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    • 73. 发明授权
    • Thin film transistor and display device including the same
    • 薄膜晶体管和包括其的显示装置
    • US08860030B2
    • 2014-10-14
    • US13166871
    • 2011-06-23
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/04H01L29/06H01L29/10H01L31/00H01L29/786H01L29/49H01L27/12H01L29/45
    • H01L29/78684H01L27/1214H01L27/1288H01L29/458H01L29/4908H01L29/78696
    • One object of the present invention is reduction of off current of a thin film transistor. Another object of the present invention is improvement of electric characteristics of the thin film transistor. Further, another object of the present invention is improvement of image quality of the display device including the thin film transistor. The thin film transistor includes a semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or a conductive film which is provided over a gate electrode with the gate insulating film interposed therebetween and which is provided in an inner region of the gate electrode so as not to overlap with an end portion of the gate electrode, a film covering at least a side surface of the semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or the conductive film, a pair of wirings formed over the film covering the side surface of the semiconductor film containing germanium at a concentration greater than or equal to 5 at. % and less than or equal to 100 at. % or the conductive film.
    • 本发明的一个目的是减少薄膜晶体管的截止电流。 本发明的另一个目的是提高薄膜晶体管的电特性。 此外,本发明的另一个目的是提高包括薄膜晶体管的显示装置的图像质量。 该薄膜晶体管包括含有浓度大于或等于5atm的锗的半导体膜。 %且小于或等于100at。 %或导电膜,其设置在栅极电极上,栅极绝缘膜介于其间并且设置在栅电极的内部区域中,以便不与栅电极的端部重叠,至少覆盖膜 该半导体膜的侧表面含有浓度大于或等于5atm的锗。 %且小于或等于100at。 %或导电膜,形成在覆盖半导体膜的侧面的膜上的一对布线,该半导体膜含有浓度大于或等于5at 3的锗。 %且小于或等于100at。 %或导电膜。
    • 75. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08847220B2
    • 2014-09-30
    • US13543109
    • 2012-07-06
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/10H01L29/12H01L29/786
    • H01L29/7869H01L27/1225
    • A semiconductor device including an oxide semiconductor can have stable electric characteristics and high reliability. A transistor in which an oxide semiconductor layer containing indium, titanium, and zinc is used as a channel formation region and a semiconductor device including the transistor are provided. As a buffer layer in contact with the oxide semiconductor layer, a metal oxide layer containing an oxide of one or more elements selected from titanium, aluminum, gallium, zirconium, hafnium, and a rare earth element can be used.
    • 包括氧化物半导体的半导体器件可以具有稳定的电特性和高可靠性。 使用其中含有铟,钛和锌的氧化物半导体层用作沟道形成区域的晶体管和包括晶体管的半导体器件。 作为与氧化物半导体层接触的缓冲层,可以使用含有选自钛,铝,镓,锆,铪和稀土元素中的一种或多种元素的氧化物的金属氧化物层。
    • 76. 发明授权
    • Semiconductor device
    • 半导体器件
    • US08835918B2
    • 2014-09-16
    • US13608039
    • 2012-09-10
    • Shunpei YamazakiAtsuo IsobeToshinari Sasaki
    • Shunpei YamazakiAtsuo IsobeToshinari Sasaki
    • H01L29/786H01L27/12
    • H01L29/7869H01L27/1218H01L27/1225
    • To provide a transistor which includes an oxide semiconductor and is capable of operating at high speed or a highly reliable semiconductor device including the transistor, a transistor in which an oxide semiconductor layer including a pair of low-resistance regions and a channel formation region is provided over an electrode layer, which is embedded in a base insulating layer and whose upper surface is at least partly exposed from the base insulating layer, and a wiring layer provided above the oxide semiconductor layer is electrically connected to the electrode layer or a part of a low-resistance region of the oxide semiconductor layer, which overlaps with the electrode layer.
