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71. 发明授权

US07891398B2 Screen device 有权
标题翻译：屏幕设备
公开(公告)号：US07891398B2
公开(公告)日：2011-02-22
申请号：US11813044
申请日：2005-12-27
申请人： Mitsuhiko Chino , Masato Moriya , Tetsuya Iida
发明人： Mitsuhiko Chino , Masato Moriya , Tetsuya Iida
IPC分类号： E06B3/94
CPC分类号： E06B9/24 , E06B9/52
摘要： A screen device includes an expandable and contractible folding screen connected to a side frame member and to a movable stile to be opened and closed, and a translation mechanism for the movable stile. The translation mechanism includes a single wire having three or more segments arranged in rows extending through the screen. The wire segments are redirected at an inlet to the movable stile, are guided along the length of the movable stile, are redirected in upper and lower areas of the movable stile, and are guided along the lateral frame members toward the opposite frame member, thereby the wire stretches between the movable stile and the opposite frame member the same number of times as the number of wire segments extending through the screen to absorb changes in the length of the wire segments extending through the screen in accordance with movement of the movable stile.
摘要翻译：屏幕装置包括连接到侧框架构件的可伸缩折叠屏幕和可打开和关闭的可移动平台以及用于可移动平台的平移机构。平移机构包括具有三个或更多个片段的单根线，该片段延伸穿过屏幕。线段在入口处被重定向到可移动立柱，沿着可移动立柱的长度被引导，被重定向在可移动立柱的上部和下部区域中，并且沿着侧向框架构件被引向相对的框架构件，由此导线在可移动平台和相对的框架构件之间延伸与通过屏幕延伸的线段的数量相同的次数，以吸收根据可移动立柱的移动延伸穿过屏幕的线段的长度的变化。

72. 发明申请

US20100193710A1 LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT SOURCE APPARATUS 有权
标题翻译：激光装置和极光超光源光源装置
公开(公告)号：US20100193710A1
公开(公告)日：2010-08-05
申请号：US12580523
申请日：2009-10-16
申请人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
发明人： Osamu Wakabayashi , Akira Endo , Krzysztof Nowak , Takashi Suganuma , Masato Moriya
IPC分类号： H05G2/00 , H01S3/10 , H01S3/22 , H01S3/0941
CPC分类号： H01S3/2316 , B82Y20/00 , G03F7/70033 , H01S3/0007 , H01S3/107 , H01S3/2232 , H01S3/235 , H01S5/02284 , H01S5/0654 , H01S5/06837 , H01S5/0687 , H01S5/141 , H01S5/3402 , H01S5/4012 , H01S5/4062 , H01S5/4087
摘要： An extreme ultraviolet light source apparatus comprises a laser apparatus having a master oscillator outputting one or more longitudinal-mode-laser lights, an amplifier with a molecular gas as an amplifying agency amplifying a longitudinal-mode laser light of which wavelength is included in one of amplifiable lines, and a controller adjusting the master oscillator so that the wavelength of the longitudinal-mode laser light outputted from the master oscillator is included in one of the amplifiable lines, the laser apparatus being used as a driver laser, wherein the laser apparatus irradiates a target material with a laser light for generating plasma, and the extreme ultraviolet light is emitted from the plasma and outputted from the extreme ultraviolet light source apparatus.
摘要翻译：一种极紫外光源装置包括具有输出一个或多个纵模式激光灯的主振荡器的激光装置，具有分子气体的放大器作为放大器，放大其中包含波长的纵模式激光，以及调节主振荡器的控制器，使得从主振荡器输出的纵模激光的波长包括在可放大线之一中，激光装置用作驱动激光器，其中激光装置照射具有用于产生等离子体的激光的目标材料，并且从等离子体发射极紫外光并从极紫外光源装置输出。

73. 发明申请

US20100171049A1 Extreme ultraviolet light source apparatus 有权
标题翻译：极紫外光源设备
公开(公告)号：US20100171049A1
公开(公告)日：2010-07-08
申请号：US12382964
申请日：2009-03-27
申请人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani , Osamu Wakabayashi
发明人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani , Osamu Wakabayashi
IPC分类号： H05G2/00 , G01N21/00
CPC分类号： H05G2/003 , H05G2/008
摘要： An EUV light source apparatus can reliably detect and accurately judge deterioration of an optical element in a laser beam focusing optics disposed within an EUV light generation chamber. This EUV light source apparatus includes: the EUV light generation chamber; a target material supply unit; an EUV light collector mirror; a driver laser; a window; a parabolic mirror which focuses collimated laser beam by reflection and is disposed within the EUV light generation chamber; an energy detector detecting energy of the laser beam diffused without being applied to a target material after being focused by the laser beam focusing optics when the EUV light is not generated; and a processing unit for judging the deterioration of the window and the parabolic mirror according to the laser beam energy detected by the energy detector.
摘要翻译： EUV光源装置可以可靠地检测并准确地判断设置在EUV光生成室内的激光束聚焦光学元件中的光学元件的劣化。该EUV光源装置包括：EUV光产生室; 目标材料供应单位; EUV集光镜; 驱动激光器一个窗口; 抛物面镜，其通过反射聚焦准直激光束并设置在EUV光产生室内; 能量检测器，当不产生EUV光时，检测在被激光束聚焦光学器件聚焦之后不会施加到目标材料上的激光束的能量扩散; 以及处理单元，用于根据由能量检测器检测的激光束能量来判断窗口和抛物面镜的劣化。

