会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 73. 发明授权
    • Control method and control apparatus
    • 控制方法及控制装置
    • US06895287B2
    • 2005-05-17
    • US10436833
    • 2003-05-13
    • Masato Tanaka
    • Masato Tanaka
    • G05B11/36G05B11/32G05B11/42G05B13/02
    • G05B11/32G05B11/42Y10S706/906
    • In a control method, the first controlled variable is made to coincide with a predetermined controlled variable set point. A relation variable representing the relationship between second controlled variables which are designated in advance from measured second controlled variables different from the first controlled variable so as to maintain a predetermined relationship is calculated. A control actuator is so controlled as to make the calculated relation variable coincide with a predetermined relation variable set point. The difference between the calculated relation variable and a relation variable set point corresponding to the calculated relation variable is calculated. The calculated difference is added to the measured first controlled variable. A manipulated variable is calculated by performing feedback control calculation so as to make the sum coincide with the controlled variable set point. The calculated manipulated variable is output to a corresponding control actuator. A control apparatus is also disclosed.
    • 在控制方法中,使第一受控变量与预定的受控变量设定点一致。 计算表示预先从与第一受控变量不同的第二受控变量指定的第二受控变量之间的关系变量以维持预定关系的关系变量。 控制致动器受到如此控制以使得所计算的关系变量与预定关系变量设定点一致。 计算出计算的关系变量与对应于计算的关系变量的关系变量设定点的差。 将计算出的差值加到测量的第一受控变量上。 通过执行反馈控制计算来计算操作变量,以使得与控制变量设定点一致。 计算的操作变量输出到相应的控制执行器。 还公开了一种控制装置。
    • 74. 发明授权
    • Anti-reflection coating forming composition
    • 防反射涂层成型组合物
    • US06852791B2
    • 2005-02-08
    • US09987367
    • 2001-11-14
    • Kazuo KawaguchiMasato TanakaTsutomu Shimokawa
    • Kazuo KawaguchiMasato TanakaTsutomu Shimokawa
    • G03F7/004G03F7/09C08K3/00
    • G03F7/091
    • An anti-reflection coating-forming composition is provided. This composition includes a polymer and a solvent. The polymer has a structural unit represented by the formula (1): wherein R1 is a monovalent atom other than a hydrogen atom or a monovalent group, and n is an integer of 0-4, provided that when n is an integer of 2-4, a plural number of R1's are the same or different; R2 and R3 are each a monovalent atom or group; and X is a bivalent group. The anti-reflection coating formed from this composition has a high antireflective effect, does not generate intermixing with a resist film, and enables a good resist pattern profile excellent in resolution and precision in cooperation with a positive or negative resist.
    • 提供了防反射涂层组合物。 该组合物包括聚合物和溶剂。 聚合物具有由式(1)表示的结构单元:其中R1是除氢原子或一价基团以外的一价原子,n为0-4的整数,条件是当n为2- 如图4所示,多个R1相同或不同; R2和R3各自为一价原子或基团; X为二价基团。 由该组合物形成的抗反射涂层具有高的抗反射效果,不会产生与抗蚀剂膜的混合,并且能够与正或负的抗蚀剂配合,分辨率和精度优异的抗蚀剂图案轮廓良好。
    • 75. 发明授权
    • Controlling device and controlling method
    • 控制装置及控制方法
    • US06684113B2
    • 2004-01-27
    • US10343902
    • 2003-02-03
    • Masato Tanaka
    • Masato Tanaka
    • G05B1302
    • G05B11/42G05B11/32
    • Controllers (PID1 to PIDn) perform control so that the controlled variables of first to n-th control loops may agree with their preset values. A step response progress calculating section (C_R1) calculates the progress &agr;1 of the step response of the first control loop where the variation of the controlled variable is the slowest. Control loop internal preset value calculating sections (C_S2 to C_Sn) correct the preset values of the second to n-th control loops according to the progress &agr;1 of the step response so that the controlled variables of the second to n-th control loops vary synchronously with the controlled variable of the first control loop and give the corrected preset values to the controllers (PID2 to PIDn).
    • 控制器(PID1〜PIDn)进行控制,使第1〜第n控制回路的受控变量与其预设值一致。 阶跃响应进度计算部(C_R1)计算控制变量的变化最慢的第一控制回路的阶跃响应的进度α1。 控制回路内部预设值计算部(C_S2〜C_Sn)根据阶跃响应的进度α1来校正第二〜第n控制回路的预设值,使得第二〜第n控制回路的受控变量同步变化 与第一个控制回路的控制变量一起,并将修正后的预设值提供给控制器(PID2至PIDn)。