    • 为了提供包括氧化物半导体并且能够高速运行的晶体管或包括晶体管的高度可靠的半导体器件,提供了包括一对低电阻区域和沟道形成区域的氧化物半导体层的晶体管 在基底绝缘层上嵌入并且其上表面至少部分地从基底绝缘层露出的电极层上,并且设置在氧化物半导体层上方的布线层电连接到电极层或电极层的一部分 氧化物半导体层的低电阻区域与电极层重叠。
    • 79. 发明授权
    • Semiconductor device and manufacturing method thereof
    • 半导体装置及其制造方法
    • US08823092B2
    • 2014-09-02
    • US13297480
    • 2011-11-16
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/66H01L21/84
    • H01L29/7869H01L29/1054H01L29/247H01L29/4908H01L29/66969H01L29/78696
    • An object is to provide a transistor in which the state of an interface between an oxide semiconductor layer and an insulating film (gate insulating layer) in contact with the oxide semiconductor layer is favorable; and a method for manufacturing the transistor. In order to obtain the transistor, nitrogen is added to a region of the oxide semiconductor layer in the vicinity of the interface with the gate insulating layer. Specifically, a concentration gradient of nitrogen is formed in the oxide semiconductor layer, and a region containing much nitrogen is provided at the interface with the gate insulating layer. By the addition of nitrogen, a region with high crystallinity can be formed in the region of the oxide semiconductor layer in the vicinity of the interface with the gate insulating layer, so that a stable interface state can be obtained.
    • 目的在于提供一种晶体管,其中与氧化物半导体层接触的氧化物半导体层和绝缘膜(栅极绝缘层)之间的界面的状态是有利的; 以及晶体管的制造方法。 为了获得晶体管,在与栅极绝缘层的界面附近,在氧化物半导体层的区域添加氮。 具体地,在氧化物半导体层中形成氮的浓度梯度,并且在与栅绝缘层的界面处设置含有大量氮的区域。 通过添加氮,可以在与栅极绝缘层的界面附近的氧化物半导体层的区域中形成具有高结晶度的区域,从而可以获得稳定的界面状态。
    • 80. 发明授权
    • Electrophoretic display device and method for manufacturing thereof
    • 电泳显示装置及其制造方法
    • US08822997B2
    • 2014-09-02
    • US12212983
    • 2008-09-18
    • Shunpei Yamazaki
    • Shunpei Yamazaki
    • H01L29/10H01L29/04H01L31/00
    • H01L27/1266G02F1/1368G02F1/167H01L27/1214H01L27/1218H01L29/04H01L29/78603H01L29/78669H01L29/78678H01L29/78696
    • It is an object to provide an electrophoretic display device having a thin film transistor which has highly reliable electric characteristics, lightweight, and flexibility. A gate insulating film is formed over a gate electrode, a microcrystalline semiconductor film which functions as a channel formation region is formed over the gate insulating film, a buffer layer is formed over the microcrystalline semiconductor film, a pair of source and drain regions are formed over the buffer layer, a pair of the source and drain electrodes in contact with the source and drain regions are formed. Then, the inverted-staggered thin film transistor is interposed between the flexible substrates, and the thin film transistor is provided with electrophoretic display element which is electrically connected by the pixel electrode. Then, the electrophoretic display electrode is surrounded by the partition layer so as to cover the end portion of the pixel electrode and provided over the pixel electrode.
    • 本发明的目的是提供一种具有薄膜晶体管的电泳显示装置,该薄膜晶体管具有高度可靠的电特性,重量轻和灵活性。 在栅电极上形成栅极绝缘膜,在栅绝缘膜上形成作为沟道形成区域的微晶半导体膜,在微晶半导体膜上形成缓冲层,形成一对源区和漏区 在缓冲层上形成与源区和漏区接触的一对源极和漏极。 然后,倒置交错薄膜晶体管插入在柔性基板之间,并且薄膜晶体管设置有通过像素电极电连接的电泳显示元件。 然后,电泳显示电极被分隔层包围,以覆盖像素电极的端部并且设置在像素电极上。