74. 发明申请

US20100117009A1 EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE AND CONTROL METHOD FOR EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE 有权
标题翻译：极光超紫外光源设备及超紫外光源设备的控制方法
公开(公告)号：US20100117009A1
公开(公告)日：2010-05-13
申请号：US12612861
申请日：2009-11-05
申请人： Masato Moriya , Osamu Wakabayashi
发明人： Masato Moriya , Osamu Wakabayashi
IPC分类号： G21K5/00 , H01S3/10 , H01J7/30
CPC分类号： H05G2/008 , H01S3/0007 , H01S3/005 , H01S3/0064 , H01S3/08095 , H01S3/1305 , H01S3/1307 , H01S3/2232 , H01S3/2308 , H01S3/2316 , H05G2/003
摘要： [Problem]An extreme ultraviolet light source device in accordance with the present invention corrects an optical performance of a laser beam in an appropriate manner.[Means for Resolution]A guide laser beam that has an optical axis and a beam diameter substantially equivalent to those of a driver pulsed laser beam is introduced into an amplification system 30 that amplifies a laser beam that is output from a driver laser oscillator 20. The guide laser beam is output from a laser device 50 as a continuous light, and is introduced into a light path of the driver pulsed laser beam via a guide laser beam introduction mirror 52. A sensor 44 detects an angle (a direction) of a laser beam and a variation of a curvature of a wave front. A wave front correction controller 60 outputs a signal to a wave front correction part 34 based on a measured result of a sensor 36. The wave front correction part 34 corrects a wave front of a laser beam to be a predetermined wave front according to an instruction from the wave front correction controller 60.
摘要翻译： [问题]根据本发明的极紫外光源装置以适当的方式校正激光束的光学性能。 [分辨装置]具有光轴和与激光脉冲激光束的光束直径基本相等的光束直径的引导激光束被引入到放大从驱动激光振荡器20输出的激光束的放大系统30中。引导激光束作为连续光从激光装置50输出，并且通过引导激光束引入反射镜52被引入到驱动脉冲激光束的光路中。传感器44检测激光束的角度（方向）激光束和波前曲率的变化。波前校正控制器60基于传感器36的测量结果将信号输出到波前校正部34。波前校正部34根据指令将激光束的波前校正为预定波阵面来自波前校正控制器60。

75. 发明申请

US20090266495A1 FOLDABLE SCREEN DEVICE 有权
标题翻译：可折叠屏幕设备
公开(公告)号：US20090266495A1
公开(公告)日：2009-10-29
申请号：US12094274
申请日：2006-11-08
申请人： Shuuji Karasawa , Yoji Kamosawa , Masato Moriya
发明人： Shuuji Karasawa , Yoji Kamosawa , Masato Moriya
IPC分类号： E06B9/06
CPC分类号： E06B9/262 , E06B9/522 , E06B2009/2625
摘要： In a folding screen device pulled in the lateral direction, the widthwise dimension limit of the screen device in the opening and closing direction of the screen is eliminated. A plurality of screen units include movable vertical frame members attached to both ends of a screen expandable in an accordion manner. The vertical frame members are slidable along a lateral frame member of a building opening. Screen guides in the screen units move out and into the interior of the vertical frame member through upper and lower ends thereof in a bent state, and are led along upper and lower ends of the screen in an extended state. A parallel movement mechanism causes the vertical frame members to move in parallel during opening and closing of the screen. The screen units can be arranged in parallel in the building opening by connecting adjacent vertical frame members of the screen units.
摘要翻译：在横向拉伸的折叠屏幕装置中，屏幕装置在屏幕的打开和关闭方向上的宽度尺寸限制被消除。多个屏幕单元包括附接到以手风琴方式可展开的屏幕的两端的可移动的垂直框架构件。垂直框架构件可沿建筑物开口的侧框架构件滑动。屏幕单元中的屏幕导向件通过弯曲状态的上端和下端移出垂直框架构件的内部，并且在延伸状态下沿着屏幕的上端和下端引导。平行移动机构使得垂直框架构件在打开和关闭屏幕期间平行移动。屏幕单元可以通过连接屏幕单元的相邻垂直框架构件而平行地布置在建筑物开口中。

