for an internal combustion engine, a pulsation error can be reduced and dispersion in correction at the time of correction of response delay (a recovering of response delay) is reduced. A digital device is used for pre-processing of a control unit for inputting a flow rate measuring signal. An output voltage of the flow sensor is converted into a digital value, the digital value is converted into a flow rate and adds a response delay. The control unit detects a degree of response delay in reference to dispersion in a clock signal so as to perform response delay recovering and reduce dispersion of the response delay.
摘要翻译：关于用于内燃机的进气流量计的输出，可以减小脉动误差，并且在响应延迟校正时（响应延迟的恢复）减小时的校正偏差。数字装置用于预处理用于输入流量测量信号的控制单元。流量传感器的输出电压被转换为数字值，数字值被转换为流量并增加响应延迟。控制单元根据时钟信号中的色散来检测响应延迟的程度，以便执行响应延迟恢复并减少响应延迟的偏差。

78. 发明申请

US20090000372A1 Thermal Flow Measurement Device 失效
标题翻译：热流量测量装置
公开(公告)号：US20090000372A1
公开(公告)日：2009-01-01
申请号：US11814308
申请日：2006-02-20
申请人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
发明人： Masahiro Matsumoto , Hiroshi Nakano , Masamichi Yamada , Keiji Hanzawa , Izumi Watanabe , Keiichi Nakada , Yasuhiro Kanamaru
IPC分类号： G01F1/69
CPC分类号： G01F15/006 , G01F1/6845 , G01F1/692
摘要： Conventional thermal flow measurement devices lack consideration for automobiles in severe environments. A detection element of the thermal flow measurement device according to the present invention is structured by the provision of a planar substrate made of a material having good thermal conductivity, such as silicon or ceramic, with a thin-walled portion (diaphragm). On the surface of the thin-walled portion, the detection element comprises a heat element as a heater heated to a temperature being different to a predetermined extent from the temperature of the air flow to be measured, temperature-detecting resistors as temperature-detecting means on both sides of the heat element, wiring portions formed of electrical conductors that draw signal lines from the heat element and the temperature-detecting resistors and that have a melting point of 2000° C. or higher, and pads.
摘要翻译：传统的热流测量装置在恶劣环境中缺乏汽车的考虑。根据本发明的热流测量装置的检测元件通过提供由具有良好导热性的材料（例如硅或陶瓷）制成的具有薄壁部分（隔膜）的平面基板构成。在薄壁部分的表面上，检测元件包括作为加热器的加热元件加热到与待测量的空气流的温度不同的温度，作为温度检测装置的温度检测电阻器在加热元件的两侧，由从导热元件和温度检测电阻器吸引信号线并且具有2000℃或更高熔点的电导体形成的布线部分和焊盘。

79. 发明申请

US20080282791A1 Thermal Flowmeter 有权
标题翻译：热流量计
公开(公告)号：US20080282791A1
公开(公告)日：2008-11-20
申请号：US12121520
申请日：2008-05-15
申请人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F5/00
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/699
摘要： A simply configured thermal flowmeter can provide high measurement accuracy over a long period of time by suppressing the characteristics degradation due to adhering contaminants. On the surface of a diaphragm part, a heater resistor is formed. Temperature difference sensors through are disposed on the two sides of the heater resistor (upstream and downstream sides in the flow direction of an air stream). The temperature difference sensors are disposed upstream of the heater resistor while the temperature difference sensors are disposed downstream of the heater resistor. Outside the temperature difference sensors, heating temperature sensors are formed. Control is performed so that the temperature of the heating temperature sensors is set higher than the air stream temperature by a certain degree. Therefore, even if contaminants adhere to the sensor device, the temperature of the heating temperature sensors is held constant. Since the temperature difference sensors to detect the flow rate is located between the heating temperature sensors, the temperature change due to the contamination is small. This suppresses the characteristics degradation, making it possible to provide high measurement accuracy over a long period of time.
摘要翻译：简单配置的热流量计可以通过抑制由于污染物附着引起的特性劣化，从而在长时间内提供高测量精度。在隔膜部件的表面上形成加热电阻器。温差传感器通孔设置在加热电阻器的两侧（气流的流动方向的上游侧和下游侧）。温度差传感器设置在加热电阻器的上游，而温差传感器设置在加热电阻器的下游。在温差传感器之外，形成加热温度传感器。进行控制，使得加热温度传感器的温度被设定为高于气流温度一定程度。因此，即使污染物粘附到传感器装置上，加热温度传感器的温度也保持恒定。由于用于检测流量的温差传感器位于加热温度传感器之间，因污染导致的温度变化小。这抑制了特性劣化，从而可以在长时间内提供高测量精度。

80. 发明申请

US20080229818A1 THERMAL FLOWMETER 有权
标题翻译：热流量计
公开(公告)号：US20080229818A1
公开(公告)日：2008-09-25
申请号：US12020025
申请日：2008-01-25
申请人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68 , G01M15/02
CPC分类号： G01F1/6845 , G01F1/688
摘要： To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Phmax≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied.
摘要翻译：为了在保持良好的流量检测灵敏度的同时通过热式流量计降低功耗，仅需要在预定条件下降低热电阻器的功耗。具体地说，只要热电阻器的宽度Wh为100微米至400微米（100 <= Wh <= 400），则仅需要热电阻器的长度Lh，温度增加DeltaTh 为了保持良好的流量检测灵敏度，将加热电阻器和要供给到热电阻器的最大允许功率Phmax设定为满足公式1.4 <= DeltaTh.Lh / Phmax <= 2.8。因此，热电阻器的长度和热电阻器的温度上升被设定为能够在满足公式的范围内降低最大功耗。

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