76. 发明申请

US20080115897A1 Screen Device 有权
标题翻译：屏幕设备
公开(公告)号：US20080115897A1
公开(公告)日：2008-05-22
申请号：US11813044
申请日：2005-12-27
申请人： Mitsuhiko Chino , Masato Moriya , Tetsuya Iida
发明人： Mitsuhiko Chino , Masato Moriya , Tetsuya Iida
IPC分类号： A47H3/00
CPC分类号： E06B9/24 , E06B9/52
摘要： A screen device includes an expandable and contractible folding screen connected to a side frame member and to a movable stile to be opened and closed, and a translation mechanism for the movable stile. The translation mechanism includes a single wire having three or more segments arranged in rows extending through the screen. The wire segments are redirected at an inlet to the movable stile, are guided along the length of the movable stile, are redirected in upper and lower areas of the movable stile, and are guided along the lateral frame members toward the opposite frame member, thereby the wire stretches between the movable stile and the opposite frame member the same number of times as the number of wire segments extending through the screen to absorb changes in the length of the wire segments extending through the screen in accordance with movement of the movable stile.
摘要翻译：屏幕装置包括连接到侧框架构件的可伸缩折叠屏幕和可打开和关闭的可移动平台以及用于可移动平台的平移机构。平移机构包括具有三个或更多个片段的单根线，该片段延伸穿过屏幕。线段在入口处被重定向到可移动立柱，沿着可移动立柱的长度被引导，被重定向在可移动立柱的上部和下部区域中，并且沿着侧向框架构件被引向相对的框架构件，由此导线在可移动平台和相对的框架构件之间延伸与通过屏幕延伸的线段的数量相同的次数，以吸收根据可移动立柱的移动延伸穿过屏幕的线段的长度的变化。

77. 发明申请

US20080073598A1 Extreme ultra violet light source apparatus 有权
标题翻译：极紫外光源装置
公开(公告)号：US20080073598A1
公开(公告)日：2008-03-27
申请号：US11902596
申请日：2007-09-24
申请人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani
发明人： Masato Moriya , Tamotsu Abe , Takashi Suganuma , Hiroshi Someya , Takayuki Yabu , Akira Sumitani
IPC分类号： H05G2/00
CPC分类号： H05G2/001
摘要： An EUV light source apparatus capable of preventing the efficiency of generation of EUV light from decreasing due to deterioration of a window of an EUV light generation chamber. The EUV light source apparatus includes an EUV light generation chamber provided with a window, a driver laser which generates a laser beam, a concave lens which enlarges the laser beam, a convex lens which collimates the enlarged laser beam, a parabolic concave mirror which is arranged in the EUV light generation chamber and reflects the collimated laser beam to collect the laser beam to a target material, a parabolic concave mirror adjusting mechanism which adjusts position and angle of the parabolic concave mirror, an EUV light collector mirror which collects EUV light, and a purge gas supply unit which supplies a purge gas for protecting the window and the parabolic concave mirror.
摘要翻译： EUV光源装置能够防止由于EUV光产生室的窗口的劣化导致的EUV光的产生效率降低。 EUV光源装置包括：具有窗口的EUV光产生室，产生激光束的驱动激光器，放大激光束的凹透镜;使激光束准直的凸透镜;抛物面凹面镜; 布置在EUV光产生室中，并且反射准直激光束以将激光束收集到目标材料上，调整抛物面凹面镜的位置和角度的抛物面凹面镜调节机构，收集EUV光的EUV聚光镜，以及净化气体供给单元，其供给用于保护窗口和抛物面凹面镜的吹扫气体。

78. 发明授权

US06572699B1 Method and apparatus for detecting melt level 有权
标题翻译：检测熔体水平的方法和装置
公开(公告)号：US06572699B1
公开(公告)日：2003-06-03
申请号：US09936515
申请日：2001-09-14
申请人： Masato Moriya , Tadayuki Hanamoto , Kazuhiro Mimura , Toshirou Kotooka
发明人： Masato Moriya , Tadayuki Hanamoto , Kazuhiro Mimura , Toshirou Kotooka
IPC分类号： C30B1520
CPC分类号： C30B15/26 , Y10T117/1004 , Y10T117/1008 , Y10T117/1032 , Y10T117/1068
摘要： A melt level detector is provided for detecting the melt level of a CZ furnace by triangulation. The laser beam (2) from a laser source (1) is moved in radial directions of a crucible (14) in the CZ furnace to find a location where a photodetector system (5, 7) can receive the reflection (4) from the melt level (3), and the laser beam (2) is fixed at the location. Since the measurements thus take place within an extremely small angular range of the laser beam, the melt level (3) can be detected with little effect of noise on the melt level (3) while eliminating complexity of the device.
摘要翻译：提供熔体水平检测器，用于通过三角测量来检测CZ炉的熔体水平。来自激光源（1）的激光束（2）在CZ炉中的坩埚（14）的径向方向上移动，以找到光电检测器系统（5,7）可以从其中接收反射（4）的位置熔体水平（3），激光束（2）固定在该位置。因为测量因此在激光束的非常小的角度范围内发生，所以可以在消除器件的复杂性的同时，在熔体水平（3）上检测到几乎没有噪声影响的熔体水平（3）。

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